近年來應用於表面增強拉曼散射(Surface-Enhanced Raman Scattering, SERS)上的技術發展快速，但是有很多的技術做出來的基板是需要昂貴的儀器才能夠完成的，因此，如何在低成本下，做出一個簡單的基板並且可以應用在SERS 上是很重要的。本研究是利用一些簡單、且低成本的方法做出一個具有奈米結構陣列的基板，其中包含了金奈米粒子的合成、奈米球微影技術、有機矽烷表面化學…等等，而在本實驗中合成了球形金奈米粒子、立方體形金奈米粒子以及星形金奈米粒子等三種不同形狀的金奈米粒子來製作金奈米粒子陣列。此外，還可以利用不同大小的奈米球來改變陣列的週期，之後再利用一些儀器來對製作出來的金奈米粒子和基板進行檢驗，包含了紫外可見光光譜儀、掃描式電子顯微鏡、穿透式電子顯微鏡、原子力顯微鏡。透過這些儀器的檢驗證明在本研究中利用的簡單方法可以成功的製作出不同週期大小的奈米結構陣列的基板，之後再將做出來的基板利用拉曼光譜儀進行鑑定，證明此基板可以有效的增強分子的拉曼訊號。

Surface-enhanced Raman scattering (SERS) has been developed rapidly for multidisciplinary applications in recent years. However, it is significant to make the
efforts to design a fabrication process for simple and low-cost SERS substrates. SERS substrates fabricated using relatively common and inexpensive approaches still remains challenging. In this study, a convenient method based on combination of the synthesis of gold nanoparticles, nanosphere lithography, organosilane
chemistry was developed to produce nanostructure array substrates. Besides, three types of gold nanoparticle with different shapes, including Au nanospheres, Au
nanocubes and Au nanostars, can be used to fabricate nanoparticle array substrates. Different size of nanospheres as templates determines the array periodicity of organosilane nanostructures which facilitate selective adsorption of gold nanoparticles. UV-Visible spectroscopy, scanning electron microscopy (SEM),
transmission electron microscopy (TEM) and atomic force microscopy (AFM) enable characterization of gold nanoparticle arrays. From the results, we can successfully produce different periodic nanostructure array substrates by simple fabrication process. Such substrates can be proved to enhance signal of the SERS.

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