本文介紹一個虛擬晶圓廠模擬平台 （Virtual Fab Simulation Platform, VFSP） 之建構，以及VFSP在12吋晶圓廠全廠自動化之應用。VFSP 是一套具有高度彈性與效率的晶圓廠模擬工具，可用來探討晶圓廠在計劃以及實際運作階段時所面臨到的相關議題。VFSP使用三層式架構，所以在維護上非常容易，本研究中的VFSP整合了製程系統與自動化物料搬運系統（Automated Material Handling System , AMHS）。VFSP的高度彈性，讓使用者可以更輕易的改晶圓廠參數設定，並調整不同的投料策略與機台派工，實驗設計確定後，VFSP 可有效率的進行實驗，並收集與分析系統產出資料。
　　在本研究中所使用的晶圓廠機台與產品製程資料，是由Campbell於2000年所發表300 mm Factory Layout and Material Handling Modeling：Phase II Report （以下簡稱I300I Phase II Report）中所提供。將這些資料輸入進VFSP，然後使用VFSP產生一個包含自動化物料搬運系統的12吋晶圓廠模擬模型，接著將VFSP的產出資料與I300I Phase II Report的產出結果相互比較。經過確認後，VFSP的產出結果與I300I Phase II Report的產出結果，沒有充分的證據顯示兩個系統有顯著的差異。
　　第二部份的研究，主要是在討論VFSP的自動化物料搬運系統考量與否。經過實驗後發現，未包含自動化物料搬運系統的模型，其平均Cycle Time較有考量自動化物料搬運系統的模型低4.6%。同樣的在比較平均WIP量時，未包含自動化物料搬運系統的模型，其平均WIP量較有考量自動化物料搬運系統的模擬模型低4.7%。

　　This paper presents a virtual fab simulation platform （Virtual Fab Simulation Platform, VFSP） that provides an efficient and flexible modeling tool to investigate various production issues during planning and implementation phases of 300mm wafer fabrication. The VFSP with three-tier system architecture is aimed to address full-fab automation integrating manufacturing process and automated material handling system （AMHS）. Several simulation experiments are conducted to demonstrate the potential applications of the VFSP.
　　In this study, the simulation study of wafer fab consider both models with AMHS and without AMHS functions. The simulation results show the average cycle time of model without AMHS function is 4.6% smaller than the model with AMHS function. Similiarly, the average WIP of model without AMHS function is 4.7 % less than the model with AMHS function.

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姜林杰祐、張逸輝、陳家明、黃家祚，（民90），系統模擬eM-Plant操作與實務，華泰文化事業股份有限公司。
莊達人，（民87），VLSI製造技術，高立圖書有限公司。
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