本文主要研究為振鏡掃描系統之控制。藉由機構之幾何關係，找出工作平面座標與兩軸馬達軸座標之運動學關係式，並分析伺服馬達系統之系統動態求其參數。最後利用順滑控制律，使雷射光點(End-effector)追蹤命令軌跡。本文之運動軌跡命令是利用非均勻有理B樣條曲線(NURBS Curve)讀取工程圖檔之座標點進行路徑運動命令規劃。相較於多項式軌跡規劃或分段多項式軌跡規劃(例；Cubic Spline)，其特色為不通過控制點且具有區域調變性，利用其區域調變性之性質在未來也可以達到感測器回授即時規劃修正路徑。而NURBS曲線之有理特性，可使其擬合幾何圖形更為貼近。為了使其滿足實際物理限制需求，本文將NURBS曲線之控制點以及節點向量加以修正，使速度與加速度項之初始條件與邊界條件滿足物理限制。
實驗完成了從工程圖檔輸出至NURBS規劃路徑再經由逆向運動學產生馬達運動命令並使用工研院開發之EPCIO六軸運動控制卡與Panasonic伺服馬達做為實驗硬體實現軌徑軌跡追蹤。本文涵蓋了從運動學座標轉換、路徑規劃以及控制器設計之運動控制系統架構並分為此三部分。並將此三部分獨立分開，可以分別應用於不同的機械系統以及多維的路徑。而NURBS除了描述二維平面軌跡也可以應用於三維軌跡之中，三維機械結構系統如三軸平台以及機械手臂等皆可應用。

The aims of this paper is to investigate how trajectory be planned and sliding mode work in the galvanometer scanning system.We could obtain the coordinate relationship between the work space and the rotation of motor by geometric study. After getting that, the pathway on work space would be designed with the method of Non-Uniform B-Spline(NURBS).Therefore the pathway on the work space coordinate could be translated to the rotational space of motor.Once the rotational coorditional pathway has be calculated by NURBS, the motor could be controlled by slinding mode control law.The order of NURBS curves are user-defined. However, the continuos performance of curve must have aleast fourth order.That could guarantee that all the position, velicity and acceleration are smooth and continuous.It means the end-effector of the mechanical system would correspond with the physical phenomenon.

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