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研究生: 黃仲楠
Huang, Zhong-Nan
論文名稱: 多軸雷射披覆之三維雷射對位感測器研究
A study of the 3D laser position sensor for multi-axis laser cladding
指導教授: 林震銘
Lin, Jehn-Ming
學位類別: 碩士
Master
系所名稱: 工學院 - 機械工程學系
Department of Mechanical Engineering
論文出版年: 2021
畢業學年度: 109
語文別: 中文
論文頁數: 148
中文關鍵詞: 雷射披覆 、光學對位 、散射分析 、光束追蹤 、頻率響應
外文關鍵詞: Multi-axis Laser Cladding, Optical Positioning, Scattering Reflection Analysis, Ray Tracing, Frequency response
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  • 本研究使用散射錐體及光敏電阻開發三維雷射對位感測器,此裝置相較於傳統位置傳感器較不受暗電流及方向性等因素所影響。研究中使用圓錐體之漫射特性對雷射束進行散射計算分析,搭配於四個方向的光敏電阻量測散射光強度之訊號。再透過四向的感測訊號進行五軸雷射對位測試,藉此提升多軸雷射披覆及相關複合加減法製程中的光學空間對位精度。
    在數值分析方面,使用Tracepro軟體對錐體感測器進行光路追蹤,並對光敏電阻受光面進行輻照度分析,以了解感測器內的雷射能量分布。接者帶入模擬之光強度值,計算電路訊號並進行實驗比較。透過訊號差分法達成輸出訊號之線性關係,並建立實際光斑外型及幾何誤差的校正方法。感測器的靜態精度特性,在雙軸水平位移及三軸斜向角度之解析度分別為0.01mm及0.1°。在感測電路中的系統截止頻率為200Hz。最後進行馬達回授定位控制,在訊號濾波修正後系統控制精度為±0.05mm,過程中減少系統震盪,以及縮短系統復歸收斂時間。

    In this study, the three-dimensional conical position sensor will be developed for five-axis laser cladding system. The positioning sensor equipped with a cone of the scattering surface to reflect the laser beam onto four light dependent resistors (LDR) to measure the spatial signals.

    Tracepro software was used to simulate the ray path and analyze the irradiance/power distribution on LDR. Comparing the experimental and simulated signal phenomena, it was found that the LDR signal will change symmetrically, but it would be affected by the shape of the laser spot and the other geometrical errors. With the signal difference method, the linear output signal and the influence of the fixed error caused by the hardware was reduced. It was found that the linear characteristic of the sensor corresponding to the light source energy and the spot size. The static accuracy of the sensor is linear with the angular resolutions of 0.01mm and 0.1°, respectively. According to the dynamic response of the sensing system to the laser frequency, the cut-off frequency of the sensing system is about 200 Hz. Finally the position feedback control system was tested. The accuracy of the system is ±0.05mm after signal filtering, which also reduced the system error and shortened the system settling time.

    摘要 I Extended Abstract II 誌謝 IX 目錄 X 表目錄 XVI 圖目錄 XVIII 符號說明 XXIV 第一章 緒論 1 1.1 研究背景與目的 1 1.2 文獻回顧 3 1.2.1 雷射斜向披覆研究 3 1.2.2 PSD空間定位應用 5 1.2.3 光束追蹤相關文獻 8 1.2.4 雷射追蹤相關文獻 8 1.2.5 空間對位感測技術相關文獻 10 1.3 研究動機及方法 11 1.4 本文架構 12 第二章 應用理論 14 2.1 基本光學術語定義 14 2.1.1 輻度學及光度學常見符號 14 2.1.2 介質邊界基本光學特性 17 2.2 分光錐面光學特性 18 2.2.1 散射幾何及定義 18 2.2.2 朗伯餘弦定理 20 2.2.3 雙向反射分布函數散射模型 21 2.2.4 總散射度計算 23 2.3 齊次位置轉換矩陣 24 2.4 雷射於斜板上的光束特徵 26 2.5 位置感測器之光電元件原理 27 2.6 感測電路原理 29 2.6.1 光敏電阻之工作原理 29 2.6.2 光電訊號轉換公式 31 2.7 Tracepro影像平滑化處理 32 2.7.1 均值濾波 33 2.7.2 高斯濾波 33 第三章 數值分析 35 3.1 感測光路模擬 35 3.1.1 Tracepro軟體簡介[17] 35 3.1.2 Solidworks建構感測器模型 37 3.2 光路模擬描述與基本假設 38 3.2.1 材料性質設定[17] 39 3.2.2 光源條件設定 40 3.2.3 光束追蹤 41 3.2.4 光敏電阻受光情形 42 3.3 靜態誤差感光特性 44 3.3.1 水平(X、Y)誤差分析 45 3.3.2 斜向(α、β)誤差分析 47 3.3.3 混合誤差分析 50 3.3.3.1 水平(X、Y)及斜向(α、β)混合誤差分析 50 3.3.3.2 水平(X、Y)及垂直轉角(γ)混合誤差分析 55 3.4 模擬結果與討論 58 第四章 實驗 61 4.1 實驗設備規劃與感測器設計製作 61 4.1.1 雷射定位檢測實驗設備配置 61 4.1.2 雷射光源條件 62 4.1.3 光錐式感測器設計 64 4.1.4 多頻道圖示紀錄儀 65 4.1.5 感測電路設計 66 4.1.6 訊號回授控制模組 67 4.1.7 雷射對位感測模組 68 4.2 光錐式感測器校正 69 4.2.1 光軸垂直校正 70 4.2.2 對稱中心及感測電路校正 70 4.2.3 對向差分法 71 4.3 感測器靜態誤差實驗 71 4.3.1 實驗配置 71 4.3.2 水平(X、Y)誤差實驗 72 4.3.3 斜向(α、β)誤差實驗 75 4.3.4 混合誤差實驗 77 4.3.4.1 水平(X、Y)及斜向入射(α、β)混合誤差 77 4.3.2.2 水平(X、Y)及垂直轉角(γ)混合誤差 80 4.4 光斑能量對感測訊號之影響 85 4.4.1 雷射光源能量對差分訊號之影響 85 4.4.2 光斑大小對差分訊號之影響 88 4.5 靜態感測特性說明 92 4.6 感測系統頻率響應 94 4.6.1 分壓訊號頻率響應 94 4.6.2 差分訊號頻率響應 97 4.6.3 Arduino讀取頻率 101 4.7 感測與馬達控制系統整合 104 4.7.1 回授控制流程 104 4.7.2 馬達控制精度及誤差確認 105 4.7.3 感測訊號初步回授 108 4.8 感測控制系統回授 110 4.8.1 系統校正曲線 110 4.8.2 目標範圍 112 4.8.3 動態回授 114 4.8.4 目標復歸時間比較 117 4.9 動態感測及回授控制特性說明 118 4.10 結果與討論 119 第五章 結論 125 5.1 綜合討論 125 5.2 相關建議與未來發展 130 參考文獻 132 附錄A 135 附錄B 137 附錄C 141 附錄D 142 附錄E 144

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