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研究生：	維克拉姆 Sachan, Vikram
論文名稱：	DMDs均光照明系統優化與製作 Fabrication and Optimisation of Fly’s Eye UV LED Homogenizer for DMDs
指導教授：	李永春 Lee, Yung-Chun
學位類別：	碩士 Master
系所名稱：	工學院 - 機械工程學系 Department of Mechanical Engineering
論文出版年：	2018
畢業學年度：	106
語文別：	英文
論文頁數：	72
外文關鍵詞：	UV LED homogenizer, moulding, microlens array, Digital micro mirror devices (DMDs), Zemax optics studio, energy efficiency.
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Many applications in UV photolithography manufacturing like semiconductor lithography, micro-machining, micro-structuring or material analysis require a homogeneous intensity distribution of the UV light over its complete profile. Periodic microlens arrays are widely used to transform Gaussian or non-uniform beam profile into a uniform “flat-top”. Each microlens element samples the input beam and spreads it over a given angular distribution. Incoherent beams that are either temporally or spatially incoherent can produce very uniform intensity profiles. UV machining techniques are almost ubiquitous in industry for micro- to nanoscale fabrication. It is essential for the advancement of the field that is faster and cheaper to processes. Enhancements in speed and fidelity of production can be made to both additive and subtractive writing techniques by using Digital Micro Mirror Devices (DMD).
A UV LED homogenizer is fabricated by the moulding process which can homogenize Intensity distribution of the non-collimated UV LED light source for Digital Micro Mirror Devices (DMDs). The PDMS Microlens arrays of sag height 100 μm are fabricated on the surface of Quartz plate which is thick as 10 mm. An illumination system (upside down) has been developed which can produce the intensity distribution of homogenised UV LED light source. The illumination system consists of UV LED light source, three aspherical lenses, Microlens homogenizer, Fourier lens and energy metre connected to the pinhole power analyser. The pinhole power analyser is fixed on the XY moving stage. Finally, the homogenized and collimated UV LED light source profile is recorded by the pinhole power analyser. The recorded data is plotted and analysed in Matlab and then compared with the Zemax simulation results. An integrated sphere is then used to analyse the power output of UV LED light, power before homogenization and at the homogenization plane. Energy efficiency is then calculated to compare with simulated results. Measured uniformity of the flattop intensity profile is measured as ± 3.1 % experimentally.

I. Abstract……………………………………………………….…………….1
II. Acknowledgement……………………………………....……………….…3
III. List of Tables……………………………………………………………….6
IV. List of Figures………………………………………………………………7
CHAPTER - INTRODUCTION .................................................................................... 12
1 HISTORY OF HOMOGENIZER ........................................................................................ 12
1.1 Laser Beam Homogenizer ................................................................................ 12
1.2 Geometrical description of microlens beam homogenizer ............................... 13
1.3 Fly’s Eye Homogeniser Application (Laser Micro Machining) ....................... 17
2 FREEFORM MICROLENS ARRAY HOMOGENIZER FOR EXCIMER LASER BEAM SHAPING .. 19
2.1 Design considerations of microlens array homogenizer ................................... 19
2.2 Basic design considerations .............................................................................. 20
3 MASKLESS LITHOGRAPHY BASED ON DMD ................................................................ 21
4 PROBLEM STATEMENT ................................................................................................ 24
CHAPTER - SIMULATION AND FABRICATION OF UV LED FLY’S EYE HOMOGENIZER .................................................................................................................... 25
1 LENS SIMULATION IN ZEMAX OPTICS STUDIO (PROCESS DESCRIPTION IN DETAIL) ....... 26
2 DESIGN AND FABRICATION OF FLY’S EYE HOMOGENIZER MOLD AND MOLDING SYSTEM IN SOLIDWORKS. .................................................................................................................. 37
3 FABRICATION OF FLY’S EYE HOMOGENIZER SYSTEM AND MOLDING PROCESS ............. 39
3.1 Molding process ............................................................................................... 41
4 HOMOGENIZER’S MICROLENS PROFILE MEASUREMENTS AND COMPARISON WITH SIMULATED ZEMAX MICROLENS PROFILE ............................................................................. 42
4.1 Profile Comparison of profiles of a steel mold diagonal cross section with the simulated profile of microlens in the Zemax optics studio ............................................ 43
4.2 Profile comparison of homogenizer single lens profile with corresponding mold microlens profile (5 different positions) and Zemax microlens function .............. 44
CHAPTER - EXPERIMENTAL SETUP ....................................................................... 47
1 OPTICAL SYSTEM ........................................................................................................ 47
1.1 UV LED ............................................................................................................ 48
1.2 Fly’s eye of homogenizer ................................................................................. 50
1.3 Pinhole (0.50 μm) Power Analyser .................................................................. 51
2 AUTOMATIC STAGE SYSTEM ........................................................................................ 52
3 PROJECTION SYSTEM ................................................................................................... 55
CHAPTER - EXPERIMENTAL RESULTS .................................................................. 57
1 COMPARISON OF OPTIMIZED ZEMAX OPTICS SIMULATED RESULTS WITH EXPERIMENTAL RESULTS...................................................................................................... 60
2 ENERGY EFFICIENCY MEASUREMENT OF HOMOGENIZER ............................................ 62
2.1 Simulated Energy Efficiency ............................................................................ 62
2.2 Experimental Energy Efficiency ...................................................................... 62
3 METHODOLOGY USED FOR CALCULATING ENERGY EFFICIENCY ................................ 63
3.1 Reason for the difference in simulated and experimental energy efficiency analysis - ......................................................................................................................... 64
4 UNIFORMITY IN THE TARGETED AREA ......................................................................... 65
5 ANGULAR DISTRIBUTION ON THE HOMOGENIZATION PLANE ....................................... 66
CHAPTER - CONCLUSION AND FUTURE WORK ................................................. 69
1 CONCLUSION ............................................................................................................... 69
2 FUTURE WORK ............................................................................................................ 69
- REFERENCES AND LINKS ...................................................................................... 71
                                    

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