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研究生：	翁志遠 Weng, Chih-Yuan
論文名稱：	介電泳場流分離法之數值模擬與實驗研究 Numerical Simulation and Experimental Study of Particle Separation by DEP Field-Flow Fractionation
指導教授：	呂宗行 Leu, Tzong-Shyng
學位類別：	碩士 Master
系所名稱：	工學院 - 航空太空工程學系 Department of Aeronautics & Astronautics
論文出版年：	2007
畢業學年度：	95
語文別：	中文
論文頁數：	163
中文關鍵詞：	波動漂浮、數值模擬、粒子聚焦、指叉型電極、粒子追蹤測速法、介電泳力、場流分離法、不均勻電場
外文關鍵詞：	interdigitated microelectrodes, numerical simulation, dielectrophoretic, DEP-FFF, PTV, Wavy levitation, nonuniform electric field
相關次數：	點閱：90 下載：1
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介電泳場流分離法(DEP Field-Flow Fractionation, FFF)是一種結合介電泳力與流體力兩種力之細胞分離方法，使不同介電性質粒子受介電泳力作用漂浮到流場中不同高度，進而利用流場內速度不同而分離細胞。本研究主要是以微機電製成加工技術(MEMS fabrication)於玻璃基底上製作指叉型電極(Interdigitated microelectrodes)，並利用其產生不均勻電場(Nonuniform electric field)，使粒子受負介電泳力作用而漂浮。對此本研究在無上壁面及不同之電極寬度d1與鄰近兩電極間距寬度d2比例的情況下，根據介電泳力與其粒子所受重力平衡條件，利用解析方法推導出粒子漂浮高度近似解，同時使用數值模擬方法計算出粒子的漂浮高度，與解析近似解相比較。結果顯示當d1：d2=1：1時，近似解有最大的適用範圍，且在數值模擬及實驗中也發現不均勻電場會造成「粒子波動漂浮」的現象。本研究也利用上壁面存在的邊界條件下，模擬探討有限的管道高度對粒子的漂浮高度的影響。
本研究亦設計不同形式之電極並實驗探討其對粒子漂浮高度的影響。經由實驗與模擬結果比較後，發現當粒子漂浮高度在波動漂浮區域h/d＜0.6之範圍時，實驗與理論近似解會有大於10微米的差異，同時在此區域中也觀察到粒子會有波動漂浮的現象；而當粒子漂浮高度在漂浮高度及電極寬度比h/d＞0.6之範圍時，實驗與理論近似解結果吻合誤差僅3至10微米。
最後，本研究成功的設計出單邊粒子聚焦式指叉型電極實驗晶片，並藉由模擬軟體瞭解了本晶片之作用機制及實驗現象也得以解釋，經實驗證實本晶片之設計將能使粒子聚焦及改善波動漂浮的情形達到有效分離的效能。

By taking advantage of dielectrophoretic (DEP) and hydrodynamic forces, DEP Field-Flow Fractionation (FFF) technique is firstly used DEP force to levitate particles to different heights according to their different dielectric properties. Based on the parabolic velocity profile of channel folw field, particles could be separated by height or velocity difference. In this study, MEMS-fabricated interdigit microelectrodes were used to generate the non-uniform electric fields. The approximate analytical solution by balancing dielectrophoretic forces with the gravitational forces is introduced. One can obtain the approximate solution of the levitation height. At the same time, numerical simulation was compared with the approximate solution. The results indicated the first-order approximate solution has the maximum working range in numerical results as the ratio of electrode width and gap equals 1. The phenomenon of wavy levitated particles was revealed from both numerical simulation results and experiments. And the levitation heights with finite channel height have also been investigated.
In experimental results, different shapes of electrodes were designed to investigate the levitation heights. By comparing the results of experiment and the approximate solution, the phenomena of wavy levitated particles were discovered by experiments and the discrepancies between numerical simulation and approximated analytical solution showed more than 10 micrometer when the ratio of levitated height and electrode width was smaller than 0.6. Once when the ratio of levitated height and electrode width was larger than 0.6, the discrepancies between numerical simulation and approximated analytical solution showed only 3 micrometer to 10 micrometer.
Based on the DEP theories, the device of the single-side focusing interdigitated microelectrodes could achieve the purpose of gathering particles and improving wavy levitation. Through numerical simulation, the working principle of single-side focusing interdigitated microelectrodes and the results of experiments could be realized and explained.

摘要----------I
Abstract----------III
誌謝----------V
目錄----------VII
表目錄----------XII
圖目錄----------XIII
符號表----------XVIII
第一章緒論----------1
1-1 前言----------1
1-2 介電泳力之應用----------3
1-2-1 介電泳種類----------4
1-2-1-1 一般介電泳----------4
1-2-1-2 電轉----------4
1-2-1-3 旅波式介電泳----------4
1-3 介電泳分離晶片----------5
1-3-1 介電泳移動法(DEP migration)----------5
1-3-2 介電泳固定法(DEP retention)----------6
1-3-3 介電泳場流分離法(DEP field-flow fractionation)------6
1-4 文獻回顧----------7
1-5 研究動機與目的----------12
第二章理論----------17
2-1 介電泳力原理----------17
2-1-1 偶極矩的產生----------17
2-1-2 不均勻電場產生----------19
2-2 介電泳場流分離法原理----------20
2-2-1 重力----------21
2-2-2 介電泳力----------21
2-2-3 粒子漂浮高度----------23
2-3 理論計算----------24
第三章介電泳場流分離法之數值模擬----------33
3-1 流場模組 (Flow Module)----------34
3-1-1 流體之質量守恆----------34
3-1-2 流體之動量守恆----------34
3-2 粒子模組 (Spray module)----------35
3-3 電場之模式 (Electric module)----------36
3-4 介電泳力之模式----------37
3-5 數值模擬----------38
3-5-1 網格密度測試----------39
3-5-2 二維粒子漂浮模擬----------40
3-5-2-1 電極寬度d1與電極間寬度d2相等之探討----------40
3-5-2-2 電極寬度d1與電極間寬度d2不相等之探討----------41
3-5-3 電極寬度d1與電極間寬度d2相等時波動漂浮情形之探討---43
3-5-4 理論近似解之高階項探討----------46
3-5-5 有限管道高度之二維粒子漂浮模擬----------47
第四章晶片製作與實驗設備----------72
4-1 介電泳晶片設計----------72
4-1-1 傳統式指叉型電極之設計----------73
4-1-2 斜式與水平式指叉型電極之設計----------73
4-1-3 單邊粒子聚焦形式指叉型電極之設計----------74
4-2 介電泳晶片製程簡介----------74
4-2-1 晶片清潔----------75
4-2-2 微影製程----------75
4-2-3 金屬層沉積----------76
4-2-4 金屬濕式蝕刻技術----------77
4-2-5 微流道製作----------78
4-2-6 介電泳晶片與微管道接合----------79
4-3 實驗設備----------79
4-3-1 輸入信號控制系統----------80
4-3-2 微/奈米粒子種類----------81
4-4 實驗方法與初步測試----------81
第五章實驗結果與討論----------114
5-1 傳統式指叉型電極之實驗晶片測試----------115
5-2 斜式及水平式指叉型電極之實驗晶片測試----------116
5-3 新型單邊粒子聚焦式指叉型電極之實驗晶片測試----------119
5-3-1 Type 1型實驗晶片測試----------119
5-3-2 Type 2型實驗晶片測試----------120
5-4 粒子聚焦式電極之數值模擬----------122
5-4-1 粒子聚焦式電極x方向之電場平方梯度比較----------123
5-4-2 粒子聚焦式電極y方向之電場平方梯度比較----------124
5-4-3 粒子聚焦式電極z方向之電場平方梯度比較----------125
第六章結論----------152
6-1 結論----------152
6-2 未來工作----------154
參考文獻----------155
附錄----------160
A.d1：d2=1：1情形下，考慮高次項計算粒子漂浮高度--------160
B.d1：d2=1：X情形下，考慮高次項計算粒子漂浮高度--------162
                                    

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