本研究開發一種創新的奈米壓印系統與壓印方法，利用紫外光固化之奈米壓印製程技術，搭配環狀氣壓缸控制接觸壓力，與一壓克力複合可撓性模具，可應用於圖案化藍寶石基板 (Pattern Sapphire Substrate, PSS)、抗反射結構 (Moth’s - Eye)、複合模壓印、光通訊結構…等製程。實驗中使用一具有上、下兩獨立運動軸之機台、壓克力複合可撓性模具(Composite mold)、紫外光固化之阻劑膠 (UV-curable resist resin)、與不同大小尺寸的基板、多環狀氣壓控制系統，完成此一壓印製程。實驗中根據可撓式模具的柔軟特性，能完整貼覆於翹曲的基板上，提升壓印製成在大面積的可行性，改善傳統硬質壓印模具之高成本及低良率的問題，提升奈米壓印技術在產業應用上的可行性與廣泛性。另外，紫外光固化之壓印製程有著製程快速及常溫操作的優點，因此非常適合應用於量產的製程。在壓力控制方面，搭配多點陣列之平面壓力感測器來量測壓印時接觸面之壓力，以得到實際的壓力分布，最後搭配機台上下兩軸運動以及五門氣壓缸之個別獨立控制，可以找到最佳的壓印參數。
本文成功在六吋玻璃上製作線寬2 um、週期3 um、柱高2 um、殘留層僅30 nm之柱狀光阻結構，以及線寬150 nm、週期300 nm之光阻孔洞結構與具各種尺寸之複合結構；壓印完成後可獲得均勻度佳、壓印面積大之壓印結果。

This thesis develops a new imprinting system which is based on a flexible mold for ultraviolet (UV) nanoimprint lithography. This imprinting system can be applied to pattern sapphire substrate (PSS), anti-reflection structure (Moth’s – Eye), linear grating structure… processes. The imprinting equipment includes two independent loading axes, a composite flexible mold, UV-curable resist, a substrate, and a multi-ring barometric pressure system. Due to the deformable and flexible characteristic of the soft molds, it is possible to achieve a conformable contact with substrates. Using flexible molds can significantly improve the yield of imprinting processes and reduce the cost. On the other hand, UV nanoimprint has the advantages of large patterning area, high throughput, and room operating temperature, which make it highly suitable for mass production. In this work, multi-points pressure sensing sheet is used to measure the contact pressure during imprinting process. Perfect imprinting parameters can be determined experimentally
This thesis completes 6” wafer imprinting of pillar structures with 2 um in diameter, 3 um in period, and 2 um in height, and only 30nm of residual layer is observed. We also complete arrayed micro-hole structures with 150 nm in diameter and 300 nm in period, as well as many composite structure with different sizes of structures. The PDMS imprint molds are duplicated from a hard silicon mold and therefore can be easily produced at low cost. By using this imprinting system we can get the results of good uniformity and big imprinting area.

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