批次間程序常見於半導體製造業中，其模式可用直線方程式來表示，其中截距項代表程序負載，斜率項為程序增益。相對於許多著重於負載擾動影響之研究，本文則探討當增益擾動發生時，批次間程序所受之影響以及相應之強健控制策略。
本論文首先說明指數加權移動平均(EWMA)及雙重指數加權移動平均(Double EWMA)批次間控制器可分別消除偏移或漂移型態增益擾動所造成的輸出偏位(offset)。另外，更提出類內模控制架構來處理任意型態增益擾動，並指出EWMA及Double EWMA控制器為其兩個特例。接著，該類內模控制設計被簡化為增益擾動預測器的參數設計，在滿足指定公式的情況下，確保達成無偏位輸出並且性能與強韌性均佳的強健批次間控制。
應用線性化原理，本論文發展出針對不確定量測時延的穩定強韌性判定法。當量測時延誤差為整數時，本法能根據時延邊限指標準確地判斷控制系統穩定性。然而當量測時延誤差為分數時，符合量測時延僅發生在部分批次的實際情況，本法亦可根據實際分數時延與時延邊限的差異性來評估並改善控制系統性能，此分數時延的有效性已由模擬研究獲得證實。

Run-to-run processes are often seen in semiconductor manufacturing. Their models can be expressed by straight-line equations, where the intercepts represent load disturbances and the slopes denote process gains. Unlike considerable research emphasizing the effects of load disturbances, the thesis investigates the influence of gain disturbances on run-to-run processes and the corresponding robust control strategy.
The thesis first illustrates that the exponentially weighted moving average (EWMA) and the double exponentially weighted moving average (Double EWMA) run-to-run controller can eliminate the output offset resulting from a gain disturbance of shift type and that of drift type, respectively. Furthermore, a quasi internal model control (IMC) structure is proposed to deal with gain disturbances of any type. It is indicated that the EWMA and the Double EWMA controller are two special cases of the structure. The quasi IMC controller design is then simplified to the parameter design of a predictor for gain disturbances. By satisfying specified formulas, the design can achieve robust run-to-run control that ensures no-offset output as well as good performance and robustness.
Using the linearization theory, the thesis develops a method to evaluate stability robustness for uncertain measurement delay. When the error of measure delay is an integer, the method could determine the stability of the control system correctly based on the index of delay margin. However, when the error of measure delay is a fraction, corresponding to the practical condition where the measurement delay happens only to a portion of batches, the method could evaluate and improve the performance of the control system based on the distinction between the practical fractional delay and the delay margin. The effectiveness of fractional delay has been verified by simulation study.

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