奈米金屬結構的研究與製程是目前科技發展的熱門的課題之ㄧ。本論文中，我們將依據奈米球自組織微影術 (Nanosphere lithography; NSL)的原理，來製作金屬奈米結構。首先利用分子自組裝(self-assembly)的特性，製作出0.5µm、0.7µm、1.0µm、1.6µm及2.0µm的單層奈米球陣列。奈米球自組織微影術的最佳實驗參數也在本文中有系統性的研究。受限於現有實驗設備，最大均勻的單層奈米球排列面積可達為30mm x15 mm。另外，也可在線寬為60μm的特殊圖案溝槽內排列均勻單層的奈米球陣列。實驗結果也發現可藉由離子蝕刻將其尺寸縮小。利用吸收光譜來分析利用單層排列的奈米球陣列作為遮罩所製作出具有週期性排列、形狀近似三角形的Ag奈米陣列的薄膜可發現其具有區域表面電漿共振。其共振波長會隨金屬粒子粒徑降低而藍移，且會因粒子形狀不同而產生偏移。因此利用這個區域表面電漿共振的特性，我們將Ag奈米陣列成長在薄膜有機太陽能電池之表面可以得到比具有金屬Ti的奈米結構的元件有較高的光轉換效率。金屬Ag的奈米結構的表面電漿子散射應是較高的薄膜有機太陽能電池的轉換效率的可能因素之一。

Fabrications of metallic nanostructures are becoming increasingly important in a variety of scientific applications. In this dissertation, metallic nanoparticle arrays are fabricated using nanosphere lithography. A single layer of nanosphere arrays consisted of nanospheres with diameters of 0.5µm, 0.7µm, 1.0µm, 1.6µm, 2.0µm is utilized as the shadow mask for the metallic nanoparticles arrays. The optimized experimental conditions for the formation of nanosphere arrays are systematically studied. The maximum area of this single layer nsnosphere array can be obtained is approximately 30mm x15 mm limited by the current experimental instruments. It is also able to form a single layer of nanosphere arrays within a pre-patterned 60 m-wide trench. O2 plasma etching is also able to reduce the size of polystyrene nanospheres. The absorption spectra from Ag nanostructures fabricated with nanopshere lithography exhibit responses from localized surface plasmon resonant scattering (SPRS) from the Ag nanostructures. The observed localized surface plasmon resonance blue-shifted as the size of metallic nanoparticle decreased. The resonance also blue shifted as the shape of metallic nanoparticle changed from a triangular form to a circular form. The application of Ag nanostructures in organic solar cell is also investigated. The power conversion efficiencies of the solar cell with Ag nanoparticles (2.42%) are higher than the device with Ti nanoparticles (1.68%). Effect from the surface plasmon resonance scattering is a possible cause for this enhanced power conversion efficiency.

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