本研究利用RF射頻磁控濺鍍系統在不同氮氣通量下製備TaNbSiZrCr高熵合金鍍層於碳化鎢及矽晶片底材上，研究其結構、機械性質、磨耗性質、耐腐蝕性質及抗玻璃沾黏性質並將具有最佳性質之鍍層濺鍍於微鑽針上進行鑽削實驗，評估高熵合金鍍層用於鑽削工業的可行性。試片命名為RNx，其中x為氮氣通量除氬氣通量，熱處理過後的試片命名為HRNx。
高熵合金鍍層RN0非晶相，並隨著氮氣增加轉變為非晶相與奈米晶粒結合的複合相，結構經真空熱處理後有較明顯的BCC及FCC衍射峰出現。RN0至RN0.4的鍍層顯示無特色且緻密的斷面結構，RN0.5則顯示有些為柱狀晶的結構，但仍呈現緻密的斷面，熱處理過後的鍍層結構無明顯變化。隨著氮氣通量的上升，鍍層內金屬與氮鍵結也隨之升高，故硬度隨著氮氣通量上升而上升，並在RN0.5時有最高的硬度，熱處理過後硬度並沒有明顯的改變，說明鍍層熱穩定性高。
高熵合金鍍層經9000圈磨耗測試後，不論使用氮化矽球或鉻鋼球作為對磨材，鍍層皆破裂並露出底材，說明鍍層無法有效保護底材，但可觀察到隨著添加但的高熵合金鍍層磨耗率有下降的趨勢，說明通入氮氣可提升鍍層抗磨耗性質。RN0.5因其為柱狀結構較其餘鍍層鬆散，故磨耗率上升。熱處理組別亦顯示相同的趨勢。
根據不同的結構與金屬-氮鍵結含量，高熵合金鍍層在RN0.5有最低的腐蝕電流2.85×10-6 Amps/cm2，表示其具有最優異的耐腐蝕性，但未熱處理的高熵合金腐蝕電流均比碳化鎢底材高，說明高熵合金鍍層無法有效保護底材。熱處理的後的底材抗腐蝕性大幅的下降，而高熵合金鍍層則因表面形成較薄的氧化層，故有較優異的抗腐蝕性質。
抗玻璃沾黏試驗中，碳化鎢與RN0.5鍍層表面有嚴重的玻璃沾黏，產生沾黏原因分別為結合劑鈷及柱狀結構的關係，前者因鈷作為碳化鎢結合劑在高溫下易與玻璃產生介面反應，後者因柱狀結構提供易擴散元素擴散路徑，在沾黏實驗中，擴散至表面與玻璃產生嚴重的介面反應。RN0至RN0.4表現出良好的抗沾黏性。比較熱處理前後的試片接觸角變化可說明試片是否具有良好的熱穩定性，原材碳化鎢的變化最為劇烈，其餘高熵合金鍍層並沒有明顯的變化，說明高熵合金具有良好的熱穩定性。
以RN0.5作為保護鍍層披覆於微鑽針上進行鑽削實驗並與裸刀進行比較，鑽削約4000孔時，孔壁粗糙度與釘頭比已超過工業標準規範，說明以裸刀進行鑽削其壽命僅能達到2000孔，而披覆RN0.5鍍層的微鑽針鑽削6000孔後，其孔壁粗糙度與釘頭比已低於工業標準，說明披覆RN0.5可有效提升產品品質及刀具壽命。

In this study, the TaNbSiZrCr high entropy alloy nitrided coatings were deposited on tungsten carbide and silicon wafer by RF unbalanced magnetron sputtering system under various N2 flow. The coatings were named as RNx, where x =N2/Ar ratio. To simulate the glass molding process and investigate the property of annealed coatings, the coated sample were annealed at 750℃ for an hour named HRNx. The as-deposited coatings exhibit a nanocrystalline mixed amorphous structure and the cross-section images of shows the coating exhibited a dense and featureless structure except RN0.5 show a slight column structure. After annealing, the coatings structure change from BCC to FCC, and the cross section image show the same result as unannealed ones. The coating hardness increased as the nitrogen flow increased and the hardness has no obviously changed after annealing indicated the coatings exhibited excellent thermal stability. The result of tribological properties demonstrate that the nitrogen content in the HEA coatings can improve the wear rate except RN0.5 due to its column structure. The HEA coating can avoid glass sticking on the coating effectively besides RN0.5. For drilling performance on micro-drill, the RN0.5 coating can improve product quality and prolong the lifetime three times than uncoated micro-drill.

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