| 研究生: |
鄧湘榆 Teng, Shiang-Yu |
|---|---|
| 論文名稱: |
IC封裝元件之翹曲與托盤偏移現象之研究 Study of Process-Induced Warpage and Paddle-Shift Phenomena in IC Packaging |
| 指導教授: |
黃聖杰
Hwang, S. J. |
| 學位類別: |
博士 Doctor |
| 系所名稱: |
工學院 - 機械工程學系 Department of Mechanical Engineering |
| 論文出版年: | 2007 |
| 畢業學年度: | 95 |
| 語文別: | 中文 |
| 論文頁數: | 161 |
| 中文關鍵詞: | 翹曲 、托盤偏移 、P-V-T-C關係式 、固化反應 、熱膨脹係數 、殘留應力 |
| 外文關鍵詞: | Plastic Encapsulation, Mold Filling Analysis, Paddle Shift, P-V-T-C equation, warpage, IC package, cure shrinkage, Plastic Packaging of ICs |
| 相關次數: | 點閱:125 下載:9 |
| 分享至: |
| 查詢本校圖書館目錄 查詢臺灣博碩士論文知識加值系統 勘誤回報 |
隨著半導體元件輕薄短小的趨勢,在封裝製程中所產生的翹曲(warpage)與托盤偏移(paddle-shift)問題也日益受到重視。以往研究中,大部分均認為造成IC構裝元件翹曲的主要原因為構成材料之熱膨脹係數不同所造成的不均勻體積收縮,卻因此忽略了環氧樹脂(EMC)本身固化收縮的材料特性,因而造成利用電腦模擬分析時,容易低估成品翹曲量。本文將同時考量環氧樹脂之固化效應與溫度效應所造成的體積收縮,以建立一套分析封裝體翹曲的分析方法。在研究中用來描述環氧樹脂行為的關係式為P-V-T-C關係式,也就是將環氧樹脂因固化效應所造成的體積收縮行為表示成壓力(pressure)、體積(volume)、溫度(temperature)、熟化率(degree of cure)相關之方程式。而溫度效應所造成的環氧樹脂體積收縮量則考慮是由於構成封裝體的材料之熱膨脹係數不同所造成。
本文亦提出解決方案來預測於IC封裝充填製程所發生的托盤偏移現象。托盤偏移泛指導線架與晶片的變形偏移,過大的偏移可能會降低封裝體對於內部元件的保護效果,甚至還會影響到金線的偏移量。本文將建立一種分析方法來預測托盤偏移的程度,首先進行三維之封裝模擬以獲得膠體之流動波前與壓力分佈,接著自封裝模擬之結果檔中擷取不同歷程時導線架與晶片所受到來自塑料的壓力,並且將此壓力轉換到結構變形分析中以作為受力來源,最後即可獲得封裝體中托盤變形的程度。
在本文的最後則經由實際的工程案例來加以驗證所建立之分析方法的可行度,經由比對驗証實驗的結果與模擬分析的結果,証實本文所建立的翹曲分析方法與托盤偏移方法不僅具有經濟效益,亦有相當不錯的準確度。
Warpage problems play an important role in IC encapsulation processes. Previous researchers had focused on warpage analyses with temperature changes between constituent materials and neglected the cure shrinkage effects. However, more and more studies indicate that estimation of warpage according to CTE (Coefficient of Thermal Expansion) was not able to predict the amount of warpage in IC packaging. The EMC properties were obtained by various techniques: degree of cure by differential scanning calorimeter (DSC), modulus by P-V-T-C testing machine. These experimental data were used to formulate P-V-T-C equation.
The purpose of this study was to find out the method of warpage estimation due to P-V-T-C equation of EMC. In this study, mold filling analyses were conducted to predict cure content within models. Predicted warpage values were compared with experimental and numerical results.
With thorough investigation, the result showed that cure shrinkage of epoxy was a significant parameter for IC packaging warpage estimation. The P-V-T-C equation was successfully implemented to verify that warpage was governed by thermal shrinkage and cure shrinkage.
A methodology for computational modeling and prediction of paddle shift was also presented in this thesis. The methodology was based on modeling the flow of the polymer melt around the leadframe and paddle during the filling process, and extracting the pressure loading induced by the flow around the paddle. The pressure loading at different times during the filling stage was then applied to a three-dimensional, static, structural analysis module to determine the corresponding paddle deflections at those times.
By comparing the experimental results and simulation results, it was shown that the analytic simulation with decoupled flow and structure analyses could achieve good accurate and efficient prediction of paddle shift phenomena.
[1] Tummla, Rao R., Fundamentals of Microsystems Packaging, McGraw-Hill Companies, Inc., 1995.
[2] 陳立生, “薄型塑膠IC構裝翹曲問題探討”, 工業材料,114期,113~117頁,1996.
[3] Y. S. Chang, “Study of isothermal and Isobaric Volume Shrinkage for Epoxy Molding Compound”, Ph.D. Thesis, Dep. Of Mechanical Engineering, National Cheng Kung University, Tainan, Taiwan, 2005.
[4] C. C. Pei, “Wire Sweep and Paddle Shift Modeling of IC Packages during Encapsulation Process,” Ph.D. Thesis, Dep. of Mechanical Engineering, National Cheng Kung University, Tainan, Taiwan, 2005
[5] K. Oota and K. Shigeno, “Development of Molding Compound for BGA,” 45th Electronic Component Conference, pp. 78-85, 1995.
[6] H.H. Chiang, C. A. Hieber and K. K. Wang, “A Unified Simulation of the Filling and Postfilling Stages in Injection Molding, Part I: Formulation,” Polymer Engineering and Science, vol. 116, 1991.
[7] U. F. Gonzalez, Shen and C. Cohen, “Rheological Characteristic of Fast-Reaction Thermosets throught Spiral Flow Experiments,” Polymer Engineering and Science, vol. 32, pp. 172~184, 1992.
[8] L. S. Turng and V. W. Wang, “On the Simulation of Microelectronic Encapsulation with Epoxy Molding Compound,” Journal of Reinforced Plastic and Composites, vol. 12, pp. 506~519, 1993.
[9] L. T. Nguyen, “Reactive Flow Simulation in Transfer Molding of IC Packages,” 43rd Electronic Components Conference, pp. 375~390, 1993.
[10] W. B. Young, “Three Dimensional Nonisothermal Mold Filling Simulations in Resin Transfer Molding,” Polymer Composites, vol. 15, pp. 118~127, 1994.
[11] M. K. Kang, “Simulation of Mold Filling Process During Resin Transfer Molding,” Journal of Material Process and Manufacturing Science, vol. 3, pp. 297~313, 1995.
[12] Chang, R.Y., Yang, W.-H., Hwang, S.J., and Su. F, “Three-Dimensional Modeling of Mold Filling in Microelectronics Encapsulation Process,” IEEE Transactions on Components and Packaging Technologies, vol. 27, pp. 200~209, 2004.
[13] A. C. Loos and G. S. Springer, “Curing of the Epoxy Matrix Composites,” Journal of Composite Materials, pp. 135~169, 1983.
[14] G. S. Springer, “Resin Flow During the Curing of Fiber Reinforced Composites,” Journal of Composite Materials, vol.16, pp. 400~410, 1982.
[15] R. L. Frutiger, “The Effect of Flow on Cavity Surface Temperatures in Thermoset and Thermoplastic Injection Molding,” Polymer Engineering and Science, vol. 26, pp. 243~254, 1986.
[16] Y. S. Chang, S. J. Hwang, H. H. Lee, and D. Y. Hwang, “Study of P-V-T-C Relation of EMC,” ASME Journal of Electronic Packaging, vol. 124, pp. 371~373, 2002.
[17] S. Timoshenko, “Analysis of Bi-Material Thermostats,” Journal of Optimum Soc. Am, vol. 11, pp. 233~255, 1925.
[18] D. R. Olsen and H. M. Berg, “Properties of Die Bond Alloys Relating to Thermal Fatigue,” IEEE Components, Hybrids and Manufacturing Technology, vol. 12, pp. 257~263, 1979.
[19] T. Y. Pan and Y. H. Pao, “Deformation in Multilayer Stacked Assemblies,” ASME Journal of Electronic Packaging, vol. 112, pp. 30~34, 1990.
[20] P. M. Hall, “Thermal Expansivity and Thermal Stress in Multilayered Structures,” Thermal Stresses and Strain in Microelectronics Packaging, edited by J.H. Lau, Van Nostrand Reinhold, pp. 79~94, 1993.
[21] S. W. Lee, “Effect of Encapsulation Volume on the Coplanarity of Plastic Ball Grid Array Package,” The First Asia-Pacific Conference on Material and Processes in IC Encapsulation, pp. 17-1~17-4, 1996.
[22] E. Suhir, “Predicted Residual Bow of Thin Plastic Packages of Integrated Circuit Devices,” ASME Journal of Electronic Packaging, vol. 114, pp. 467~470, 1992.
[23] E. Suhir and L. T. Manzione, “Predicted Bow of Plastic Packages Due to the Nonuniform Through-Thickness Distribution of Temperature,” ASME Journal of Electronic Packaging, vol. 114, pp. 329~335, 1992.
[24] ST. Jacques, M., “An Analysis of Thermal Warpage in Injection Molded Flat Parts Due to Unbalanced Cooling,” Polymer Engineering Science, vol. 22, pp. 241~247, 1982.
[25] S. Okikawa, M. Sakimoto, M. Tanaka, T. Sato, T. Toya and Y. Hara, ”Stress Analysis of Passivation Film Crack for Plastic Molded LSI Caused by Thermal Stresses,” International Symposium Testing and Failure Analysis, pp. 275~280, 1983.
[26] A. Nishimura, “Life Estimation for IC Plastic Packages under Temperature Cycling Based on Fracture Mechanics,” IEEE Components, Hybrids and Manufacturing Technology, vol. 12, pp. 637~642, 1987.
[27] K. K. Tamma, B. L. Dowler and S. B. Railkar, “Computer Aided Application to Injection Molding: Transfinite / Finite Element Thermal Stress Response Formulations,” Polymer Engineering and Science, vol. 28, pp. 421~428, 1988.
[28] L. S. Chen and B. C. Cheng, “Warpage of Thin Plastic Packages,” The First Asia-Pacific Conference on Materials and Processes in IC Encapsulation, March 18-19, Hsinchu Taiwan, pp. 3-0~3-22, 1996.
[29] Xinyu Dou, “Instability Analysis for Ultra Thin Quad Flat Pack,” ASME Advanced in Electronic Package, vol. 1, pp. 1033~1039, 1997.
[30] T. S. Yeung and M. F. Yuen, “Warpage of Plastic IC Packages as a Function of Processing Conditions,” ASME Journal of Electronic Packaging, vol. 123, pp. 268-272, 2001.
[31] C. G. Kessel, S. Gee and J. Murphy, “The Quality of Die Attachment and its Relationship to Stresses and Vertical Die Cracking,” IEEE Components, Hybrids and Manufacturing Technology, vol. 6, pp. 410~420, 1983.
[32] B. Natarajan and B. Bhattacharyya, “Die Surface Stresses in a Molded Plastic Package,” 36th Electronic Component Conference, pp. 540~551, 1986.
[33] T. Matsouka, J. I. Takabatake, A. Koiwai, Y. Inoue, S. Yamamoto and H. Takahashi, “Integrated Simulation to Predict Warpage of Injection Molded Parts,” Polymer Engineering and Science, vol. 31, pp. 1043~1050, 1991.
[34] S. F. Walsh, “Shrinkage and Warpage Prediction for Injection Molded Components,” Journal of Reinforced Plastics and Composites, vol. 12, pp. 769~777, 1993.
[35] L. Yip and A. Hamzehdoost, “Package Warpage Evaluation for High Performance PQFP,” IEEE Electronic Components and Technology Conference, pp. 229-233, 1995.
[36] Matsuki Yamamoto and Yoshihiro Matsumura, “Flow Analysis of IC Encapsulation Resin in the Molding Process,” ASME Advanced in Electronic Package, vol. 1, pp. 269~275, 1997.
[37] K. Oota and M. Saka, “Cure shrinkage Analysis of Epoxy Molding Compound,” Polymer Engineer and Science, vol. 41, pp. 1373-1379, 2001.
[38] K. S. Kim and H. T. Hahn, “Residual Stress Development During Processing of Graphic/Epoxy Composites,” Composites Science and Technology, vol. 36, pp. 121~132, 1989.
[39] G. Kelly, C. Lyden, W. Lawton and J. barrett, “Accurate Prediction of PQFP Warpage,” Electronic Components and Technology Conference, pp. 102-105, 1994.
[40] G. Kelly, C. Lyden, W. Lawton, J. barrett, A. Saboui, H. Page and J. B. Peters, “Importance of Molding Compound Chemical Shrinkage in the Stress an Warpage Analysis of PQFP’s,” IEEE Transactions on Components and Packaging Technologies, vol. 19, pp. 296-300, 1996.
[41] W. C. Bushko and V. K. Stokes, “The Effects of Differential Mold-Surface Temperatures on the Warpage of Packed Injection-Molded Parts,” ANTEC, pp. 506~512, 1994.
[42] R. C. Dunne and S. K. Sitaraman, “Process Modeling for Sequential Build-up of Multi-Layered Structures,” in Proc. 48th Electronic Components Technology Conference, pp. 351-361, 1998.
[43] Jianjun Wang and Sheng Liu, “Sequential Processing Mechanics Modeling for a Model IC Package,” IEEE Transactions on Components and Packaging Technologies, vol. 20, pp. 335-342, 1997.
[44] Y. Miyano, M. Shimbo and T. Kunio, “Residual Stresses and Warp Generated by One-side Quench of an Epoxy-resin Beam,” Experimental Mechanics, vol. 24, pp. 75~80, 1984.
[45] T. S. Yeung and M. M. F. Yuen, “Warpage of IC Packages,” The First Asia-Pacific Conference on Materials and Processes in IC Encapsulation, pp. 4-1~4-10, 1996.
[46] J. H. Park, J. K. Kim, M. M. F. Yuen, S. W. R. Lee, P. Tong and P. C. H. Chan, “Thermal Stress Analysis of a PQFP Moulding Processes: Comparison of Viscoelastic and Elastic Models,” Key Engineering Materials, vol. 145, pp. 1127~1132, 1998.
[47] J. Wang, Z. Qian and S. Liu, “Process Induced Stresses of a Flip-Chip Packaging by Sequential Processing Molding Technique,” ASME Journal of Electronic Packaging, vol. 120, pp. 309~313, 1998.
[48] L. J. Ernst, C. van’t Hot, D. G. Yang, M. S. Kiasat, G. Q. Zhang, H. J. L. Bressers, J. F. J. Caers, A. W. J. den Boer, J. Janssen, “Mechanical Modeling and Characterization of the Curing Process of Underfill Materials,” Journal of Electronic Packaging, 124, 97-105, (2002).
[49] D.G. Yang, K.M.B. Jansen, L.J. Ernst, G.Q. Zhang, W.D. van Driel, H.J.L. Bressers, X.J. Fan, “Prediction of Process-Induced Warpage of IC Packages Encapsulated with Thermosetting Polymers,” Proceedings of Electronic Components and Technology Conference, 98-105 (2004).
[50] K.M.B. Jansen, L. Wang, D.G. Yang, C. van’t Hof, L.J. Ernst, H.J.L. Bressers and G.Q. Zhang “Constitutive Modeling of Moulding Compounds,” Proceedings of Electronic Components and Technology Conference, 890-894 (2004).
[51] Yang Rao, S.H. Shi, and C.P. Wong, “An Improved Methodology for Determining Temperature Dependent Moduli of Underfill Encapsulants,” IEEE TRANSACTIONS ON COMPONENTS AND PACKAGING TECHNOLOGY, Vol. 23, No.3 (2000).
[52] Zhuqing Zhang, Lianhua Fan, Suresh K. Sitaraman, and C.P. Wong, “Four-Laser Bending Beam Measurements and FEM Modeling of Underfill Induced Wafer Warpage,” Electronic Components and Technology Conference, pp747-753 (2004).
[53] Quach, A. and R. Simha, “Pressure-Volume-Temperature Properties and transition of Amorphous Polymers ; Polystyrene and Poly (orthomethylstyrene),” Journal of Applied Physicals, 42, 4592-4605 (1971).
[54] Zoller, P. Bolli, V. Pahud, and H. Ackermann, “Apparatus for measuring pressure-volume-temperature relationships of polymers” Review of Scientific Instruments, 45, 948-952 (1976).
[55] Nishimura, T. and Y. Nakagawa, “Analysis of stress due to shrinkage in a hardening process of liquid epoxy resin,” Heat Transfer-Asian Research, 31, 194-211 (2002).
[56] S. J. Hwang, and Y. S. Chang, “Isobaric Cure Shrinkage Behaviors of Epoxy Molding Compound in Isothermal State,” Journal of Polymer Science: Part B: Polymer Physics, 43, 2392-2398 (2005).
[57] S. J. Hwang, and Y. S. Chang, “P-V-T-C equation for epoxy molding compound,” IEEE Transactions on Components and Packaging Technologies, 29, 112-117 (2006).
[58] S. J. Hwang and L. C. Hong, “Study of Warpage Due to P-V-T-C Relation of EMC in IC Packaging,” IEEE Transactions on Components and Packaging Technologies, 27, 291-295 (2004).
[59] L. T.Manzione, Plastic Packaging of Microelectronic Devices, Van Nostrand Reinhold, New York, 1990.
[60] S. Han and K. K. Wang, “Flow Analysis in a Chip Cavity During Semiconductor Encapsulation,”ASME Journal of Electronic Packaging, Vol. 122, 160-167, 2000.
[61] L. Nguyen, C. Quentin, W. Lee, S. Bayyuk, S. A. Bidstrup-Allen, and S. T. Wang, “Computational Modeling and Validation of the Encapsulation of Plastic Packages by Transfer Molding,” ASME Journal of Electronic Packaging, Vol. 122, 138-146, 2000.
[62] F.Su, S. J. Hwang, H. H. Lee, and D. Y. Huang, “Prediction of Paddle Shift via 3-D TSOP Modeling,’ IEEE Transactions on Components and Packaging Technologies, Vol. 23, pp.684-692, 2000.
[63] H. Q. Yang, S. A. Bayyuk, and L. T. Nguyen, “Time-Accurate, 3-D Computation of Wire-Sweep during Encapsulation of IC Components,” IEEE Electronic Components and Packaging Technology Conference, pp. 158-167, 1997.
[64] C. C. Pei and S. J. Hwang, “Three-Dimensional Paddle Shift Modeling for IC Packaging,” ASME Journal of Electronic Packaging, Vol. 127, Issue 3, pp.324-334,2005.
[65] H. H. Chiang, K. Himasekhar, N. Santhanam and K. K. Wang, “Integrated Simulation of Fluid Flow and Heat Transfer in Injection Molding for the Prediction of Shrinkage and Warpage,” Journal of Engineering Material and Technologies, vol. 115, pp. 37~47, 1993.
[66] J. M. Castro, C. W. Macosko, “Kinetics and Rheology of Typical Polyurethane Reaction Injection Molding Systems,” SPE Tech. Paper, Vol. 26, pp. 434~438, 1980.
[67] M. R. Kamal, “Kinetics and Thermal Characterization of Thermoset Cure,” Polymer Engineering and Science, vol. 13, 1973.
[68] R. B. Prime, “Differential Scanning Calorimetry of the Epoxy Cure Reaction,” Polymer Engineering and Science, vol. 13, 1973.
[69] K. Dusek and M. Bleha, “Curing of Epoxide Resins: Model Reaction of Curing with Amine,” Journal of Polymer Chemical Ed., vol. 15, 1977.
[70] M. G. Roger, “The Structure of Epoxy Resin Using NMR and GPC Tehcniques,” Journal of Applied Polymer Science, vol. 16, 1972.
[71] R. E. Smith, “Epoxy Resin Cure, II FTIR Analysis,” Journal of Applied. Polymer Science, vol. 29, 1984.
[72] M. R. Kamal and M. E. Ryan, “The Behavior of Thermosetting Compounds in Injection Molding Cavities,” Polymer Engineering and Science, vol. 20, pp. 859~867, 1980.
[73] ANSYS, “Element User’s Guide,” Ansys Inc.