為了研究高溫型太陽能選擇性吸收膜(High temperature SSC)，吾人利用反應式磁控濺鍍設備，成功沈積添加金屬鎢的碳化鈦薄膜在不鏽鋼基板上，其中以甲烷作為反應氣體，而鎢靶和鈦靶分別以RF和DC電源供應器濺射。薄膜中的鎢含量，以鎢靶功率大小進行調控。分析包括XRD繞射、Raman吸收光譜、SEM表面形貌、TEM高解析截面、反射率光譜以及折射率，在其光學效能最佳化的同時，亦研究了其鎢靶功率對材料性質的關聯性。探討在鎢靶功率不同時，其結晶性、結構對於光學性質的影響。
在漸層式雙層以及抗反射層的添加後，完整的結構為四層：SS/ W/ HM W-TiC/ LM W-TiC/ HfO2，在最佳化後，太陽能吸收率高達94.8%，且熱放射率僅有9.7%，太陽能選擇性高達9.77。除此之外，熱穩定性的研究以空氣下退火來進行，在相同的退火時間之下，以調控不同退火溫度，來展現不同高溫環境之下，該薄膜的穩定程度。在2小時700°C的退火之後，此SSC仍能表現出93.2%的高吸收率，以及9.8%的熱放射率，且並無其他相生成，足以說明其極佳的熱穩定性。

Tungsten-embedded titanium carbide (W-TiC) cermet solar selective coatings were deposited on the stainless steel substrates by using DC and RF reactive magnetron co-sputtering. Different W content was controlled by varying the W target power. The correlation between W embedding quantity and material characteristics (i.e. XRD pattern, Raman spectrum, SEM morphology, TEM cross section and reflectance spectrum) were investigated. The whole multilayer: SS/ W/ HM W-TiC/ LM W-TiC/ HfO2 was deposited and achieve 94.8% of absorptance and 9.8% of emittance (at 100°C). The thermal stability was studied by annealing process in air at different temperature (i.e. 600°C, 700°C and 800°C) for 2 hours. By measuring the XRD and reflectance spectrum, It is confirmed that the thermal stability of the whole multilayer was up to 700°C in air.

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