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研究生: 戴呈祐
Tai, Cheng-You
論文名稱: 室溫溶液製程氧化鎳及銅摻雜氧化鎳奈米粒子應用於電阻式記憶體
Room-Temperature Solution-Processed NiO and Cu:NiO Nanoparticles for Resistive Memory Applications
指導教授: 蘇炎坤
Su, Yan-Kuin
學位類別: 碩士
Master
系所名稱: 電機資訊學院 - 微電子工程研究所
Institute of Microelectronics
論文出版年: 2019
畢業學年度: 107
語文別: 英文
論文頁數: 74
中文關鍵詞: 電阻式記憶體低溫室溫溶液製程奈米粒子氧化鎳銅摻雜氧化鎳過渡金屬氧化物
外文關鍵詞: resistive memory, low temperature, room temperature, solution process, nanoparticles, NiO, Cu:NiO, transition oxide
相關次數: 點閱:105下載:1
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  • 本論文以室溫溶液製程製作氧化鎳及銅摻雜氧化鎳電阻式記憶體。氧化鎳及銅摻雜氧化鎳奈米粒子懸浮液以旋轉塗布及室溫乾燥的方式在氧化銦錫/玻璃基板上製作氧化鎳及銅摻雜氧化鎳薄膜。本論文與傳統溶液製程(溶膠凝膠法)相比,成功降低了製程溫度及簡化了製程步驟。
    以純氧化鎳製作的電阻式記憶體元件可以正常開關超過200次並具有10^4的開關比(在0.1 V時讀取)。元件的記憶保持大於10^4秒。除此之外,以銅摻雜氧化鎳製作的電阻式記憶體元件可以正常開關大約1400次並具有5*10^3的開關比。 除了反覆讀寫能力獲得提升外,銅摻雜也改善了元件開關電壓的分佈。元件的記憶保持也大於10^4秒。相較於其他溶液製程的元件,我們的元件具有更好的表現,尤其是在反覆讀寫能力上的改進。因為反覆讀寫能力及穩定性是目前電阻式記憶體最大的挑戰,所以銅摻雜可以在這方面具有相當大的優勢。
    在導通機制方面的研究,銅摻雜增加了陷阱密度(trap density)。因此隨著銅摻雜濃度上升,導通機制從空間電荷限制傳導轉換普爾-夫倫克爾發射。

    In this thesis, NiO and Cu:NiO resistive memory devices were demonstrated by room-temperature solution process. The NiO-based films in the memory devices were fabricated by spin-coating of NiO-based nanoparticles suspensions on ITO/glass substrates and drying in room temperature. We successful reduced the process temperature and simplified the fabrication procedure compared with traditional solution process, sol-gel method.
    The device with pure NiO can work properly for more than 200 times with on/off ratio 10^4 (read at 0.1 V). The retention time of the device is more than 10^4 seconds. Additionally, the device with Cu:NiO can work properly for around 1400 times with on/off ratio 5*10^3 (read at 0.1 V). The Cu doping also improve the dispersion of setting and resetting voltage. The retention time of the device is more than 10^4 seconds. Compared with the devices made by other solution methods, our devices have better performance, especially in endurance. Since endurance and reliability are the major challenges for resistive memories, Cu doping can bring huge advantage in NiO-based resistive memory devices.
    The conduction mechanisms were also investigated. The Cu doping increases the trap density; therefore, as the doping concentration increasing, the conduction mechanism switches from space-charge-limited conduction to Poole-Frenkel emission.

    摘要 I Abstract II Acknowledgements IV Contents VI List of Tables IX List of Figures X List of Abbreviations XIII List of Equations XIV Chapter 1: Introduction 1 1-1 Non-volatile memory 1 1-1-1 Flash memory 1 1-1-2 Phase Change Random Access Memory 1 1-1-3 Spin Torque Transfer Magnetoreistive Random Access Memory 2 1-1-4 Resistive Random Access Memory 2 1-2 Thesis outline 4 Chapter 2: Literature review 6 2-1 Classification of RRAM by I-V characteristics 6 2-1-1 Bipolar 6 2-1-2 Unipolar 7 2-2 Classification of RRAM by switching mechanisms 7 2-2-1 Filamentary conducting path 8 2-2-2 Interface-type path 9 2-3 Classification of RRAM by conduction mechanisms 9 2-3-1 Electrode-limited conduction mechanisms 10 2-3-1-1 Schottky emission 10 2-3-1-2 Fowler-Nordheim tunneling and direct tunneling 11 2-3-1-3 Thermionic-field Emission 12 2-3-2 Bulk-limited conduction mechanisms 13 2-3-2-1 Ohmic conduction 13 2-3-2-2 Space-charge-limited conduction 13 2-3-2-3 Poole-Frenkel emission 16 2-3-2-4 Hopping conduction 17 2-3-2-5 Ionic conduction 18 Chapter 3: Experimental procedures and measurements 21 3-1 Materials 21 3-2 Experimental procedures 21 3-2-1 Synthesis of NiO nanoparticle suspension 21 3-2-2 Synthesis of Cu:NiO nanoparticle suspensions 22 3-2-3 Cleaning procedure 23 3-2-4 Device Fabrication 23 3-3 Measurements 24 3-3-1 Electrical measurement 24 3-3-2 SEM 25 3-3-3 XRD 26 3-3-4 XPS 26 3-3-5 UV-visible spectroscopy 27 Chapter 4: NiO nanoparticle suspension method 28 4-1 Motivation 28 4-2 Experimental procedures 30 4-3 Results and discussion 31 4-3-1 SEM 31 4-3-2 XRD 33 4-3-3 XPS 34 4-3-4 I-V characteristics 36 4-3-5 Endurance 37 4-3-6 Cumulative probability of setting voltage and resetting voltage 38 4-3-7 Retention 41 4-3-8 Resistive switching mechanisms 42 4-3-9 Conduction mechanisms 44 4-4 Summary 45 Chapter 5: Cu:NiO nanoparticle suspension method 47 5-1 Motivation 47 5-2 Experimental procedures 47 5-3 Results and discussion 48 5-3-1 XRD 48 5-3-2 XPS 49 5-3-3 UV-Vis 51 5-3-4 I-V characteristics 52 5-3-5 Endurance 53 5-3-6 Cumulative probability of setting voltage and resetting voltage 54 5-3-7 Retention 56 5-3-8 Conduction mechanisms 56 5-4 Summary 59 Chapter 6: Conclusions 61 Chapter 7: Future work 64 7-1 The in situ TEM observation 64 7-2 The potential of unipolar resistive switching phenomenon 65 7-3 Fabrication of the devices with bilayer insulator structure 65 7-4 Fabrication of the devices with flexible substrates 66 Reference 67

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