對半導體與光電TFT-LCD製造廠而言，無塵等級主要影響製造品質及良率，唯輸送帶機構大多使用傳統機械齒輪來傳遞動力，接觸摩擦會造成塵埃率的提高，產生噪音及廢熱，並降低機械齒輪效率和可靠性。現今磁性齒輪已被應用於無塵環境的輸送系統，然而能承載的傳動負載不足，且為單一傳動方式。本文旨在提出一新型態之磁性行星齒輪系，透過非接觸之磁耦合力，以改善傳統機械式行星齒輪系之高磨耗、體積大、易過熱、及使用壽命短等缺點，且其具有多重磁耦合區，可提高拖動轉矩，並兼具高轉矩密度、及小體積下高減速比等優點。本文藉由磁性材料與基本參數的分析，探討磁性行星齒輪系的尺寸與傳動設計方法，並針對拖動轉矩與頓轉轉矩，及磁性行星齒輪數目對最大拖動轉矩，運用有限元素軟體分析，進行相關模擬與驗證。本研究運用磁性材料於行星齒輪系的新設計，成功結合磁路分析及行星齒輪系之運動原理，發展一新型態之磁性行星齒輪系，最後透過實體製作及測試機台，進一步比較相關實作驗證。

　　Particles have a great affect on the quality of manufacturing for semiconductors and TFT-LCD factories. Dust is produced mainly from mechanical gears in conveyers and is primarily generated through contact friction. However, this mechanism also creates noise and heat, which combined with dust, greatly influence both the efficiency and reliability of mechanical gears. Although today, magnetic gears powered by high performance magnets are applied to the conveyer, improvements on the maximum stall torque and the number of transmission types still need to be made. This paper proposes that utilizing contact-free, magnetic planetary gears enhances the maximum stall torque in conveyers, offers less maintenance, has both high reliability and high speed reduction ratio, and can be constructed into compact devices. Therefore, they can also be applied to the speed reduction ratio machinery of wind powered systems. We implemented Finite Element Analysis software to further explicate our design method of magnetic planetary gears, and extend research on movement characteristics, stall torque, cogging torque and the number of the magnetic planet gears which influence the maximum stall torque. The magnetic planetary gears were developed to prove the design theory, and the paper proposes several causes of the measured inaccuracies.

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