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研究生：	陳信宏 Chen, Hsin-Hung
論文名稱：	微型電漿噴流應用於有機化合物處理及對噴流進行特性分析 Application of Micro-plasma Jet on the Treatment of Organic Compounds and Characterization of the Jet Plume
指導教授：	廖峻德 Liao, Jiunn-Der
學位類別：	博士 Doctor
系所名稱：	工學院 - 材料科學及工程學系 Department of Materials Science and Engineering
論文出版年：	2012
畢業學年度：	100
語文別：	英文
論文頁數：	92
中文關鍵詞：	微型電漿噴流、AZ-650正型光阻、二甲基硫、電子密度
外文關鍵詞：	micro-plasma jet, AZ-650 positive photo-resist, dimethyl sulfide, electron density
相關次數：	點閱：67 下載：4
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新式微型電漿可於一大氣壓下低溫操作(室溫至攝氏一到兩百度)，近十年來受到廣泛的矚目。相較於傳統的低壓低溫電漿，微型電漿不需要真空系統，可大幅降低應用成本。在各式微電漿系統，微型電漿噴流具有結構設計不受處理基材幾何形狀的限制、不易誘發電弧及容易進行陣列等優勢，使用上具有彈性及工業應用潛力。於本研究中，使用微型電漿噴流於固態的AZ-650正型光阻(Photo-resist)及氣態的二甲基硫(Dimethyl sulfide, DMS)有機化合物之處理。於光阻的處理上，氬氣及氮氣微型電漿噴流系統(內外電極型式)分別被應用來對於光阻層的剝除進行處理及評估。分析結果顯示氬氣微型電漿與光阻間的反應屬於較簡單物理效應，相較於氮氣微型電漿較不易引起電漿物種與光阻間的反應，大幅降低了光阻移除所需時間。於二甲基硫的處理上，將微電漿電極設置於石英氣體流管的外側，以避免副產物形成並黏附於內電極上而降低處理效率；同時，以串聯方式排列兩組微電漿電極延長二甲基硫於電漿反應區中停留的時間以提升分解效能。採用此電極配置方式，可於90 W的外加功率下，將400ppm二甲基硫完全分解為以氫(H2)、二硫化碳(CS2)及硫化氫(H2S)為主的副產物。
為了瞭解電漿狀態隨輸入參數變化的關係，對於噴流特性分析有其必要性，以光譜強度比值法(line-ratio method)搭配光學放射光譜法對氬氣微型電漿噴流進行電子密度評估，結果顯示微型電漿噴流的電子密度約為0.2-2×1013 cm-3。於影響因子分析方面，電子密度的變化受激發功率的影響大於受氣體流率的影響；探針溫度主要受氣體流率影響，分布於攝氏40-90度間。
綜合上述研究，微型電漿噴流適合應用於有機化合物處理(AZ-650正型光阻及二甲基硫)。而經由適當的電漿特性分析，可以增進操作參數對於電漿狀態變化的了解，以促進微型電漿使用的效能。

Novel micro-plasma jet devices which can be operated under atmospheric pressure with low temperature (ambient temperature to a few hundreds degree Celsius) have drawn a number of attentions in the last decade. Comparing to traditional non-thermal plasma, micro-plasma without vacuum system can reduce the prime cost and therefore enhance its potential for industrial usage. Among various micro-plasma types, micro-plasma jet that takes advantage of high treatment depth and free-arc characteristic has a potential to be applied in line. In this thesis, the applications of micro-plasma jet on AZ-650 positive photo-resist (solid phase) and dimethyl sulfide (DMS: gaseous phase) treatment are studied, respectively. In the former case, a micro-plasma jet system was utilized to evaluate the photo-resist removal effect. Argon and nitrogen micro-plasmas were respectively employed as the working gases and performed under atmospheric pressure. Argon micro-plasma leading to a simple physical effect with reduced reaction steps is much proficient to remove photo-resist molecules from the substrate. For the DMS treatment, a custom-made two-outer-electrode argon micro-plasma jet was employed to decompose DMS into a non-foul-smelling species. As 400 ppm DMS was introduced into argon plasma with two pairs of electrodes (90 W), a complete decomposition of DMS was achieved. The dissociation mechanism and treatment efficiency are discussed, and a treatment of converting DMS into H2-, CS2-, and H2S-dominant by-products is proposed.
In addition, in order to improve the level of understanding of the relationship between control parameters and the impact of the plasma, a characterization of the plasma parameters of the jet plume is mandatory. The results demonstrates the electron density is in the range of 0.2-21013 cm-3 and is predominantly determined by the excitation power rather than the gas flow rate, whereas the probe temperature mainly depends on the gas flow rate and covers a range of about 40-90 °C.
Based on this research, micro-plasma jet operating under atmospheric pressure with low temperature is promising for the treatment on targeted organic compounds. Furthermore, with relevant characterisation, the operation of micro-plasma jet can be improved based on the better understanding of plasma condition as function of operating parameter.

摘要 i
Abstract ii
Acknowledgement iv
Contents vi
List of Figures ix
Chapter 1: Introduction 1
1. Motive 1
2. Literature survey 2
2.1.	Treatment on photo-resist	2
2.2.	Decomposition of DMS	3
2.3.	Diagnostics of micro-plasma jet	6
3.	Objective	7
4.	Thesis outline	8
Chapter 2:	Experimental Techniques	10
1	Introduction	10
2	Plasma	10
2.1	Atmospheric pressure plasmas	12
2.2	Micro-plasmas	14
2.2.1	Microhollow cathode discharge (MHCD)	16
2.2.2	The capillary plasma electrode discharge (CPED)	16
2.2.3	Micro-plasma jet	17
2.3	Application of micro-plasma	19
2.3.1	Biomedical applications	19
2.3.2	Environmental applications	19
3	Optical emission spectroscopy	21
4	X-ray photoelectron spectroscopy	23
Chapter 3:	Application of atmospheric micro-plasma jet on photo-resist removal	26
1	Introduction	26
2	Experimental	26
2.1	Photo-resist material and micro-plasma system	26
2.2	Optical diagnosis of excited species	27
2.3	Photo-resist removal and compositional change	29
3	Results and Discussion	30
3.1	I-V characteristic of argon and nitrogen micro-plasmas	30
3.2	Composition of argon and nitrogen micro-plasmas	31
3.3	Photo-resist removal in association with the compositional changes of photo-resist	35
3.4	Mechanism to proceed photo-resist removal	39
4	Conclusion	43
Chapter 4:	Application of atmospheric micro-plasma jet on conversion of emitted dimethyl sulfide into eco-friendly species	45
1.	Introduction	45
2.	Experimental	45
2.1.	Micro-plasma system with the mixture of DMS in argon	45
2.2.	Analysis of residual gas after plasma treatment	48
2.3.	Optical diagnosis of excited species	48
2.4.	Analysis of solid deposition on the quartz tube in the afterglow region	49
3.	Results and discussion	50
3.1.	Real-time observation of DMS/argon plasma state	50
3.2.	Variation of residual species in DMS/argon plasma with input power	53
3.3.	Solid substances generated from reacted DMS/argon plasma	57
3.4.	Control of DMS-free dissociation and proposal for by-product recycling	58
4.	Conclusion	61
Chapter 5:	Evaluation of electron density and plasma temperature in an atmospheric micro-plasma jet plum with varied plasma parameter	62
1.	Introduction	62
2.	Experimental	63
2.1.	Assembly of plasma jet and diagnostics	63
2.2.	Interpretation of spectroscopic data	64
3.	Results and Discussion	67
3.1.	Series 1 : varied UG, fixed Ar	67
3.2.	Series 2 : fixed UG, varied Ar	70
3.3.	Interpretation of the line width	72
4.	Conclusion	73
Chapter 6:	Conclusion	75
Reference..	76
Appendices	86
Appendix A	86
Appendix B	86
Appendix C	87
Curriculum Vitae	88


                                    

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