噴墨頭『列印技術』(Ink-Jet Printing Technology)由於是數值驅動，自動化程度高，面對電子工業製造技術對自動化、微小化、降低成本、降低時程、減少環境的衝擊等的要求與趨勢，噴墨列印技術可達到不需使用遮罩，材料利用率高，製程步驟減少，成本降低；減少或不需要使用溶劑，製程廢棄物減少，降低對環境的衝擊，提供極具吸引力之材料微分配(Micro-Dispensing)替代技術之製程潛能。
　　本研究主要是以機電製程加工技術整合微鉑加熱器(Micro Heater)、微鉑溫度感測器(Micro Temperature Sensor)，製作一微熱泡致動器(Thermal Bubble Actuator)，每一個致動器晶片內均含有 組微鉑加熱器、微鉑溫度感測器的陣列，以及 組用來破壞表面張力的微鉑加熱器，利用致動器內的微鉑加熱器陣列(Micro-Heater Array)驅動微流道(Micro Channel)內液體噴射，噴射的體積決定於微型加熱器致動的數量，為一種同時兼具致動元件與感測元件之反應系統組合。
　　以自行發展之微流體觀測分析實驗系統，產生脈衝電壓與延遲訊號，利用高速攝影機及高速閃頻(Stroboscope)設備，測試自行製造之微熱泡致動器，已證實高速顯微影像偵測可幫助我們了解整個微熱泡致動器內的氣泡產生機制，對於微流體系統實為值得發展的一套系統。
　　透過實驗將分析所得數據及研究成果，對HP c6614d No.20墨水匣所進行之噴墨液滴分裂的性能分析，HP墨水匣的解析度仍具有很大的空間進行改善。以鉑金屬為溫度量測元件之構想，藉由定電流瞬間微熱泡產生機制之電阻與溫度響應實驗，證實以鉑金屬為溫度量測元件之構想可應用於微熱泡致動器，於電阻與溫度響應實驗知其時間常數 t 介於0.1秒~0.01秒之間。另外，對於高溫熱融合晶片接合製程部分，溫度與時間的控制是關鍵的一環，升溫速率為 ，定溫580℃持續烘烤5小時，降溫速度 ，此外，以鈦金屬作為黏著層的金屬材料較過去以鉻金屬作為黏著層更適合於高溫熱融合晶片接合製程。

In this thesis, novel thermal bubble actuator has been designed and fabricated for bubble actuator studies. Micro platinum heaters and temperature sensors are integrated within the actuator to study the detailed dynamics of the thermal bubble actuator. Each actuator contains four sets of microheaters/microsensors in the firing chamber, and one set of microheater for the surface tension breaker at the nozzle exit. By actuating the microheater array, the bubble can be generated to eject the liquid droplet out of micro nozzle. According to the number of the microheater actuated, the volume of the liquid droplet can be controlled. Bubbles generated in the firing chamber not only function as a pump, but also serve as a flow regulator between the chamber and the liquid supply. This mechanism can eliminate the bottleneck design, which is use for hydrodynamics cross talk in a conventional inkjet printhead.
　　To investigate the dynamics of the novel thermal bubble actuator, a high speed microscopic imaging system was developed. The high-speed microscopic imaging system will help us diagnose the bubble nucleation, bubble growth and collapse, droplet breakup process, as well as the refilling process. From testing results of the experiment by using a commercial actuator HP ink-jet printhead, the performance of HPc6614d No.20 ink-jet printhead still has plenty of room to be improved. For example, the satellite droplets are found in HP printhead. Satellite droplets means non-uniform droplet sizes, which will degrade the printing quality. For the current thermal bubble actuator, surface tension breaker was design to manipulate the surface tension at the nozzle exit, which use to eliminate satellite droplets.

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