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| 研究生： |
吳佾儒 Wu, Yi-Ru |
|---|---|
| 論文名稱： |
摻入氫元素及鈮元素對非晶質碳氮鍍層之鑽針磨耗性質的影響 Wear performance of micro-drills with amorphous carbon nitride (a-C:N) coatings doped with hydrogen and niobium |
| 指導教授： |
蘇演良
Su, Yen-Liang |
| 學位類別： |
碩士 Master |
| 系所名稱： |
工學院 - 機械工程學系 Department of Mechanical Engineering |
| 論文出版年： | 2018 |
| 畢業學年度： | 106 |
| 語文別： | 英文 |
| 論文頁數： | 40 |
| 中文關鍵詞： | 碳氮鍍層 、氫元素 、鈮元素 、磁控濺鍍 、磨耗 、微鑽針 、熱處理氧化 |
| 外文關鍵詞： | Carbon nitride coating, Hydrogen, Niobium, UBM, Tribology, Micro-drilling, Heat treatment |
| 相關次數： | 點閱：60 下載：1 |
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本研究採用非平衡磁控濺鍍法，以碳氮鍍層為基底鍍層添加氫與鈮元素，製備出含氫碳氮、含鈮碳氮以及含鈮碳氮氫鍍層，探討鍍層之成份、組織、結構、基本機械性質、磨潤性質與抗腐蝕性等。
添加氫元素會降低碳氮鍍層的硬度；而鈮元素的添加，會使碳氮與碳氮氫鍍層硬度及鍍層附著性提升。磨耗性質方面均獲得改善，添加氫元素後的鍍層有最低摩擦係數，而含鈮碳氮及含鈮碳氮氫鍍層的磨耗率均降低。在微鑽針試驗方面，添加氫與鈮元素皆能提升磨耗改善，其中又以添加氫的鍍層有最好的磨耗改善。電化學腐蝕試驗顯示，添加鈮元素的鍍層在腐蝕電流密度有明顯的改善。經熱處理試驗後，分析元素比例發現氧原子增加而氮原子減少的趨勢。從XPS分析熱處理後硬度皆下降的原因，發現sp3、Nb-C、Nb-N與Nb-H鍵結於熱處理後皆減少。其中以含鈮碳氮氫鍍層中的Nb-N鍵結減少最多。熱處理後之XPS結果與熱處理後XRD分析結果一致，根據XRD分析結果顯示含鈮碳氮及含鈮碳氮氫鍍層中，NbC、NbN與NbH2結晶方向的繞射峰強度皆下降。
In this experiment, we take carbon nitride film as the basic film. With hydrogen and niobium content doped by an unbalanced magnetron sput-tering system (UBM). After the preparations, several investigations will go through to explore whether the dopants could improve the mechanical and wear properties. As the result of mechanical results, the addition of hy-drogen content drops the hardness while niobium dopant could enhance the hardness of both CN and CNH films and Nb-CN film exhibits the highest hardness 17.6 GPa consisting with XPS analyses. Furthermore, the dopant of niobium content could enrich the adhesion of CN coatings. On the aspect of wear performances, the dopant of hydrogen content shows the lowest coefficient of friction (0.13) which agrees with the highest sp2 bonds in XPS analyses, while the dopant of niobium content promotes the wear rate of both CN and CNH coating. In the micro-drilling test, both hydrogen and niobium dopant could reduce the wear ratio of CN coating while CNH coating shows the significant wear ratio with value of 18.3%. In the electrochemical test, niobium could reduce the current density of both CN and CNH coating. In the heat treatment, it shows the increasing oxygen contents and the reducing nitrogen contents as well as a downward trend of hardness. The hardness was mainly affected by the decreasing sp3, Nb-C, Nb-N and Nb-H bonds after the heat treatment. The XRD result of the heat treatment shows the decreasing diffraction peak intensity in both Nb-CN and Nb-CNH film consisting with XPS analyses.
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