批次間程序常見於半導體製程，通常由一純增益元件以及至少一個批次的時間延遲組成，在實際操作情況下兩者均會發生真實值與模型值不同的失配現象。本文提出一利用內模控制架構設計批次間控制器的方法，可逐批次修正調整輸入配方，對於漂移或更複雜型態的擾動具有良好的排除效果，確實消除穩態誤差。另外，本設計方法發展一具有高度適用性的控制律，可透過調整內模控制濾波器的參數來同時滿足控制性能和強韌穩定性的要求，其中最佳控制性能指標為輸出最小均方誤差而強韌性指標為增益邊限與時延邊限。
　　模擬研究證實所提的批次間控制器，不僅對於各式各樣型態的擾動能產生零穩態誤差和極佳排除效果，而且可處理相當程度的增益與時間延遲失配問題。與現有的EWMA (指數加權移動平均)控制器、Double-EWMA控制器以及其他批次間內模控制器相比較，本設計法在擾動消除的型態限制、控制性能與強韌穩定性等方面均有較為優異的表現。

Run-to-run processes are often found in semiconductor processing, which are generally composed from a pure gain element and a time delay of at least one run. In practical applications, both the process gain and time delay would encounter the problem of mismatch between their actual values and model values. This thesis proposes a run-to-run controller design method based on the IMC structure to adjust the input recipe at each run. It is effective for rejecting disturbances of a drift or a more complex type, and can eliminate the steady-state error. In addition, the design method develops a highly general control law, which adjusts the parameters of the IMC filter to satisfy the requirements on both control performance and robust stability. The best control performance index is the minimum mean square error of the output, whereas the robust stability index is gain margin and delay margin.
Simulation studies demonstrate that the proposed run-to-run controller can not only result in zero steady-state error and excellent rejection effects for a wide variety of disturbances, but also cope with the mismatch in the gain and delay to a certain degree. Compared with the EWMA (Exponentially Weighted Moving Average) controller, the Double-EWMA controller and other run-to-run IMC controllers, the proposed run-to-run control design performs much better concerning the type limitation on disturbance rejection, control performance and robust stability.

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