| 研究生: |
鐘健維 Chung, Chien-Wei |
|---|---|
| 論文名稱: |
生物介電應用於低臨界電壓有機場效電晶體之研究 Investigation of Bio-Dielectric for Low Threshold Voltage Organic Field Effect Transistors |
| 指導教授: |
郭宗枋
Guo, Tzung-Fang |
| 學位類別: |
碩士 Master |
| 系所名稱: |
理學院 - 光電科學與工程學系 Department of Photonics |
| 論文出版年: | 2026 |
| 畢業學年度: | 114 |
| 語文別: | 中文 |
| 論文頁數: | 121 |
| 中文關鍵詞: | 有機場效電晶體 、豬精液蛋白 、臨界電壓 、表面電位 |
| 外文關鍵詞: | organic field-effect transistor, porcine seminal plasma, threshold voltage, surface potential |
| 相關次數: | 點閱:93 下載:1 |
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本實驗室過去於製作有機場效電晶體(organic field-effect transistors, OFETs)時發現,以豬精液蛋白(porcine seminal plasma, PSP)作為閘極介電層時,即使薄膜厚度相較於一般高分子介電層較厚,元件仍可呈現較低之臨界電壓(threshold voltage, Vth)。由於介電層厚度增加通常會使單位面積電容降低,進而提高元件操作電壓,因此 PSP 介電層所展現之低臨界電壓行為,顯示其可能具有不同於傳統高分子介電層之電性與界面調控機制。因此,本論文主要探討 PSP 介電層應用於低臨界電壓 OFET 之原因,並與常見高分子介電層進行比較分析。
本研究首先由元件電性表現進行比較,確認 PSP 介電層元件相較於其他高分子介電層具有較低之臨界電壓。接著透過電容量測與次臨界擺幅分析,發現 PSP 具有較高之單位面積電容與較低之介面陷阱密度,表示其可能具有較佳的閘極調控能力與介面品質。此外,AFM 表面形貌分析顯示,不同介電層之表面粗糙度並無明顯差異,說明 PSP 造成低臨界電壓的主要原因並非來自表面形貌差異。PFM 表面電位分析顯示,PSP 具有較高且較穩定之表面電位,推測其表面可能存在極性官能基、界面偶極或固定電荷效應。進一步於 PSP 表面覆蓋薄層高分子材料後,元件臨界電壓產生位移,而單位面積電容並未明顯改變,顯示 PSP 表面特性對低臨界電壓行為具有重要影響。綜合上述結果,本研究認為 PSP 介電層所造成之低臨界電壓並非單一因素所致,而是與較高的單位面積電容、較低的介面陷阱密度以及較高且穩定的表面電位共同相關。
In previous studies conducted in our laboratory, it was found that organic field-effect transistors (OFETs) using porcine seminal plasma (PSP) as the gate dielectric layer could still exhibit a low threshold voltage (Vth), even though the PSP dielectric film was thicker than conventional polymer dielectric layers. Since an increase in dielectric thickness generally leads to a decrease in areal capacitance and consequently increases the operating voltage of the device, the low Vth behavior observed in devices suggests that PSP may possess electrical properties and interfacial modulation mechanisms different from those of traditional polymer dielectrics. Therefore, this thesis investigates the origin of the low Vth in devices and compares PSP with commonly used polymer dielectric layers.
This study first compares the electrical characteristics of devices with different dielectric layers and confirms that devices exhibit a lower Vth than those using other polymer dielectrics. Capacitance measurements and subthreshold swing analysis further reveal that PSP possesses a higher areal capacitance and a lower interfacial trap density, indicating that it may provide better gate modulation capability and improved interface quality. In addition, atomic force microscopy (AFM) analysis shows no significant difference in surface roughness among the different dielectric layers, suggesting that the low Vth of PSP devices is not mainly caused by differences in surface morphology. Kelvin probe force microscopy (KPFM) surface potential analysis shows that PSP exhibits a higher and more stable surface potential, implying the possible presence of polar functional groups, interfacial dipoles, or fixed charge effects on the PSP surface. Furthermore, after covering the PSP surface with a thin polymer layer, the Vth shifts while the areal capacitance remains nearly unchanged, indicating that the surface properties of PSP play an important role in the low Vth behavior. Overall, the low Vth induced by the PSP dielectric layer is not attributed to a single factor, but is collectively associated with its higher areal capacitance, lower interfacial trap density, and higher and more stable surface potential.
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