高精度工具機產業中的導軌，依導軌的性能可分為兩種。一種為滾動導軌也就是俗稱的線性滑軌，此種滾動導軌通常應用於高速進給的工具機上；另一種則是滑動導軌俗稱為硬軌，主要是利用導軌研磨表面與滑動平台鏟花表面的滑動效應產生導引、承載與磨潤作用，此種軌道通常應用於重負載與低速平穩進給下的工具機。而目前在軌道性能量測與評估方面，大多是以人工方式搭配接觸式量具來進行量測，因此需耗費相當多時間與人力，而評估結果也常包含人為因素產生之誤判，使得導軌品質不符合精度需求，因此而影響到導軌安裝於工具機平台的行走精度，而使得工具機在加工過程中產生熱溫升、應變、振動等誤差，影響加工成品的加工精度。
因此，本文針對傳統量測方法的缺點，運用非接觸量測探頭與精密移動平台，並且配合人機介面開發之設計完成自動化光電量測系統。而所開發的自動化光電量測系統依照應用範圍，可分為三部分：(A) 光電式滾動導軌多功能量測機。量測機可量測垂直行走平行度、水平行走平行度、振動訊號、推拉力大小等；(B)光電式滑動導軌量測系統。系統可量測鏟花表面的每平方英吋高點數、每平方英吋接觸率、高低點分佈情形以及高點的高度、邊角形狀和平坦度等；(C)六自由度振動量測系統。系統可量測三個線性位移與三個角度位移，希望藉由各系統的開發可以有效改善量測效率與精度。
最後經由實驗結果與各項儀器驗證可以獲得各系統的性能如下：(A) 光電式滾動導軌多功能量測機的平行度量測精度可達1.5 μm、振動量測頻率可達1000Hz和推拉力量測精度可達0.1 N，而機台的最高量測速度可達1 m/sec；(B) 光電式滑動導軌量測系統的量測精度達1 μm，並且可量測兩種不同材質(鑄鐵與耐磨片)導軌的三維形貌，而系統量測速率達100 mm/s；(C)多自由度振動量測系統，此系統可以同時量測工具機的六自由度振動訊號，解析度可達 ±50 nm /200 nm和 ±0.04 arcsec/0.1 arcsec。藉由自動化光電量測系統的開發，能有效建立一套科學化、數位化與快速的高精度工具機導軌性能評估系統，並且提昇產品之品質完美與產業競爭力。

The guideway of machine tools can be divided into roll bearing linear guide way and sliding contact guide way. The roll bearing linear guide way usually is used in high feed rate machine tool. However, in heavy-duty machine tools, the guide way is in sliding contact with the moving stage, rather than being mount on a roll bearing linear guide way. The scraping operation is used on the moving stage of the bed of machine tools. The guide way quality is evaluated using contact-type gauge and hand measurement. The traditional detection methods are time-consuming and tedious manual labor. The hand error leads to measurement errors. The quality of guide way cannot be effectively evaluated due to measurement errors. Some imperfections during manufacturing or assembly will cause errors as strain, vibration and displacement error….et al in the machine tool. The errors can be effect manufacturing accuracy of machine tool.
To improve the problem of measurement system, automatic electro-optical measurement systems for evaluation of the guide way quality of machine tools which eliminate contact-induced measurement errors and increase measurement accuracy have been proposed. Accordance with the measurement application range, automatic electro-optical measurement systems can be divided into three parts: (A) an automatic measurement machine for linear guideways that can measure running parallelism accuracy, vibration, and preloading, (B) an automatic laser-based measurement system for sliding contact guide way that can evaluate peak points per square inch (PPI) , percentage of points (POP),and flatness of the scraped surface, the edge shapes of the grooves and the distribution of the heights of points (HOP) or the depth of surroundings, and (C) a high resolution six-degrees-of-freedom optical vibrometer that can simultaneously measure three linear displacements and three angular displacements.
The performance of the proposed automatic electro-optical measurement machine is verified by experimental results which can be are described as follows. (A)The standard deviation of the running parallelism measurement system is 0.4 μm and the maximum measuring speed is 1 m/sec. The measuring time is about 10 sec, which is 80% lower than that of a traditional measurement system. (B) The scanning rate and sampling rate of the laser-based measurement system are 100 mm/s and 10 KHz, respectively. Cast iron and Turcite workpieces can be measured. (C) The results show that the accuracy of the six-degrees-of-freedom optical vibrometer is ±30 nm /200 nm and ±0.04 arcsec/0.1 arcsec at 1000 Hz.
The effective improvement of quality of mechanical products and competitive power is prospective by the development of automatic electro-optical measurement systems.

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