本實驗採用封閉式非平衡磁控濺鍍法，且使用漸進層概念，氮化鈦於鍍層表面沉積一層純金屬鎢，並且進行熱處理，使鍍層表面生成氧化鎢的組織。鍍膜分析測試方面，利用輝光放電光譜儀及波長發散光譜儀進行成份分析；掃描式電子顯微鏡及X光繞射光譜儀分析鍍層成長結構與結晶特性；並於鍍層進行熱處理後，研究其於氧化後結構及性質之變化。機械性質與磨潤性能分析方面，利用刮痕試驗及洛氏壓痕器測試鍍層之附著性；以奈米硬度試驗機量測其硬度；以銷對盤迴轉式磨耗試驗機及點、線接觸往復式磨耗試驗機測試其磨耗機構、抗磨耗性及摩擦係數。並將鍍膜被覆於車刀及印刷電路板微鑽針上，實際對鋼料及印刷電路板進行加工，試驗鍍膜之刀具保護性能及分析其破壞機構。
透過以上對鍍層的分析測試，探討不同之氮化鈦與鎢之複合鍍膜沉積模式，以及不同溫度及時間的熱處理產生的效果及其於各應用場合的實用性，對此系列鍍層更進一步了解，進而實際應用於工業加工生產。

The TiN/WO3 coatings will be deposited by closed field unbalanced magnetron sputtering system from mixed titanium(Ti) and Tungsten(W) targets and nitrogen using some concepts that can improve bonding of the performance of TiN-W and WO3 coatings.
The chemical composition and depth profile of the coatings analyzed by EDX and GDS. The microstructures of the coating researched by XRD and SEM. The structures of the different temperature in annealing process will be researched, too.
The mechanical and tribological properties of the coatings measured by Nano Indentester, pin-on-disk and wear tester. The adhesion of the coatings to the substrate will be evaluated by means of a Rockwell-C hardness tester. In order to approve the feasibility of applying the coatings on actual machining, the coatings will be deposited on cutting tools and micro-drills.

Following all the research and experiment, we could understand structure and properties of TiN/WO3 coatings in different temperature of annealing for applying in different areas. To advance the understanding, we can actually apply in making production in industry.

1. Q. Miao , C.E. Cui , J.D. Pan “CrN/TiN multilayer coating on magnesium alloy AZ91 by arc-glow plasma depositing process” Surface & Coatings Technology 201 (2007) 5077–5080
2. Xiaoqin Zeng, Guosong Wu , Shoushan Yao “Formation by reactive magnetron sputtering of TiN coating on Ti-implanted magnesium alloy” Materials Letters 60 (2006) 2252–2255
3. Z. Teka, M.A. Gqgfr, E. C﹐ al, M. Sonugelen, C. Artunc, A. Oztarhan “A study of the mechanical properties of TiN coating of Cr–Ni alloy” Surface & Coatings Technology 196 (2005) 317– 320
4.Taek-Soo Kim , Sang-Shik Park , Byong-Taek Lee “Characterization of nano-structured TiN thin films prepared by R.F. magnetron sputtering” Materials Letters 59 (2005) 3929 – 3932
5.S. Wilson *, A.T. Alpas “Wear mechanism maps for TiN-coated high speed steel” Surface and Coatings Technology 120–121 (1999) 519–527
6.Shih-Kang Tien, Jenq-Gong Duh “Comparison of microstructure and phase transformation for nanolayered CrN/AlN and TiN/AlN coatings at elevated temperatures in air environment” Thin Solid Films 515 (2006) 1097–1101
7. Yu Xiang a, Meng Hua b, Wang Cheng-biao a, Fu Zhi-qiang a, Liu Yang “Investigation of Ti/TiN multilayered films in a reactive mid-frequency dual-magnetron sputtering” Applied Surface Science 253 (2007) 3705–3711
8. C. Mendibide , P. Steyer , J. Fontaine b, P. Goudeau “Improvement of the tribological behaviour of PVD nanostratified TiN/CrN coatings — An explanation” Surface & Coatings Technology 201 (2006) 4119–4124
9. Harish C. Barshilia , B. Deepthi, A.S. Arun Prabhu, K.S. Rajam “Superhard nanocomposite coatings of TiN/Si3N4 prepared by reactive direct current unbalanced magnetron sputtering” Surface & Coatings Technology 201 (2006) 329–337
10. G.A. Zhang , P.X. Yan , P. Wang , Y.M. Chen , J.Y. Zhang “The structure and tribological behaviors of CrN and Cr–Ti–N coatings” Applied Surface Science 253 (2007) 7353–7359
11. Sheng-Yi Lee, Sheng-Chang Wang, Jen-Sue Chen and Jow-Lay Huang, “Effects of nitrogen partial pressure on electrical properties and thermal stability of TiAlN films by ion beam sputter deposition” Surface & Coatings Technology 202 (2007) 977–981
12. L Zhang, H C Jiang, C Liu, J W Dong and P Chow “Annealing of Al2O3 thin films prepared by atomic layer deposition” L Zhang et al 2007 J. Phys. D: Appl. Phys. 40 3707-3713
13. Karuppasamy and A. Subrahmanyam “Studies on electrochromic smart windows based on titanium doped WO3 thin films” Thin Solid Films 516 (2007) 175–178
14. Z. Tek, M.A. Gqgfr, E. C﹐ alb, M. Sonugelen, C. Artunc, A. Oztarhan “A study of the mechanical properties of TiN coating of Cr–Ni alloy” Surface & Coatings Technology 196 (2005) 317– 320
15. Wenran Feng, Dianran Yanb, Jining He, Guling Zhang, Guangliang Chen, Weichao Gu, Size Yang “Microhardness and toughness of the TiN coating prepared by reactive plasma spraying” Applied Surface Science 243 (2005) 204–213
16. Dimigen, C.P. Klages, "Microstructure and wear behavior of metal-containing diamond-like coatings", Surface and Coatings Technology, Vol. 49, 1991, pp.543-547.
17. L. Feng, J. Tang, et al., "Tribological properties of magnetron-sputtered TiC coatings", Materials Science and Engineering, Vol. A257, 1998, pp. 240-249.
18. Holleck, M. Lahres, P. Woll, "Multilayer coatings. Influence of fabrication parameters on constitution and properties", Surface and Coatings Technology, Vol. 41, 1990, pp. 179.
19. C.L. Chang, D.Y. Wang, "Microstructure and adhesion characteristics of diamond-like carbon films deposited on steel substrate", Diamond and Related Materials, Vol. 10, 2001, pp. 1528-1534.
20. A.A. Voevodin, R. Bantle, A. Matthews, "Dynamic impact wear of TiCxNy and Ti-DLC composite coatings", Wear, Vol. 185, 1995, pp.151-157.
21. Matthews, A. Leyland, et al., "Design aspects for advanced tribological surface coatings", Surface and Coatings Technology, Vol. 100-101, 1998, pp.1-6.
22. Y.L. Su, W.H. Kao, "Optimum multilayer TiN-TiCN coatings for wear resistance and actual application", Wear, Vol. 223, 1998, pp. 119-130
23. Y.L. Su, W.H. Kao, "Tribological behavior and wear mechanisms of Ti-C:H/TiC/TiCN/TiN/Ti coatings when sliding against steel, bronze and aluminum alloy rods ", Journal of Materials Science, Vol. 36, 2001, pp. 189-199.
24李邦哲, “薄膜成形技術的演進與未來-薄膜成形技術新紀元”, 台灣綜合展望, 2003.1.11, No.7.
25. W.R. Grove, Phil. Trans. Roy. Soc. London, 5, 87 (1852)
26. W.R. Grove, Phil. Mag., 5, 203 (1853)
27.董家齊, 陳寬任, “奇妙的物質第四態-電漿”, 科學發展, 354期, 2002, pp.52-59
28.金原粲, “薄膜的基本技術”, 日本東京大學出版會社,1987年5月,pp.3.
29.宋健民, ”以物理氣相沉積(PVD)鍍類似鑽石碳膜(DLC)(中)”, 工業材料148期,pp.177.
30. B. Window,” Recent advances in sputter deposition”, Surface and Coatings Technology, Vol.71 , 1995, pp.93-97.
31. D. P. Monaghan, D. G. Teer, K. C. Laing, I. Efeoglu and R. D. Arnell, “Deposition of graded alloy nitride films by closed field unbalanced magnetron sputtering”, Surface and Coatings Technology, Vol.59, 1993, pp.21-25.
32. P. J. Kelly and R. D. Arnell, “Magnetron sputtering: a review of recent developments and applications”, Vacuum, Vol.56, 2000, pp.159-172.
33. C. Mitterer, P. H. Mayrhofer, M. Beschliesser, P. Losbichler, P. Warbichler, F. Hofer, P. N. Gibson, W. Gissler, H. Hruby, J. Musil, J. Vlček, “Microstructure and properties of nanocomposite Ti-B-N and Ti-B-C coatings”, Surface & Coatings Technology 120-121(1999)405-411
34. J. Musil, F. Regent , “Formation of nanocrystalline NiCr-N films by reactive dc magnetron sputtering”, J. Vac. Sci. Technol. A 16(6)
35. M. Ohring, The materials science of thin films,(Academic Press, San Diego,1992), P409
36. R. W. Siegel and G. E. Fougere, ”Mechanical properties of nanophase metals” ,Nanostructured Mater. 6, 205(1995)
37. T. G. Nieh, J. Wadsworth, “Hall-Petch relation in nanocrystalline solids ” ,Script Metall. Mater. 25, 955(1991)
38. H. Gleiter, “On the structure of grain boundaries in metals”,Mater. Sci. Eng.52, 91(1982)
39. L.Huetman,et al, ”Initial growth of TiN on different phases of high speed steel”, Thin solid films vol. 124,Iss2,1985,163-170
40. O. D. Greenwood, S. C. Moulzolf, P. J. Blau and R. J. Lad, “The influence of microstructure on tribological properties of WO3 thin films”, Wear, Vol.232, 1999, pp.84-90.
41 P. Harlin, P. Carlsson, U. Bexell and M. Olsson, “Influence of surface roughness of PVD coatings on tribological performance in sliding contacts”, Surface and Coatings Technology, Vol.201, 2006, pp.4253-4259.
42. Q. T. Vu, P. J. Pokela “Thermal oxidation of reactively sputtered amorphous W80N20 films“California Institute of Technology, Pasadena, California 91125
43. D. Bragaa, J.P. Diasa, A. Cavaleiro “Duplex treatment: W–Ti–N sputtered coatings on pre-nitrided low and high alloy steels” Surface & Coatings Technology 200 (2006) 4861 – 4869
44. P. Hones a, R. Consiglio b, N. Randall b, F. Le′vy “Mechanical properties of hard chromium tungsten nitride coatings” Surface and Coatings Technology 125 (2000) 179–184
45. 江珮淳 “氮化鎢薄膜之製備以及其閘極特型之研究” 國立成功大學材料科學及工程學系 九十一學年度畢業碩士論文
46. 丁志華 管平正 奈米壓痕量測系統簡介 國家元件實驗室
47. 林士傑 應用無電解電鍍與電泳技術於玻璃基板沉積研究 國立中山大學機械與機電工程學系九五學年度碩士論文
48. 張瑞慶 奈米壓痕技術與應用 聖約翰科技大學
49. 魏伯任 奈米壓痕實驗應用於塊材覆膜材料機械性質以及硬脆材料黏彈性錫量測-理論分析與實驗印証 國立成功大學機械工程研究所94 博士論文
50. 張啟釗 参雜銀鎢之氮化鈦陶瓷薄膜磨潤性能研究 國立成功大學機械工程研究所92 碩士論文
51. N.M.G. Parreira*,N.J.M. Carvalho, A. Cavaleiro “Synthesis, structural and mechanical characterization of sputtered tungsten oxide coating” Thin solid films 510(2006) 191-196
52. 謝宜寰 添加鎢元素之鉻薄膜高溫氧化磨潤性研究 國立成功大學機械工程研究所96 碩士論文
53. Oliver, W.C., and Pharr, G.M., 1992, An improved technique for determining hardness and elastic-modulus using load and displacement sensing indentation experiments, J. Mater. Res., 7, pp. 1564-83.
54. Nix, W.D., and Gao, H., Indentation size effects in crystalline: a few for strain gradient plasticy, J. Mech. Phys. Solids. 3, 46, p411~425, 1998.
55. Odegard G.M., Lai J.s., and Onaran K., 2005, Characterization of Viscoelastic
Properties of Polymeric Materials Through Nanoindentation, ,Society for Experimental Mechanics, Vol. 45,No. 2.
56. Findley W.N., et al., 1989, Creep and Relaxation of Nonlinear Viscoelastic Materials, Dover Publications, New York
57. Li, X., Diao, D., and Bhushan, B., 1997, Fracture mechanisms of thin amorphous carbon films in nanoindentation, Acta Mater. 45, pp. 4453-61.
58. Li, X., and Bhushan, B., 1998, Measurement of fracture toughness of ultra-thin
amorphous carbon films, Thin Solis Films 315, pp. 214-21.
59. Li, X., and Bhushan, B., 1999, Evaluation of fracture toughness of ultra-thin amorphous carbon coatings deposited by different deposition techniques, Thin Solis Films 355, pp.330-6.