現今半導體製程的蝕刻機台腔體氧化鋁和PVD機台腔體純鋁防護層材料對於離子轟擊皆有防護性不足的問題，且在機台腔體開啟和關閉間也有高低溫循環造成塗層熱衝擊效應的挑戰，故本研究利用電漿熱熔射製程，導入氧化釔、氟氧化釔和鋁鉭合金塗層取代現有的氧化鋁和純鋁塗層，基材選擇5052鋁合金，從而針對塗層微觀組織、機械性質、顆粒沖蝕磨耗性質和熱衝擊性質進行探討。
根據實驗結果，在陶瓷塗層的部分，氧化釔和氟氧化釔塗層皆有隨著功率條件提高，塗層孔隙率愈低趨勢，但對於塗層相結構和結晶度無明顯差異。在機械性質方面，氧化釔塗層硬度和鍵結強度優於氟氧化釔，對於耐顆粒沖蝕磨耗性則差距不大。在塗層抗熱衝擊性比較下，孔隙率較低的氟氧化釔塗層有較佳塗層抗熱衝擊性，故在未來隨著尺寸逐漸限縮趨勢下，氟氧化釔在高功率條件，相較於氧化釔和氧化鋁有較好的腔體防護特性。
在合金塗層部分，鉭元素微量添加，塗層相結構和微觀組織並無差異，又塗層和基材材料性質相似，使得合金塗層抗熱衝擊性無顯著差異。在塗層機械性質和耐顆粒沖蝕磨耗性方面，鉭元素添加在鋁基地，除了可增進塗層內聚強度之外，塗層耐顆粒磨耗性也有顯著提升，因此鋁鉭合金塗層相對於純鋁塗層有較佳腔體防護應用性。

In this study, the aluminum oxide and the pure aluminum protective layer material of etching chamber and PVD chamber inner wall have insufficient protection against ion bombardment, and there are thermal cycling effect between the opening and closing of the chamber, so this study uses thermal plasma spray process to introduce yttrium oxide, yttrium oxyfluoride and Al-Ta alloy to replace aluminum oxide and pure aluminum coatings. Al 5052 alloy is used as substrate. The microstructure, mechanical properties, resistance of particle erosion and thermal shock of coatings are discussed.
According to the experimental results, in the ceramic coating part, both yttrium oxide and yttrium oxyfluoride have a tendency to decrease the porosity of the coating with higher power conditions, but there is no significant difference in crystallinity of coating. In terms of mechanical properties, hardness and bonding strength of yttrium oxide coatings are better than yttrium oxyfluoride, and there is not much difference in particle erosion. Yttrium oxyfluoride coating under high power conditions (F750) has better thermal shock resistance than the others. With the trend of gradually shrinking in size, yttrium oxyfluoride has better protection compared with yttrium oxide and aluminum oxide under high power conditions.
In the alloy coating part, there are no difference in crystallinity and microstructure of coatings, and the coating (Al-Ta alloy) and substrate (Al 5052 alloy) materials have similar properties. Thermal shock resistance of coatings are not significantly different. In terms of mechanical properties and particle erosion, the addition of tantalum in aluminum matrix improves the cohesive strength and particle erosion of coating, so the Al-Ta alloy coating has better protection than pure aluminum coating.

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