本論文為奈米壓痕實驗應用於塊材之疲勞行為與覆膜材料之疲勞破壞能量的理論分析與實驗印證，內容主要可分為三個部分。第一個部分為壓痕巴黎定律，巴黎定律為研究疲勞裂縫延伸速率時，所使用的破裂力學，亦即疲勞裂縫延伸速率與應力強度因子之間的關係。在理論方面，以壓痕破裂模式（Mechanism of indentation fatigue）為基礎，藉由應力強度因子範圍、週次比（R）與壓深進展率（dh/dN）間的關係，去探討震盪段的負載條件，對壓深進展率的影響。結果顯示，就震盪平均負載（Pm）、震盪振幅（Po）及震盪頻率（f）而言，震盪頻率為影響疲勞壓深進展率的主要因素。而實驗方面，利用奈米壓痕機台去設定ㄧ震盪負載函數，在震盪負載（Oscillating load）段前加入一最大停滯負載段（Pmax），以避免震盪段受到潛變效應（Creep effect）的影響，進而由震盪段的壓深與時間反應，去求得單純疲勞壓深進展率。
第二部分為壓痕疲勞減緩的研究。不同於以往過量或低量荷重（Over or Underload）的方式，本研究以連續間斷震盪負載去探討材料疲勞減緩的行為。在理論方面，壓深進展率會隨著震盪停滯段的次數（i）增加，而以α（Retardation constant）為公比呈等比數列遞減。
其中α為一與震盪停滯時間有關之常數。且研究結果顯示，壓深進展率的減緩程度與總震盪停滯時間有關。實驗方面，由奈米壓痕試驗機台，設計ㄧ連續間斷的震盪負載函數，即以震盪停滯段將震盪段區隔成數段的方式，去探討材料的疲勞減緩效應。
第三個部分為覆膜材料之疲勞破壞能量，此覆膜材料為矽底材披覆氧化矽薄膜。理論方面，提出一以塑性能為考量的能量法，藉由週期預測能（Wi）與複合破壞能（Wd）之差，去求得近似膜薄疲勞破壞所需的能量（Wf）。實驗方面，由震盪段的負載條件，去探討震盪平均負載、震盪振幅及震盪頻率對Wf的影響。結果顯示，震盪頻率為影響Wf的重要因素。在較高震盪頻率時（f ＞10），Wf會隨著破壞前的壓深進展率（(dh/dN)bf）的增加而遞減；在較低震盪頻率時（f ≦10），Wf幾乎為一定值，而具有一固定的破壞能量上限。

The aims of this paper are to study fatigue behaviors of bulk and develop a energy method of fatigue fracture for coating materials by using cyclic load of nanoindentation. In the part of fatigue behaviors of bulk, we discuss the Paris Law and fatigue retardation for the specimens 6061 Al and 304 HSS. Paris Law is a theory of fracture mechanics related to fatigue crack propagation which has some different forms related to parameters of stress ratio(R) and stress intensity variance. Based on the mechanism of indentation fatigue, we applie these two parameters to develop a formula for discussing the effects of cyclic load conditions about indentation depth propagation rate(dh/dN), including oscillating mean load(Pm)、oscillating amplitude(Po) and oscillating frequency( f ). The experimental results show that f is the most important factor to dh/dN. And dh/dN of this study is a purely fatigue behavior by avoiding the creep effect of oscillation segment due to max loading-hold(Pmax) setting.
In the part of fatigue retardation, the setting of oscillating load is a continuously interrupted oscillation type which oscillating segment is divided to several sub-segments with the oscillating-hold intervals. The side of theroy, dh/dN would decrease as the number of oscillating-hold (i) increasing and the decreasing tendency is a propotional series with a common ration α which is related to oscillating-hold time. Finally, results show the quantity of fatigue retardation is dominated by total oscillating-hold time.
The last part of energy method of fatigue fracture for the SiO coating material which substrate is Si. We only consider the plastic energy during the all load-depth of indentation process, using difference between cyclic predicted energy Wi and composite fracture energy Wd to evaluate the fatigue fracture energy of pseudo-film Wf. And Wi is predicted by the depth propagation rate before fatigue fracture (dh/dN)bf during oscillating segment. Experimental results show that the frequency of oscillating load condition is an only effective factor to Wf. Wf would decrease as (dh/dN)bf increasing under relative high oscillating frequency (f >10 Hz), and Wf is asymptotic to a constant having a constant fracture energy limit under relative low oscillating frequency (f≦10 Hz).

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