近年來，隨著半導體製程的進步，半導體雷射的共振腔長度不斷的縮小，其中共振腔長度為數個半波長的大小的雷射結構，稱之微共振腔結構。微共振腔雷射具有體積小、功耗低以及成本便宜等優勢。本論文運用金屬與週期性的介電質結構(分散式布拉格反射鏡)製作混合式微共振腔，其中，金屬和週期性介電質結構表面會形成一種新型態的表面電漿子稱之為塔姆電漿子(Tamm Plasmon)，藉由週期性結構的介電質與金屬薄膜將能量限縮於共振腔內並提升光與物質耦合的強度。此結構不同於一般表面電漿雷射只能容許 TM 模態的存在，塔姆電漿子雷射可同時具有 TE 與 TM 模態，在訊號傳遞上多了一個自由度(degree of freedom)。至今表面電漿極激子雷射的光激發研究幾乎只能在低溫下實現，而金屬薄膜的粗糙度所造成的高損耗也提高了雷射的閾值，以上是目前此類型元件所面臨的困難點。為了克服以上困難，我們選擇在金屬與介電質間所加入有機鈣鈦礦，利用有機鈣鈦礦高光學增益的特性降低閾值，並藉由調整鹵素的成分，達到理想的發光波段。我們更進一步利用電子束蒸鍍機(E-gun)的鍍率來成長金屬薄膜，並透過原子力顯微鏡(AFM)的觀察，有效控制金屬粗糙度，進而提升整體雷射共振腔的品質因子(Q factor)。

In this research, we developed a high-quality Tamm plasmon laser cavity. We chose perovskite as the gain medium and avoided damaging the gain medium in the fabrication process. Therefore, we spin-coated perovskite on the bottom reflector and coated metal on the top layer. Then, we fabricated the laser cavity by bonding the top and bottom mirrors. To effectively improve the metal surface roughness and reduce the interface scattering loss, we controled the e-gun's sputtering rate to control the metal film roughness. We also studied how the Q value of the resonant cavity mode changes when the laser cavity is bonded by different pressures. We have confirmed that we squeeze the cavity through experiments with less force to improve the Q factor (value 358.7). According to the reflection spectrum, we also uccessfully demonstrated the Tamm plasmon TE polarization mode in the equipment and fabricated the Tamm laser cavity.

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