每家企業最大的目標不外乎是重視品質、壓低生產成本並追求最大利潤，設備維護演進之方式，從定期設備保養，進展到較高技術之預知保養的方式，將對製造產業設備維護成本有非常大的影響。本研究透過實證分析，以期望得到曝光光罩預防維護保養單位時間內最小綜效成本的決策，其中綜效成本包括各設備閒置成本、光罩清洗成本、檢測成本、人力成本及風險(重工及報廢)管控成本。為了建立本研究對象在曝光製程機台的曝光光罩預防維護保養模型，來求得曝光光罩置換策略，利用電腦模擬軟體來取代相當複雜的數學運算式，後續只需調整及變更參數的設定值，就可進行參數的敏感度分析、比較曝光光罩預防維護保養不同策略的優劣。本研究得到的結果如下：1.維持曝光光罩在光罩清洗機忙碌且無備用光罩的情形下，仍持續生產直到光罩清洗機閒置或有備用光罩可以使用的清洗策略具較低之綜效成本，2.固定式的光罩清洗頻率造成綜效成本居高不下，3.在不同的生產情形下，可以提供決策者快速地參考如何制定最佳的曝光光罩預防維護保養策略，助於實務面上曝光光罩預防維護保養的決策管理。

The biggest goals of firms are to improve product quality, minimize production costs and maximize profits. Equipment maintenance has a big impact on cost reduction in manufacturing industries. This study aims to establish an exposure mask replacement policy to achieve minimal total cost in exposure masks preventive maintenance, where total cost includes the cost of idle equipment, mask cleaning cost, testing cost, labor cost and risk (rework and scrap) control cost. This study uses computer simulation software to establish the exposure masks preventive maintenance models under two policies, and compare them by conducting sensitivity analysis. The results of this study are as follows: 1. The preventive maintenance policy with permissible delay has a smaller total cost. 2. The preventive maintenance policy with no delay incurs a high total cost. 3.The common defect distribution has an impact on exposure mask preventive maintenance.

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