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研究生: 張李毓
Chang, Li-Yu
論文名稱: 探討流道尺度對聚二甲基矽氧烷表面聲波微流體晶片壓力節線的變化
Effect of channel dimension on pressure-nodal lines in PDMS based acoustofluidics
指導教授: 莊怡哲
Juang, Yi-Je
學位類別: 碩士
Master
系所名稱: 工學院 - 化學工程學系
Department of Chemical Engineering
論文出版年: 2023
畢業學年度: 111
語文別: 中文
論文頁數: 87
中文關鍵詞: 表面聲波駐波微流體晶片聚二甲基矽氧烷聯結層側壁效應壓力節點粒子聚焦
外文關鍵詞: standing surface acoustic wave(SSAW), microchip, polydimethyl siloxane(PDMS), coupling layer, sidewall effect, pressure node
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  • 表面聲波微流體晶片是以聲輻射力作為主要驅動力來操控粒子或細胞的生
    物晶片,與傳統聚焦法不同的地方在,粒子不須經過前處理,而可以根據其本
    身體積、密度、壓縮比等性質進行聚集排列。此外,其樣品消耗少、可控性高
    等優點,已然成為生醫工程領域的熱門研究方向。然而,在使用聚二甲基矽氧
    烷(PDMS)與表面聲波駐波(SSAW)組成的微流體晶片中,過往研究對於流道中
    壓力節點與壓力反節點的聚焦位置敘述甚少,儘管部分文獻中提出以 1D、2D
    模擬預測聚焦結果,仍然存在不少與實驗結果相異之處。
    對此,本研究首先以可重複使用之微流體晶片,探討不同聯結層厚度與底
    板材質對螢光粒子聚焦速度的影響。接著,使用直接接合式微流體晶片並以改
    變流道設計及側壁性質的方式,探討側壁效應對壓力節點分布的影響並嘗試穩
    定消除側壁效應。最後,利用不同流道寬度置中對準壓力節點與反節點,對應
    兩波長大小不同的雙邊指叉狀電極,探討壓力節點於流道中分布情形,並以
    1D-HSW 分析預測節點數量及其成因。
    研究結果顯示,可重複使用微流體晶片十二烷連結層厚度對粒子聚焦速度
    的自然對數值呈線性衰減,且使用底板材質 PET 相較於玻璃透射聲波能力高出
    約為 3.3 倍,但聚焦速度仍不及直接接合式晶片。對於側壁效應的研究,僅透
    過區域性的側壁改質以及簡單的流道收縮突擴設計,並無法穩定消除側壁效
    應。最後,分析不同流道寬度於 90μm-IDTs、180μm-IDTs 形成壓力節點位置,
    以 1D-HSW 理論能夠大致預測其節點數量及分布,且平移流道 1/4 波長距離能
    明顯改變流體壓力勢場的分佈。而節點預測失敗之結果,推測為流場內聲波駐
    波以一定折角進入流場,同時波長發生改變導致其分布及數量並不如預期。

    In SSAW-based microfluidic chips, particles will be trapped at either the pressure
    nodes or antinodes depending on the properties of the particles, the fluid, and the
    channel wall. For the PDMS-SSAW based microfluidic device, the number of
    pressure nodal-lines varied with the microchannel width or acoustic wavelength has
    been discussed. In this study, first, utilization of the reusable microchips was
    proposed. Then, eliminating sidewall effect by using convergent-divergent channel
    design or integrating the metallic block in the channel wall were investigated. Last,
    the number of pressure nodal-lines in different microchannels was discussed and the
    results were interpreted by 1D-HSW model.

    中文摘要 I Extended Abstract II 誌謝 IX 目錄 X 表目錄 XII 圖目錄 XIII 第一章 緒論 1 1.1前言 1 1.2研究動機與方法 2 第二章 文獻回顧 3 2.1 微流體晶片(microfluidic chip) 3 2.2 粒子聚焦技術(particle focusing methods) 3 2.2.1鞘流聚焦(sheath flow focusing) 3 2.2.2 無鞘流聚焦(sheathless focusing) 6 2.3 表面聲波(surface acoustic wave, SAW) 11 2.3.1 表面聲波概論 11 2.3.2 壓電效應 12 2.3.3 表面聲波元件 13 2.3.4 表面聲波駐波聚焦 19 2.3.5 側壁效應(sidewall effect) 22 2.3.6 相位轉移(phase shift) 25 第三章 實驗設備與步驟 29 3.1實驗藥品與材料 29 3.2實驗儀器與設備 32 3.3實驗步驟 35 3.3.1雙邊指叉狀電極製程 35 3.3.2微流體流道製程 38 3.3.3表面聲波元件製程與頻率測試 41 第四章 結果與討論 44 4.1可重複使用之聲波微流體晶片 44 4.1.1 不同聯結層厚度下螢光粒子的移動速度 44 4.1.2 不同底板材質下螢光粒子的移動速度 49 4.2 表面聲波側壁效應 54 4.2.1 內縮-突擴設計之PDMS微流道 54 4.2.2 內縮-平邊-突擴設計之PDMS微流道 58 4.2.3 鉑鍍層PDMS微流道 61 4.2.4 Sn/Cu合金植入PDMS微流道 66 4.3 表面聲波駐波壓力節點的變化 68 4.3.1 90μm-IDTs於不同寬度流道之壓力節點分布 68 4.3.2 180μm-IDTs於不同寬度流道之壓力節點分布 75 第五章 結論 82 第六章 參考文獻 83

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