近年來，隨著高科技的進步，在半導體工廠中一直扮演著有如身體中的淋巴系統散佈於全廠任一環節中的廠務系統，其工程人員的緊急維修應變能力是最需被注重的，一旦錯過系統故障維修的黃金時間，將面臨全廠性停產的重大影響。
目前工程人員在面對系統設備故障診斷問題時，僅能依靠維修經驗的累積或是參考維修手冊等方式，來找出系統故障原因，且員工的流動頻繁，使得企業面臨著資深員工培養不易，維修手冊使用率偏低的情況。近年來由於專家系統的發展已有相當的成果，有不少的研究利用專家系統建構來輔助維修人員進行故障診斷，也都有不錯的成效，故障診斷技術在機械工程領域的應用非常廣泛，其中在汽車故障診斷領域中的應用最具代表性。但應用在半導體廠務大宗化學供應系統之故障診斷系統的建構過程中，系統建構者卻往往面臨著知識擷取困難及決策分析可靠度等問題，有鑑於此，本研究採用階層式檢查生成規則HCPR，它可以幫助系統建構者更條理的建構故障診斷諮詢系統知識庫，亦可以縮短系統規則的搜尋時間。
另外，驗證本研究之故障診斷系統在實務應用的可行性，以軟體Visual Basic 6.0建立一套『半導體廠務大宗化學供應系統故障診斷諮詢系統』，以利日後維護人員能在短時間內掌握機器故障的原因，進而迅速達成故障排除的工作，並可依賴此系統具備的決策精確度，同時提供廠區備料情況與相關廠商資料，以強化人員對系統的掌控能力，降低運轉上的風險。

Most of engineers who are employed at a semiconductor foundry only depend on the accumulation of maintain experience or consult manual books to find out trouble reasons and the staff's loyalty to the company not never wavered. Thus it is difficult to make enterprises toward staff's training. A fault diagnosis technology has been established in expert system.
But knowledge engineer is difficult to construct knowledge and analyses reliability problem from knowledge data. In view of this issue, our research adopts hierarchical censored production rule (HCPR)-based system to help knowledge engineer build a systematic fault diagnosis advisory system. This system would strengthen personnel's ability of controlling to the system and reduce the risk of operating.
In order to test and verify this fault diagnosis advisory system, we establish an application software by Visual Basic. We also arrange an experimental design to make an efficiency analysis. These results would prove that this fault diagnosis advisory system is suitable to made great progress for novices.

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