簡易檢索 / 詳目顯示

研究生: 蕭博元
Hsiao, Po-Yuan
論文名稱: 探討直接晶片接合封裝體在導電層處之破壞分析
Discussion of the Failure at the Conducting Layer for Direct Chip Attach Package
指導教授: 陳榮盛
Chen, Rong-Sheng
學位類別: 碩士
Master
系所名稱: 工學院 - 工程科學系
Department of Engineering Science
論文出版年: 2014
畢業學年度: 102
語文別: 中文
論文頁數: 175
中文關鍵詞: 直接晶片接合封裝體全域/局部模型分析法導電層
外文關鍵詞: Direct Chip Attach Package, The Global/Local Method, Conducting Layer
相關次數: 點閱:98下載:3
分享至:
查詢本校圖書館目錄 查詢臺灣博碩士論文知識加值系統 勘誤回報
  • 近年來,由於電子產品的不斷進步與革新,對IC的輕薄短小、高頻、高速與高散熱率需求日增,使得覆晶封裝體等可縮小IC面積的封裝產品成為產品主流,故本文將針對直接晶片接合封裝體進行研究,探討封裝體導電層之受力狀況,希望透過分析能了解導電層之脆弱處以確保產品之品質穩定。
    本文使用ANSYS12.0有限元素分析軟體對直接晶片接合封裝體進行分析,施予模型從-45℃至125℃的溫度循環負載,其中錫球考慮為彈塑性材料,其他材料視為彈性材料。在分析時採用全域/局部模型分析法,在全域模型中將導電層以等效參數取代,並在局部模型中還原導電層各層,使其達到精準性與收斂性,並觀察導電層受力行為,並發現高溫時Y方向應力極值-231.06Mpa發生於最下層之氧化層底部,低溫時Y方向應力極值-371.448Mpa發生於最上層之銅層,形成可能脫層與剝落之位置,並作為標準形式。
    其次,改變溫度循環負載如:改變高溫、低溫、恆溫時間、升降溫率,並與標準形式作比較,觀察導電層應力大小之改變與破懷模式。最後改變導電層結構,增加導電層中銅層之層數,分析與標準形式之差異。將這些因子作比較顯示導電層結構中銅層數影響最大,在4層銅層與8層銅層比較下,銅層層數越多,低溫時導電層各層Y方向應力增加,其中銅層與氧化層分別增加31.7%與23.3%,高溫時應力則是減少,銅層與氧化層分別減少102%與128%。

    In recent years, with the continuous progress and innovation of the electronic products progress, the requirements for frivolous short, high frequency, high speed and the high heat emission to the IC chip has increased. As a result, the flip chip and some similar packages which are facilitated to reduce the IC area become the mainstream product in the market. By adopting the Direct Chip Attach Package, this paper aims to investigate the stress condition at the conducting layer of the package so as to figure out the fragile location of the conducting layer and ensure the stability of product quality.

    The ANSYS 12.0 finite element analysis is employed as well as the Direct Chip Attach Package is subjected by the thermal cycle of -45℃~125℃. The solder ball is considered as elasticplastic while other components are treated as elastic. The Global/Local Method is adopted for analysis. The material properties of the conducting layer is replaced by equivalent parameters in the global model and the original parameters are restored to each conducting layer in the local model so as to achieve certain accuracy and convergence, and then the stress behaviors of the conducting layer are investigated. It is found that the maximum Y component of stress is -231.06Mpa located at the bottom of oxide layer in high temperature while the maximum Y component of stress is -371.448Mpa located at the top of the copper layer in low temperature. It seems that the two locations are easy to delaminate and crack. The above model is regarded as the standard model.

    Secondly, the temperature cycle loading, such as high temperature, low temperature, time of constant temperature and the heat rate, is changed to compare with the standard model in which the stress changing and the failure mode in the conducting layer are observed. Finally, the structure of the conducting layer is changed, such as the increase of the amount of copper layers, to analyze its difference from the standard model. By comparing with those factors, the amount of copper layers is more significant factor which is changed from 4 copper layers to the 8 copper layers for the structure of the conducting layer, it shows that more copper layers in conducting layers, higher Y component of stress happening in each part of conducting layers in low temperature. Y component of stress is 31.7% increasing in copper layers and 23.3% increasing in oxide layers. It also shows the opposite results in high temperature where Y component of stress is 102% decreasing in copper layers and 128% decreasing in oxide layers.

    中文摘要 I 英文延伸摘要 III 誌謝 VII 目錄 VIII 表目錄 XIII 圖目錄 XVIII 符號表 XXXIII 第一章 緒論 1 1-1 前言 1 1-2 研究動機與目的 2 1-3 文獻回顧 2 1-4 研究方法 4 1-5 章節提要 5 第二章 理論基礎 6 2-1 研究主題 6 2-2 錫球外形之預測 7 2-3 線性分析理論 9 2-4 非線性分析理論 11 2-4-1 塑性行為模式 11 2-4-2 潛變行為模式 14 2-5 混合法則 17 2-6 全域/局部模型分析法 18 第三章 有限元素模型建立與分析評估 24 3-1 直接晶片接合封裝體 24 3-1-1 直接晶片接合技術簡介 24 3-1-2 封裝體結構與材料性質 25 3-2 直接晶片接合封裝體模型之建構與分析方法 26 3-2-1 封裝體模型之基本假設 26 3-2-2 錫球外型曲線 27 3-2-3 封裝體分析模型之建構 27 3-2-4 全域模型之分析型態與邊界條件 28 3-2-5 溫度循環負載 29 3-2-6 全域模型之分析結果 29 3-3全域模型網格收斂分析 30 3-4 全域模型之評估 30 3-4-1 位移分布 31 3-4-2 導電層應力分布 31 3-5 局部模型之建構與收斂分析 32 3-5-1 局部模型之分析型態與邊界條件 32 3-5-2局部模型收斂分析 33 3-5-3 局部模型範圍收斂分析 33 3-6 局部模型導電層分析 34 3-6-1 導電層層間拉力影響 34 3-6-2 導電層各層受拉力趨勢 35 3-6-3 導電層剪力影響 35 3-6-4 導電層各層間受剪力趨勢 36 3-6-5 導電層各層界面應力分布 36 3-6-6 導電層破壞模式 37 第四章 溫度負載之變化與微結構改變對導電層討論 76 4-1 固定高溫125℃,改變低溫之溫度負載 76 4-1-1 低溫-55℃溫度循環負載 76 4-1-2 低溫-55℃結果討論 77 4-1-3 低溫-65℃溫度循環負載 77 4-1-4 低溫-65℃結果討論 78 4-1-5 低溫-55℃、-65℃與標準形式作比較 78 4-2固定低溫-45℃,改變高溫之溫度負載 79 4-2-1 高溫135℃溫度循環負載 80 4-2-2 高溫135℃結果討論 80 4-2-3 高溫145℃溫度循環負載 81 4-2-4 高溫145℃結果討論 81 4-2-5 高溫135℃、145℃與標準形式作比較 82 4-3 改變升降溫率之溫度負載 83 4-3-1加快升降溫率至0.283℃/S 83 4-3-2加快升降溫率至0.283℃/S結果討論 83 4-3-3加快升降溫率至0.567℃/S 84 4-3-4加快升降溫率至0.567℃/S結果討論 84 4-3-5降低升降溫率至0.142℃/S 85 4-3-6降低升降溫率至0.142℃/S結果討論 85 4-3-7降低升降溫率至0.113℃/S 86 4-3-8降低升降溫率至0.113℃/S結果討論 86 4-3-9升降溫率0.113℃/S、0.142℃/S、0.283℃/S、0.567℃/S與標準形式作比較 87 4-4 改變恆溫時間之溫度負載 88 4-4-1減少恆溫時間至600秒 88 4-4-2減少恆溫時間至600秒結果討論 88 4-4-3增加恆溫時間至1200秒 89 4-4-4加快升降溫率至0.567℃/S結果討論 89 4-4-5增加恆溫時間至1200秒結果討論 90 4-5 調整導電層之銅層層數 91 4-5-1 6層銅層之導電層 91 4-5-2 6層銅層之導電層結果討論 91 4-5-3 8層銅層之導電層 92 4-5-4 8層銅層之導電層結果討論 92 4-5-5 6層銅層、8層銅層與標準形式作比較 93 第五章 結論與未來研究方向 168 5-1 結論 168 5-2 未來研究方向 172 參考文獻 174

    [1] Patra, S. K. and Lee, Y. C. “Quasi -Static Modeling of the Self-Alignment Mechanism in Flip-Chip Soldering-Part I:Single Solder Joint,” Journal of Electronic Packaging, pp. 337-342, 1991.
    [2] Brakke, K. “The Surface Evolver”, Experimental Mathematics, No.2, pp. 141-165, 1992.
    [3] J. H. Lau and D.W. Rice, “Thermal Fatigue Life Prediction of Flip Chip Solder Joints by Fracture Mechanics Method” ,Advances in Electronic Packaging ASME, pp.385-392, 1992.
    [4] J. H. Lau , “ Flip Chip Technologies ” , McGraw-HillCompanies, Inc. New York, 1997.
    [5] J. H. Lau and Yi-Hsin Pao,“Solder Joint Reliability of BGA, CSP, Flip Chip, and Fine Pitch SMT Assemblies”, McGraw-Hill Companies, Inc. New York,1997.
    [6] Wang, C.H., Holmes, A.S. and Gao, S. “Laser-assisted Bump Transfer for Flip Chip Assembly”, Electronic Materials and Packaging, Hong Kong, pp. 86-90, 2000.
    [7] Gao S, Holmes A.S. (2006) “Thermosonic flip chip interconnection using electroplated copper column arrays”, IEEE TRANSACTIONS ON ADVANCED PACKAGING,Volume: 29,pp.725-734,NOV 2006.
    [8] K. M. Chen, “Effects of underfill materials on the reliability of low-K flip-chip packaging”, Microelectronics Reliability,Volume:46,pp. 155–163,2006.
    [9] C. L. Yeh, Y. S. Lai and C. L. Kao, “Comprehensive dynamic analysis of wirebonding on Cu/Low-K wafers”, IEEE Transactions, Electronics Packaging Manufacturing Volume:29, No.2, pp.264-270,2006.
    [10] Jimmy Ong, Xiaowu Zhang and V. Kripesh,“Structural Design and Optimization of 65nm Cu/low-k Flipchip Package”9th Electronics Packaging Technology Conference, pp. 488-492,2007.
    [11] Jimmy M. G. Ong, Andrew A. O. Tay, Member, IEEE, X. Zhang, V. Kripesh, Y. K. Lim, D. Yeo, K. C. Chan, J. B. Tan, L. C. Hsia, and D. K. Sohn,“Optimization of the Thermomechanical Reliability of a 65 nm Cu/low-k Large-Die Flip Chip Package”,IEEE TRANSACTIONS ON COMPONENTS AND PACKAGING TECHNOLOGY, VOL. 32, NO. 4,pp.838-848, DECEMBER 2009

    [12] M. Drozdov, G. Gur, Z. Atzmon and W. D. Kaplan, “Detailed investigation of ultrasonic Al-Cu wire-bonds: I. Intermetallic formation in the as-bonded state”, Journal of Materials Science, Vol.43, No.18, pp. 6038-6048,2008.
    [13] C. J. Hang, C. Q. Wang, M. Mayer, Y. H. Tian, Y. Zhou and H. H. Wang, “Growth behavior of Cu/Al intermetallic compounds and cracks in copper ball bonds during isothermal aging”, Microelectronics Reliability, Vol.48, No. 3, pp. 416-424,2008.
    [14] Sébastien Gallois-Garreignot, “Chip Package Interactions: Package Effects on Copper Pillar bump induced BEoL Delaminations& Associated Numerical Developments”.
    [15] John H. Lau, C. P. Wong, John L prince, Wataru Nakayama, “Electronic Packaging: Design, Materials, Process and Reliavility”, pp.235-241,1998.
    [16] Syed, A. “Accumulated creep strain and energy density based thermal fatigue life prediction models for SnAgCu solder joints”, Proceedings of the 54th Electronic Components and Technology Conference, June 2004, Las Vegas, Nevada, USA, pp.737-746
    [17] Kaw AK, “Mechanics of composite materials. 2nd ed”. New York: CRC Inc.; 2006.
    [18] Tsai SW, Hahn HT, “ Introduction to composite materials”. Pennsylvania : Technomic Publishing; 1980.
    [19] C. Bailey, S. Stoyanov,“Reliability of Flip-Chip Interconnect for Fine Pitch Applications”, IEEE, School of Computing and Mathematical Sciences, University of Greenwich, Old Royal Naval College, London SE10 9LS,2004.
    [20] Lu, H. Bailey, C, “Computer modelling of the reliability of flip chips with metal column bumping” IEEE, pp. 967-973, 2002.
    [21] Lu, H. Bailey, C, “Predicting Optimal Process for Flip-Chip Assembly Using Copper Column Bumped Dies” IEEE, Electronics Packaging Technology Conference, pp. 338-343, 2002.
    [22] Bert A. Zahn, “Solder Joint Fatigue Life Model Methodology for 63Sn37Pb and 95.5Sn4Ag0.5Cu Materials”, 2003 Electronic Components and Technology Conference.

    下載圖示 校內:立即公開
    校外:立即公開
    QR CODE