本研究以濺鍍方式製備Ag-In-Sb-Te非晶薄膜，探討銀含量改變（6、8、13 at% Ag）對Ag-In-Sb-Te相變記錄層材料之非晶相穩定性以及光學特性影響。
　　為評估非晶相之穩定性，使用熱差掃描分析儀（DSC），控制不同昇溫速率，調查結晶放熱行為，並利用Kissinger方法計算其相變活化能。由實驗結果得知，隨著薄膜中Ag含量增加，造成材料非晶轉結晶之相變活化能上升，造成此相轉變較困難，由此推測提升Ag含量對於此Ag-In-Sb-Te非晶薄膜之相穩定性有所助益。
　　此外，恒溫（160 oC、180 oC、200oC、250 oC、300 oC）結晶化熱處理後之相分析結果顯示，其結晶相主要為Sb相以及少量的AgInTe2相。值得注意的是，高銀含量（13Ag）及低銀含量（6Ag）試片在200℃恆溫熱處理後發現僅有Sb相生成。
　　本研究亦進行非晶態及經熱處理之結晶試片光學性質調查。結果顯示，6Ag及13Ag試片之非晶態反射率差異不大，但8Ag試片略低於另兩種試片，而其結晶態反射率高低順序為6Ag>8Ag>13Ag。因此，高銀含量（13Ag）試片反射率對比率之表現較差，中銀含量（8Ag）試片擁有較佳反射率對比率，低銀含量（6Ag）試片其光學特性介於高銀和中銀含量試片之間。
　　經由上述性質探討比較，本研究提出銀含量8 at% 之Ag-In-Sb-Te薄膜具適當相穩定性及較佳之光學特性，為應用於CD-RW之相變光碟記錄層材料之最佳成分。

　　This study aims to prepare Ag-In-Sb-Te amorphous thin films with various Ag contents by sputtering and investigates the effect of Ag content on the phase stability and optical properties.
　　In order to evaluate the phase stability of amorphous films, differential Scanning Calorimeter（DSC） is applied to examine the exothermic behavior of crystallization under different heating rates. Also, the Kissinger method is used to calculate the activation energy for crystallization. The results show that an increase in Ag content causes a higher activation energy, and thus makes the crystallization process more difficult. This implies that increasing Ag content can improve the phase stability of Ag-In-Sb-Te amorphous films.
　　The results of phase analysis by X-ray diffraction show that after the crystallizing heat treatment held at different temperatures (160 oC、180 oC、200oC、250 oC、300 oC), the microstructure of the Ag-In-Sb-Te films is a mixture of Sb and small amount of AgInTe2. Notably, AgInTe2 can not be detected in the 6 Ag and 13Ag specimens suffering the heat treatment at 200oC.
　　Optical properties of the films with amorphous and crystallized states are also investigated. The results indicate the reflectivity of the amorphous of 6Ag and 13Ag films are similar but 8Ag specimen is lower others, however, those of the crystallized films decreases in turn from 6Ag, 8Ag and 13 Ag. Therefore, reflectivity contrast of the 8Ag sample is greater than that of the 6Ag specimen, which is in turn greater than that of the 13Ag specimen.
　　From the aforementioned properties, this study proposes that the Ag-In-Sb-Te thin film with the Ag content of 8 at%, which possesses appropriate phase stability and superior optical performance, is recommended for application as the recording material for CD-RW disc.

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