本文將微製造技術應用於聚二甲基矽氧烷（PDMS）表面微圓柱陣列的製作，並以半徑2 mm玻璃半球探頭進行JKR黏著接觸實驗，量測具表面微結構材料所表現出的有效彈性模數 與有效表面黏著能 。微結構模具是利用負型光阻SU-8透過曝光顯影製程製作，再以此模具翻製出聚二甲基矽氧烷（PDMS）表面微圓柱陣列，依微柱的高度、直徑、排列密度、排列方式分類，比較不同的變因對JKR黏著接觸實驗結果所造成的影響，發現微柱的存在會降低聚二甲基矽氧烷（PDMS）的有效彈性模數 ；影響有效表面黏著能 最鉅的因素為與玻璃球相接觸之微柱頂部的形貌。在實驗過程中亦發現減載速率有可能影響黏著接觸實驗的結果。

In this study, micro-columns on the surface of Polydimethyl Siloxane (PDMS) sample were fabricated by lithography, and the effective elastic modulus E and effective work of adhesion W of PDMS sample with micro-columns were measured by the JKR adhesive contact test using a hemispherical glass of radius 2mm. Negative photoresist SU-8 was used to fabricate the mold with micro-structures by UV light exposure and developing process, the micro-columns were then transferred on the surface of PDMS sample using this mold. PDMS samples were classified in terms of height, diameter and surface density of micro-columns, so that the effects of these parameters can be studied. From the experimental results, we found that the existence of micro-columns reduces effective elastic modulus E of the PDMS sample, and the effective work of adhesion W was strongly affected by the shape of micro-column top. Also, in the experiments, we found that different unloading rates may affect the results of the JKR adhesive contact test.

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