藉由液相沉積法使用硝酸鋅六水合物和四氨六甲圜生長溶液製備氧化鋅奈米結構已經論證。我們研究生長溶液濃度、沉積溫度和沉積時間等對氧化鋅奈米結構的成長參數。我們發現氧化鋅奈米柱的直徑和長度可以被控制。其直徑的最小尺寸可以到達50至60奈米，而長度則可以至600到800奈米之間的尺寸。我們透過X射線光電子能譜、能量散佈光譜儀、X光繞射儀來分析氧化鋅奈米結構的化學組成成分和元素鍵結，掃描電子顯微鏡及原子力顯微鏡則用來觀察薄膜的表面狀態。最後，我們實現液相沉積法的氧化鋅奈米結構層於粗化發光二極體的表面，並且增加其光發出效率。我們發現其發光效率於分別沉積三小時、五小時、七小時之下，分別增加12.57%、20.2%、16.9%。

ZnO nanostructures prepared by liquid phase deposition (LPD) method using a zinc nitrate hexahydrate (Zn(NO3)2‧6H2O) and hexamethylenetetramine(C6H12N4, HMT) solution were demonstrated. We investigated the growth parameters, such as solution concentration, deposition temperature, and growth time for ZnO nanostructures. We found that the diameter and length of the ZnO nanorods can be controlled. The minimum size was about 50~60 nm in diameter and 600~800nm in length. X-ray photoelectron spectroscopy (XPS), energy-dispersive spectrometer (EDS), and X-ray diffraction (XRD) were used to analyze chemical composition. Scanning electron microscopy (SEM) and atomic force microscopy (AFM) were also used to study the surface of the LPD-ZnO. Finally, we demonstrated the application of the LPD-ZnO layers which roughened the LED surface and increased the light extraction efficiency. We found that the light output power of green GaN-based LED improved by about 12.57%, 20.2% and 16.9% for 3hours, 5hours and 7 hours deposition time compared with those without the LPD-ZnO structures. The best enhancement of the light output power is 29.2% for our ZnO nanostructure application.

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