本研究以探討鋁薄膜陽極處理所生成之多孔氧化膜為主軸，透過SEM對多孔氧化膜表面形貌與剖面結構進行分析，並配合陽極處理過程中電壓電流對時間的關係，討論胞孔的生成機制，以及電壓大小、電解液溫度對多孔結構之影響。最後將陽極處理的胞孔孔距與準分子雷射再結晶的多晶矽尺寸作比較，找出適合的參數，以將多孔氧化鋁膜應用於新型多晶矽太陽能電池。
陽極處理電壓在60V與80V之下，氧化膜的阻障層厚度約都在50 nm，超過80V時阻障層厚度會隨電壓上升而變厚，電壓140V時平均厚度增加至200 nm；在電壓不超過100V時氧化膜胞孔孔壁厚度約在60~70 nm左右，當電壓大於100V時孔壁厚度呈線性增加的趨勢，電壓140V時孔壁之平均厚度為206 nm；在電壓60V與140V時平均孔距分別為134 nm及329 nm，胞孔平均孔距會隨電壓上升而變大；120V-40V之降壓反應後氧化膜的胞孔孔距、孔壁厚度、阻障層厚度分別為255nm、145 nm、73 nm。
陽極處理電壓120V的胞孔孔距與雷射照射參數450 mJ/cm2之下的晶粒尺寸相差不遠，而120V-40V之降壓處理與120V長時間處理後兩者的胞孔孔距非常相近，故可用降壓處理調整胞孔結構，以滿足在太陽能電池應用上的需求。

The research mainly explores the porous oxide from anodic aluminum thin film: to analyze the surface morphology and section structure of the porous oxidized membrane through SEM, and to match up the voltage- current-time relationship during anodizing process to discuss the formation of the pores and the influence of voltage and electrolyte temperature on the porous structure. Eventually, we compare the anodic interpore distance with the size of poly-Si from Excimer Laser re-crystallization to find out the most suitable parameter. It is for applying the porous oxidized aluminum thin film to the new type poly-Si solar cell.
The depth of the alumina barrier is about 50nm when using 60V and 80V of anodizing voltage. When the voltage is above 80V, the increase of voltage will result in the thicker barrier. The barrier thickness adds up to 200nm while voltage rises to 140V. The wall thickness of the pore structure is about 60~70nm under 100V, and it will increase linearly to 206nm while the voltage rises to 140V. The distances between pores are 134nm and 329nm respectively when voltages are 60V and 140V. The average distance will become farther with the mounting voltage. After 120V-40V reducing voltage process, the depth of barrier is 73nm, the wall thickness is about 145nm, the interpore distance is about 255nm.
The interpore distance after anodizing with 120V and the size of crystals under laser parameter of 450 mJ/cm2 are similar. Comparing the interpore distance after 120V-40V reducing voltage process and 120V long-term anodizing, we can discover that they are alike. So we can utilize the former process to adjust the pore structure for the application of solar cell.

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