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研究生: 顏伯任
Yan, Bo-Ren
論文名稱: 微型高G值感測器設計、製造、分析
Design, Fabrication, and Analysis of Micro High G Sensor
指導教授: 鄭泗滄
Jenq, S. T.
學位類別: 碩士
Master
系所名稱: 工學院 - 航空太空工程學系
Department of Aeronautics & Astronautics
論文出版年: 2010
畢業學年度: 92
語文別: 中文
論文頁數: 108
中文關鍵詞: 微型高G值感測器環形懸臂樑加速規應變計
外文關鍵詞: accelerometer, strain gage, ring type cantilever beam, micro strain gage
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  •   本文主旨利用半導體微型壓阻感測器進行材料衝擊測試的相關研究,搭配週邊的各項機械、電路元件後,將可組成一完整的動態衝壓測試系統。
      半導體微型壓阻感測器安裝於一環形懸臂樑根部,搭配商用應變計及加速規的校正後,可得微型壓阻感測器的靈敏度為11.96;另外經實驗與理論證明後,可知微型壓阻感測器的應變訊號,將與懸臂樑自由端的加速度訊號呈線性關係。
      由微型壓阻感測器所組成的衝擊系統,經多次高G值衝擊實驗後,證明其具有不錯的訊號反應能力,同時藉由商用有限元素軟體LS-DYNA 3D的輔助,可使我們更加了解試材料在衝擊瞬間的機械動態反應,如此將可與實驗結果進行相關的驗證。

      The purpose of this thesis is to study the dynamic response of semiconductor micro strain gage. Semiconductor micro strain gage, mechanical components, and electronics can be applied to establish an impact test system. Besides, digital signal sampling card is added to acquire real time reflection of micro sensor. It will help us to analyze the condition of micro sensor during the period of impact.
      Micro strain gage are fixed on the root edge of ring-type cantilever beam. After adjusting by commercial strain gage and accelerometer, the sensitivity 11.96 of micro strain gage will be found. From the resolutions of experiment and theory, we also proof the linear relationship between the tip acceleration and the root strain of cantilever beam.
      After many times of impact experiments, we found out micro strain gage still has function in High G environment. Furthermore, commercial numerical analysis software “LS-DYNA” will assist us in simulating the transient behavior of impact. Finally, an effective material test environment will be created.

    目 錄 簽名頁 授權書 簽署人須知 致謝 全中文摘要 全英文摘要 各章中文摘要 目錄 表目錄 I 圖目錄 II 第一章 緒論 1-1研究動機 1 1-2文獻回顧 2 1-3研究方法 2 第二章 感測器特性分析 2-1說明 4 2-2微型壓阻感測器製作流程 4 2-3環形懸臂樑材料選擇 6 2-4懸臂樑幾何尺寸設計 6 2-5感測器頻率分析 9 2-6加速度分析 13 2-7應變與加速度轉換 15 2-8微型壓阻感測器訊號放大電路設計 17 第三章 衝擊實驗硬體建構 3-1說明 30 3-2衝擊實驗機介紹 30 3-3衝頭設計加工 30 3-4試片固定平台設計加工 31 3-5衝擊量測系統建構 32 3-6微型壓阻感測器製作 33 3-7微型壓阻感測器良率分析 35 3-8微型壓阻感測器電性測試 36 3-9微型壓阻感測器封裝 37 3-10微型壓阻感測器放大電路製造38 第四章 衝擊實驗分析 4-1說明 54 4-2電磁干擾影響 54 4-3微型壓阻感測器訊號穩定性 54 4-4微型壓阻感測器應變校正 55 4-5微型壓阻感測器靈敏度分析 56 4-6微型壓阻感測器動態訊號量測 57 4-7微型壓阻感測器訊號重複性 59 4-8微型壓阻式感測器與衝頭本體加速度轉換59 4-9應用微型壓阻感測器於材料衝擊測試 62 4-10衝頭本體應變量測 66 4-11訊號擷取與分析 67 第五章 數值模擬分析 5-1說明 85 5-2有限元素模型建構 85 5-3懸臂樑系統震動模擬 87 5-4衝擊系統數值模擬 88 5-5懸臂樑尺度影響 89 第六章 結論與建議 100 參考文獻 103 附錄一 微型壓阻感測器小型化 106 附錄二 懸臂式微型高G值感測器測試 107 自述 109

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