本論文研發一無光罩式 (Mask-less) 的曲面光束筆微影技術，用於製作具波浪形微結構之無縫式金屬滾輪模仁。本研究首先以自行研發的氣環式光阻塗佈系統將液態光阻均勻且平滑的塗佈於直徑50 mm、長度150 mm的滾輪表面上，形成光阻薄膜層；接著利用準分子雷射雙軸拖拉法加工一長條型與一維的微透鏡陣列 (1-D Micro-lens Array)；接著利用UV光源、高精度位移平台與精密旋轉機構所組成的曲面光束筆微影系統，搭配一維微透鏡陣列將UV平行光聚焦為一光點，於光阻薄膜層上進行書寫曝光，再將曝光部位顯影除去；之後以化學濕式蝕刻的方式將光阻層之微結構圖形轉移至滾輪表面，最後以電解拋光的方式改善滾輪表面微結構粗糙度，即可成功地完成具波浪形微結構之無縫式滾輪模仁。本論文所製作之無縫式滾輪可配合UV光固化滾印，快速、連續且大面積的製作出具波浪形微結構的PET膜片。

This thesis develops a novel technique, named as mask-less curved surface beam-pen lithography, to fabrication roller molds with seamless and wavy microstructures. This method is modified from planar beam-pen lithography and applied to cylindrical curved surfaces. First of all, an air ring photo-resist (PR) coating system is applied to successfully coat a uniform photo-resist layer on a roller surface. Secondly, the bi-axial excimer laser dragging method is applied to fabricate a one-dimensional (1D) micro-lens array aligned with a slit which restricts the UV light. The micro-lens array converge the parallel incident UV light into a 1D array of focal spots which can be used to expose the PR layer coated on a cylinder. Thirdly, Continuous and seamless wavy patterning on the PR layer coated on the cylindrical surface of the roller is achieved through accurate mechanical alignment and precision rotation control. Finally, a variety of wavy microstructures patterns can be directly fabricated on the metal roller surface by chemical etching process. To further improve the surface roughness, electro-polishing technique is adopted. This patterned metal roller mold is then used in roll-to-roll (R2R) UV roller imprinting of large-area PET film with continuous wavy microstructures.

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