本研究主要是使用低溫共燒陶瓷製作出具有無套袋以及有套袋圓錐型擴流器兩種形式之微泵。此微泵的震動薄板亦使用低溫共燒陶瓷，藉此能將微泵與震動板整合在一起而有較佳的密封性能增加微泵的可靠度。
在模擬上藉由基因演算法與計算流體力學軟體的結合來達到擴流器幾何最佳化，結果顯示當套袋位置越接近頸部並搭配適當的套袋半徑大小能有效的提升整流效率，最佳化後之具套袋圓錐型微擴流器閥有最佳整流效率26.78%，與無套袋微擴流器相比提升了5.51%，增加率為20.58 %，最後將此參數作為具套袋擴流器的設計參數。
由實驗結果可知，在零背壓下具套袋微擴流器閥的設計與無套袋微擴流器閥相比能提升淨體積流率，當驅動電壓150 Vpp，致動頻率為不同微擴流器所對應之最佳頻率，工作流體為水與酒精時，最大淨體積流率分別提升了20.45 %以及12.89 %，並且最佳致動頻率會上升。圓錐型擴流器閥微泵的淨體積流率會與致動頻率有關。將致動頻率無因次化成Ro數後會發現無論是去離子水或是酒精在相似的Ro數範圍內會有較好的性能表現。

In this study, the investigation of the low temperature co-fired ceramic micropumps with conical diffuser valves and with pockets conical diffuser valves were designed and manufactured. The diaphragms of micropumps also used low temperature co-fired ceramic, so that the micropumps could be combined with diaphragms. Therefore, the reliability of micorpumps will be enhanced. Also, by applying the Genetic Algorithms and Computational Fluid Dynamics program FluentTM, the design optimization of the conical diffuser valves with pockets is automated.
The obtained results of optimization show that the rectification efficiency will increase when the positions of the pockets approach the throat and the suitable pockets radius. The best rectification efficiency of 26.78% is obtained from the conical diffuser valves with pockets, and 5.51% more than the conical diffuser valves without pockets . Moreover, we used the parameters to design the low temperature co-fired ceramic micropumps with pockets conical diffuser valves.
According to the experiment results, low temperature co-fired ceramic micropumps with pockets conical diffuser valves exhibited a better net volumetric flow rate and higher optimal actuation frequency than the low temperature co-fired ceramic micropumps without pockets conical diffuser valves when the back pressure is zero. When the drive voltage is 150 Vpp, the actuation frequency is the optimal frequency of different types of valves. When working fluid is deionized water and alcohol, the maximum net flow rate of the low temperature co-fired ceramic micropumps with pockets conical diffuser valves increased 20.45 % and 12.89 %, respectively. Whether the working fluid is deionized water or alcohol is in a similar Roshko range, a better performance will be displayed.

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