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研究生： 林庭宇
Lin, Ting-Yu
論文名稱： 射頻磁控濺鍍法於低溫成長ZnxFe3-xO4之研究
RF magnetron sputter deposition of ZnxFe3-xO4 films at low temperature
指導教授： 齊孝定
Qi, Xiao-Ding
學位類別： 碩士
Master
系所名稱： 工學院 - 材料科學及工程學系
Department of Materials Science and Engineering
論文出版年： 2021
畢業學年度： 109
語文別： 中文
論文頁數： 89
中文關鍵詞： 四氧化三鐵 、鐵氧體 、鐵磁材料 、薄膜 、磁控濺鍍
外文關鍵詞： Fe3O4, ferrite, ferromagnetic, thin film, sputter deposition
相關次數： 點閱：65  下載：0 
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    • 摘要 I Extended Abstract II 致謝 X 目錄 XI 圖目錄 XIV 表目錄 XVIII 第1章 緒論 1 1-1 前言 1 1-2 磁性材料簡介 3 1-3 鐵氧體薄膜與CMOS整合 6 1-4 研究動機與目的 7 第2章 基礎理論與文獻回顧 8 2-1磁性來源與分類 8 2-1-1磁性分類 9 2-1-2磁滯曲線 12 2-1-3磁能與磁各向異性 13 2-2 鐵磁共振(Ferromagnetic Resonance)原理 20 2-3 尖晶石鐵氧體(Spinel ferrite)簡介 23 2-4 濺鍍原理 26 2-4-1 射頻濺鍍 28 2-4-2 磁控濺鍍 28 2-4-3 反應濺鍍 29 2-4-4 偏壓濺鍍 30 2-5 薄膜沉積原理 32 2-5-1 薄膜成長模式 34 2-5-2 薄膜微觀結構 35 第3章 實驗方法與步驟 37 3-1 實驗流程 37 3-2 實驗材料 38 3-3 靶材製備 39 3-3-1 固相合成法 39 3-3-2 氧化物靶材製作 39 3-4 薄膜製程 41 3-4-1 濺鍍系統 41 3-4-2 基板前處裡 42 3-4-3 濺鍍步驟及參數 43 3-5 分析儀器及原理 46 3-5-1 低掠角X光繞射分析儀(Grazing Incidence X-Ray Diffraction, GIXRD) 47 3-5-2 掃描式電子顯微鏡(Scanning electron microscopy, SEM) 49 3-5-3 超導量子干涉磁化儀(Superconducting quantum interference vibrating sample magnetometer, SQUID VSM) 51 3-5-4 鐵磁共振儀(Ferromagnetic Resonance Spectrometer, FMR) 52 3-5-5 開爾文探針力顯微鏡(Kelvin Probe Force Microscope, KPFM) 54 3-5-6 拉曼光譜儀(Raman Spectrometer) 55 3-5-7 四線電阻量測 56 第4章 結果與討論 58 4-1 未摻雜之氧化鐵樣品分析 58 4-1-1 晶體結構分析 58 4-1-2 形貌分析 59 4-1-3 試片相純度分析 62 4-1-4 電性分析 67 4-1-5 磁性分析 70 4-2 摻雜之氧化鐵樣品分析 72 4-2-1 晶體結構分析 72 4-2-2形貌分析 74 4-2-3 電性分析 76 4-2-4 磁性分析 78 4-2-5 鐵磁共振 80 第5章 結論 83 參考文獻 85

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