本論文利用準分子雷射微細加工技術製作微小的3D軸對稱微結構，主要研究重點是發展旋轉工件或旋轉光罩加工技術及其相關的特殊光罩設計方法，其目的是希望加工出剖面為任意曲線的3D軸對稱微小工件，以克服傳統微機電製程中僅限於2D結構的限制。本文將由實驗了解此旋轉加工法的能力與限制，包括加工面曲線的精確度、加工速度、加工面的粗糙度等等。
實驗中選擇三種高分子材料（PMMA、PC、PS）作為研究對象，並嘗試特徵加工尺寸約為數十微米（μm）到數百微米的微結構，結構的型態有凸出的錐狀體與內凹的碗狀體，及其各種變化的形狀；加工結果顯示，準分子雷射加工與光罩旋轉法的確可以控制所需要的各種加工曲面，加工精確度也相當良好，加工速度非常高；在粗糙度方面，PC與PS的材料較佳。實驗結果顯示，此加工方法可以配合LIGA的後段製程，因此非常有發展潛力。
另外，為克服原本準分子雷射加工機的限制，本文嘗試將雷射光導引至外部的光學桌上，並以光學鏡組重建加工光路，以進行本研究的各種實驗工作，同時，也利用商用光學分析軟體，分析準分子雷射的加工光路設計，因此可以掌握整個系統的設計與應用，有助於未來發展準分子雷射加工技術。

This study applies excimer laser micro-machining technology for manufacturing 3D axially symmetrical micro-structures. It is based on a work-piece rotation or mask rotation method in conjunction with the unique capabilities of an excimer laser micro-machining system. Specially designed laser masks have been developed for machining various kinds of 3D surface profiles. The goal is to understand the feasibility of this micro-machining method and its accuracy in producing a given profile of structure surface. Surface roughness and machining speed are also under evaluation.
The research is carried out on three different polymer materials, namely, PMMA, PC, and PS. Axially symmetrical micro-structures with concave and convex surfaces are manufactured by the mask rotation method. The surface profiles have been characterized and compared with their theoretical counterparts. Good agreement is observed. Furthermore, PC and PS have better surface roughness in comparison to PMMA. The machining time for each structure is limited to few minutes, which is very satisfactory.
In order to overcome several limitations on the excimer laser micro-machining system, this work also re-developed the optical system for the laser beam so that the machining can be carried out on an optical table. This greatly enhances the performance of the micro-machining system and its flexibility. A commercial optical analysis software (ZEMAX) has also been used for analyze the system. The work presented in this thesis can be very useful to future studies on excimer laser micro-machining and LIGA-like MEMS technology development.

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