本研究之微感測器中的脊狀光波導是利用反應式離子蝕刻機(RIE : Reactive Ion Etching）對高分子材料DR1/PMMA蝕刻出脊狀的波導；而橫向電場(TE)及橫向磁場(TM)模態偏振光波導則是利用UV光來對DR1/PMMA做光漂白(Photobleaching)。研究中使用有機染色分子DR1(disperse red one)材料當核心層的目的是因為其在未光漂白前的TE-mode與TM-mode的折射係數差值幾乎是相同；但經過光漂白之後，nTM值會隨照光的時間增加而增加，而nTE值會隨曝光的時間增加而減少。

　　本論文中，以RIE(Reactive Ion Etching)製作成脊狀波導，並利用Photobleaching製作出TE模態偏振光波導及TM模態偏振光波導，其量測結果之消光率(Extinction Ratio)各別為15.8dB、1.19dB；最後，綜合脊狀波導及TM模態偏振光漂白波導的導光特性、及結合表面電漿共振原理製作出光漂白波導式表面電漿共振微感測器。當其產生表面電漿共振現象後，所量測到消光率為20dB。

　　In this research, the micro-sensor of the rid waveguide was etched waveguide on the polymer material DR1/DMMA. The transverse electric (TE) mode and the transverse magnetic (TM) of the polarized waveguide was photobleached by UV light on DR1/PMMA. We use disperse red one (DR1) material as the core layer. After Photobleaching, the value will rise up with the exposure time, but the value will reduce.

　　In this thesis, we used RIE(Reactive Ion Etching) manufacture the rib waveguide and we also manufactured TE-mode and the TM-mode polarized light waveguide through photobleaching. The results of the extinction ratio in TE and the TM polarizer are 15.8dB and 1.19dB, respectively. In final, we integrate the rid waveguide and TM-mode polarization Photobleaching-Induced Waveguide of transmission light characteristic, and the principle of SPR to design the surface plasmon resonance micro-sensor. When the surface plasmon resonance phenomenon comes out, the result will be 20dB extinction ration at the wavelength of 632.8nm.

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