本研究主要目標為建立一個熱氣泡觀測系統與微加熱器設計與製作，藉以探討熱氣泡的生成行為，以便在未來結合本實驗室的混合器，有助於能更快速混合與更佳的混合效果。
製作時，分別對於微加熱器的設計與材料的選取進一步的測試。就設計而言，採用單一光罩來製作微加熱器，省去多道光罩的複雜程序。就材料而言，選取純鉭（Ta）來作為微加熱器的材料，藉以替代以往所使用的多晶矽材料與昂貴金屬鉑（Pt）的角色。在觀測設備而言，本研究自製閃頻觀測系統，取代以往實驗上的昂貴高速攝影機。利用高亮度LED的閃頻動作藉以凍結熱氣泡的瞬間行為，並利用CCD來抓取圖像，以便瞭解氣泡整個的生長過程，有助於以後在結合上的使用。
最後，討論生成氣泡大小和頻率與電壓的關係，與本研究中觀測系統的可行性。可知本研究中的微加熱器可在低頻率的操作條件下有良好的氣泡生成，而其低電阻值，耐熱度與散熱性佳的優點，有助於改善以往鉑微加熱器耐熱度不佳的問題，藉以增加微加熱器的壽命。而且可以有效並穩定的控制氣泡生長，藉此能在未來的應用方面得到更好的效果。

The target of this research is to establish an observation system of thermal bubble and to design and fabricate the micro-heater in order to discuss the thermal bubble behavior for combining the mixer in our Lab and helping to mix faster and good mixing efficiency.
In fabrication of micro-heater, this research focus on the design of micro-heater and the choice of materials further. For design, we use single mask to fabricate the heater replacing several masks for saving the fabricating time. For the materials, we choose the Ta to be the material to replace polysilicon and expensive material Pt which were usually used in past. In the system of observation system, we design a flash observation system to substitute for the expensive high speed CCD for saving the money. Using high light LED to flash for freezing the thermal bubble instant behavior and using the ordinary CCD system to catch movie of bubbles. Finally, using the cutting soft to get the pictures of instant bubble behavior to know the bubble growth and shrink for the combination of our Lab mixer in the future.
Finally, we’ll discuss bubble sizes between frequencies and voltages and the feasibility of observation system. We can know the micro-heater in this research can generate well bubbles in low frequencies. And the advantages of the micro-heater in this research, like low resistance, heat-resistant degree, and good heat dissipation, contribute to improve the heat dissipation and the strength of the Pt micro-heater for increasing the life of the heater.

[1] L. Lin, “Microscale thermal bubble formation: thermophysical phenimena and application”, Microscale Thermophysical Engineering, Vol. 2, pp.71-85, 1998
[2] A. Asai, “Bubble dynamics in boiling under high heat flux pulse heating”, Journal of Heat Transfer, Vol. 113, pp. 973-979, 1991
[3] Y. Iida, K. Okuyama, K. Sakurai, “Boiling nucleation on a very small film heater subjected to extremely rapid heating”, International Journal Heat Mass Transfer, Vol. 37, pp. 2771-2780, 1994
[4] C. T. Avedisian, W.S. Osborne, F.D. Mcleod, C. M. Curley, “Measuring bubble nucleation temperature on the surface of a rapidly heated thermal Ink-Jet heaterimmersed in a pool of water”, The Royal Society, Vol. 455, pp. 3875-3899, 1999
[5] O. C. Thomas, R.E. Cavicci, M.J. Tarlov, “Effect of surface wettability on fast transient microboiling behavior”, Langmuir, Vol. 19, pp. 6168-6177, 2003
[6] Z. Zhao, S. Glod, D. Poulikakos, “Pressure and power generation during explosive vaporization on a thin-film microheater”, International Journal of Heat and Mass Transfer, Vol. 43, pp. 281-296, 2000
[7] J. H. Tsai, L. Lin, “Transient thermal bubble formation on polysilicon micro-resisters”, Journal of Heat Transfer, Vol. 124, pp. 375-382, 2002
[8] J. Y. Jung, J. Y. Lee, H. C. Park, and H. Y. Kwak, “Bubble nucleation on micro line heaters under steady or finite pulse of voltage input”, International Journal of Heat and Mass Transfer, Vol. 46, pp. 3897-3907, 2003
[9] J. Y. Lee, H. C. Park, J. Y. Jung, and H. Y. Kwak, “Bubble nucleation on micro line heaters”, Journal of Heat Transfer, Vol. 125, pp. 687-692, 2003
[10] P. Deng, Y. K. Lee, P. Cheng, “The growth and collapse of a micro-bubble under pulse heating”, International Journal of Heat and Mass Transfer, Vol. 46, pp. 4041-4050, 2003
[11] P. Deng, Y. K. Lee, P. Cheng, “An experimental study of heater size effect on micro bubble generation”, International Journal of Heat and Mass Transfer, Vol. 49, pp. 2535-2544, 2006
[12] Z. Yin, A. Prosperetti, J. Kim, “Bubble growth on an impulsively powered microheater”, International Journal of Heat and Mass Transfer, Vol. 47, pp. 1053-1067, 2004
[13] Y. Hong, N. Ashgriz, J, Andrews, “Experimental study of bubble dynamics on a micro heater induced by pulse heating”, Journal of Heat Transfer, Vol. 126, pp. 259-271, 2004
[14] K. Okuyama, S. Tsukahara, N. Morita, Y. Iida, “Transient behavior of boiling bubbles generated on the small heater of a thermal ink jet printhead”, Experimental Thermal and Fluid Science, Vol. 28, pp. 825-834, 2004
[15] D. Yang, F. Tseng, C. M. Chang, and C. C. Chieng, “Microbubble formation dynamics under high heat flux on heaters with different aspect ratios”, Nanoscale and Microscale Thermophysical Engineering, Vol. 10, pp. 1-28, 2005
[16] J. Li, G. P. Peterson, “Microscale heterogeneous boiling on smooth surfaces-from bubble nucleation to bubble dynamics”, International Journal of Heat and Mass Transfer Vol. 48, pp. 4316-4332, 2005
[17] T. Chen, J. F. Klausner, Suresh V. Garimella, Jacob N. Chung, “Subcooled boiling incipience on a highly smooth microheater”, International Journal of Heat and Mass Transfer, Vol. 49, pp. 4399-4406, 2006
[18] H. Y. Kim and K. H. Jeong, “Life of thermal bubble on platinum microheater”, Journal of Applied Physics, Vol. 102, pp. 034903(1-6), 2007
[19] Yu. D. Varlamov, Yu. P. Meshcheryakov, M. P. Predtechenskii, S. I. Lezhnin, and S. N. Ul’yankin, “Specific features of explosive boiling of liquids on a film microheater”, Journal of Applied Mechanics and Technical Physics, Vol. 48, pp. 213-220, 2007
[20] J. Xu, W. Zhang, “Effect of pulse heating parameters on the microscale bubble dynamics at a microheater surface”, International Journal of Heat and Mass Transfer Vol. 51, pp. 389-396, 2008
[21] J. Li, G. P. Peterson, P. Cheng, “Dynamic characteristics of transient boiling on a square platinum microheater under millisecond pulsed heating”, International Journal of Heat and Mass Transfer Vol. 51, pp. 273-282, 2008
[22] R. Cole and V. S. Stralen, “Boiling phenomena Volume 1”, Academic Press, New York, pp. 128, 206-208, 1979
[23] Christopher Earls Brennen, “Fundamentals of multiphase flow”, Cambridge University Press, pp. 73-95, 2005
[24] 林郁欣, 呂宗行, 整合微鉑溫度感測器於熱氣泡制動器之發展研究，國立成功大學航空太空工程學系碩士論文, 民國93年
[25] 殷孟雲, 噴墨印表機設計原理, 民國90年