本文目標為使氣壓伺服微操作系統能夠透過控制氣壓缸輸出一穩定力量，用以帶動探針使其產生穿刺力，由細胞外部往細胞內部方向移動並進行穿刺，在探針刺入細胞內部後利用影像回授機制判斷探針位置，當探針到達目標位置時控制氣壓缸停止輸出力量，使探針能夠停止於目標位置上，此為本文定位之目的。由於氣體本身的可壓縮性，元件間的摩擦力，以及外部給予系統的非線性干擾力等，致使此微操作系統為一具高度非線性之系統。因此本文使用不需要精確數學模式的自調式模糊控制器來控制比例減壓閥之壓力輸出，進而達到控制系統力量輸出之目的。同時結合裝載CCD攝影鏡頭之光學顯微鏡進行影像回授，經由電腦執行影像處理，影像辨識
程序後計算出位置誤差，利用位置誤差訊號判別目標是否到達或超過輸入位置，並由控制邏輯根據位置誤差之狀態，選擇控制器相對應之輸出模糊參數，用以達成定位控制之目的。由實驗結果可知，在探針未受到外部力量干擾的情況下，力量控制精度範圍為2mN~-2.2mN，影像定位控制精度範圍為4μm~-4μm。在執行魚卵穿刺的過程中，力量誤差為-3.2mN，影像定位誤差為-12μm。

The purpose of this paper is to control a stable force of the pneumatic cylinders and drive the probe to produce a puncture force that move from the outside of cell toward the inside of cell. When the probe is punctured into the inside of cell, there is used the image feedback process to determine the position of the probe and control the force of the pneumatic cylinders to stop output. Therefore, the probe is able to stop at the target position and this is the purpose of position control in this paper. A micro-manipulation system is a highly nonlinear system as results of air’s compressibility, friction force between the mechanical components, and nonlinear disturbance from outside system. Therefore, a self-tuning fuzzy controller is used in this paper without precisely mathematic model to control the output pressure of proportional reduce-pressure valve so that the purpose of force control can be achieved in this paper. On the other hand, the optical microscope is combined CCD camera to return the image and use the computer to calculate the position error after image process and image recognition. According to the position error, control logic is selected suitable fuzzy sets so that the propose of position control can be achieved. From the experimental results, the force control error range of the probe without force disturbance from outside system was 2mN~-2.2mN and visual position control error range was 4μm~-4μm. In case of the process that fish egg was punctured, the force error was -3.2mN and visual position control error was -12μm.

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