本研究利用封閉式磁控濺鍍法，在不同表面粗糙度之底材，被覆類鑽碳薄膜(DLC)與Zr-Ti-N陶瓷鍍膜，探討不同表面粗糙度之底材與厚度鍍膜，對於DLC鍍膜與Zr-Ti-N鍍膜耐磨性和附著性之影響。首先以XRD分析鍍膜在不同厚度下的結構改變，再以SEM觀察被覆鍍膜在不同厚度與底材粗糙度下，表面成長之微結構與形貌，以及利用刮痕試驗機與洛氏壓痕試驗其附著性，並運用Pin-On-Disk磨耗試驗機研究其磨耗性質影響，最後整理分析以得到，底材粗糙度與鍍膜厚度之最佳關係比例。
實驗結果顯示，ZT系列之三組試件濺鍍時間不相同，具有相同之鍍層安排，但鍍層晶粒尺寸，卻因濺鍍時間設定減少而隨之變小，其繞射峰之半高寬，也變寬變矮。ZT、DLC系列都可觀察到在粗糙表面的波峰處有較大的晶粒，且與沈積理論相符。薄膜厚度(H)與底材粗糙度(R)成一相依關係，且在H/R比值在30以上，底材粗糙度將不會影響薄膜磨耗性質，而在1.5μm厚度以下的薄膜依底材原本表面形貌成長。其膜厚對粗糙度的比值與磨耗深度關係成一線性，不論在較軟DLC系列鍍層或較硬脆Zr-Ti-N系列鍍層，鍍膜厚度之值為粗糙度的30倍以上則具有較佳的耐磨性質。

The purpose of this research is study the Influence of substrate surface roughness and varied coating thickness on the wear and adhesion properties of hard ceramic and DLC coatings deposited on HSS tool steel substrate by close-field unbalanced magnetron sputtering system. The effect of coating thickness on surface microstructure and morphology analysis was analyzed by FE-SEM and SEM. Adhesion of the coating to the substrate was assessed by using a Rockwell C hardness tester and a scratch test machine. The tribological performance of the coatings was tested by a Pin-on-disk wear test machine against AISI 52100 balls. Finally, the best ratio of surface roughness and coating thickness for apply in roughness and coating thickness mechanism relation was obtained. The experiment results show as following: three of the hard ceramic coatings have the same deposition designs, but the grains size become smaller with decreasing sputtering duration. The bigger grains obtained on the peak of the rough surface due to the geometrical effect. The optimal roughness (R) depends on the coating thickness (H). The optimal H/R value which more then 30 has the best wear resistance.

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