本文主旨為研究微型感測器陣列之設計與製作；透過壓電材料承受壓力變
化轉變為電荷變化之正壓電效應，來做為感測器的測量原理。利用PVDF 壓電薄膜良好的動態特性、容易加工與寬廣的頻寬，搭配印刷電路板所製作的電極與導線為感測器陣列之基板，製作一具有七個感測點，每個感測點大小為1mm^2的一維壓力感測器陣列。並且設計互相配合之電荷放大器與濾波電路來做為感測器的訊號處理器。感測器校正方面則是使用氣體震波管來進行動態壓力校正，將感測器所得到之電壓訊號與所承受的壓力大小做圖，整理出壓力感測器陣列之校正曲線。最後則是將校正過後的壓力感測器陣列裝配至脈衝式微爆震管中，量測脈衝式微爆震管中的震波壓力。

This study aims to present a design and fabrication process of micro-scale pressure sensor array, convert an applied contact force into an electrical signal by using the piezoelectric effect. Polyvinylidene Fluoride (PVDF) has been used direct measurement of the mechanical stress and large bandwidth electromechanical transduction. Seven sensing units each of active area of 1x1 mm^2 are constructed and accompanied with one-to-one well-designed charge amplifier. The sensor array is calibrated by using a gas shock tube, which can provide a pressure change with a very fast rise time. Finally, the calibrated sensor array was used to measure the shock wave in a
micro-scale pulsed detonation tube.

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