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研究生： 林奕伸
Lin, Yat-Shen
論文名稱： 氮離子植佈於不鏽鋼之濃度分佈理論之建立及實驗驗證
The Theory and Experiments for the Implantation of Nitrogen Ions into Stainless Steel
指導教授： 林仁輝
Lin, Jen-Fin
學位類別： 碩士
Master
系所名稱： 工學院 - 機械工程學系
Department of Mechanical Engineering
論文出版年： 2004
畢業學年度： 92
語文別： 中文
論文頁數： 71
中文關鍵詞： 離子植入 、氮 、不鏽鋼
外文關鍵詞： nitrogen, stainless steel, ion implantation
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    • 　　本研究主要著重於建立一套方法，能有效的描繪出氮離子經由電漿浸泡式離子植入304不鏽鋼後的濃度分佈曲線圖形。以往這理論的研究著重在兩方面：一方面為藉由碰撞力學和電動力學，計算出離子在靶材中射程，配合統計學，得到高斯分布的圖形；另一方面則是利用擴散方程式，來模擬熱擴散效應下，離子在靶材中的濃度分佈；但對各單一方面而言，都無法確切的滿足實驗結果，本論文藉由將兩種效應加以結合，成功的得到了能符合實驗結果的濃度分佈方程式，並就不同實驗參數(電壓、時間及溫度)加以探討，尤其在改變植入時間及植入溫度上的實驗與理論值比對，結果頗為令人滿意。

    　　而在製程方面，304不鏽鋼在經過離子植入後，機械性質有明顯的提升。本實驗並藉由奈米機械性質與改質層定性分析的量測，得到了植入溫度、植入電壓、植入時間對其機械性質與改質層厚度之影響。

    　　In this study, a method was established to describe the concentration distribution of nitrogen ion doped into the 304 stainless steel through the plasma immersion ion implantation. The studies mentioned about this topics stress two parts. One is statistic calculation for the Gaussian distribution of ion’s moving distance in the target by collision dynamics and electrodynamics. The other is calculation for the concentration distribution of ions in the target through simulation of heat diffusion. There are no satisfied results can be obtained by either one of the two parts. The simulation results have good agreement with the experimental concentration distribution through the combination of the two parts. Also, the effects of experimental parameters (voltage, time, and temperature) are mentioned in this study. The simulation results are satisfied through comparison with experimental data by differing the parameters, especially in time and temperature.

    　　For the procedure of plasma immersion ion implantation, the 304 stainless steel shows the improvement in mechanical properties after doping. The effects of the above experimental parameters to the improvement in mechanical properties and doping thickness are analyzed through the measurement performed by a NanoTest.

    中文摘要..................................................I 英文摘要.................................................II 致謝....................................................III 目錄.....................................................IV 表目錄..................................................VII 圖目錄.................................................VIII 符號表....................................................X 第一章 緒論...............................................1 1-1 前言..................................................1 1-2 文獻回顧..............................................3 1-3 研究目的及內容........................................5 第二章 射程分佈及擴散理論.................................6 2-1 簡單的射程理論........................................6 2-2 核阻止能力Sn(E)的理論計算.............................7 2-3 電子阻止過程.........................................19 2-3-1 帶電粒子入射到物質上的能量損失.............19 2-4射程分布理論的建立....................................25 2-5熱擴散系統理論........................................34 2-5-1離子注入中擴散對注入元素分布的影響及分布計算........35 第三章 實驗方法及步驟....................................40 3-1 實驗目的.............................................40 3-2 離子植入表面改質.....................................40 3-2-1 離子植入系統設備...........................40 3-2-2 試驗材料...................................41 3-2-3 步驟.......................................42 3-3 改質層特性分析及鑑定.................................43 3-3-1 改質層厚度之檢測...................................43 3-3-2 改質層硬度、楊氏模數之檢測.........................44 3-3-2 三維表面微細形貌及表面粗糙度量測...................45 第四章 結果與討論........................................47 4-1 輝光放電縱深分析結果.............................47 4-2 壓痕試驗分析.....................................48 4-3 改質層表面粗糙度.................................50 4-4 抗磨耗性能分析...................................50 4–5 理論結果分析....................................51 第五章 結論與未來研究方向................................67 5-1 結論.............................................67 5-2 未來研究方向.........................................68 參考文獻.................................................69 自述.....................................................71

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