Fe-PDMS 為一種混合PDMS（polydimethylsiloxane-聚二甲基矽氧烷）和鐵粉的複合材料，加入鐵的目的在於使其具有感磁力，當利用Fe-PDMS 製成輕薄的結構時利用外加磁場可使其產生型變，能作為微驅動器之材料。相對於利用矽或氮化矽材料製成之微驅動器而言，Fe-PDMS 的楊氏係數較小，在磁力驅動下能達到更大之型變量，同時PDMS 之物理及化學特性較穩定，生物兼容性良好，很適合應用於製作微流體控制元件。
本研究採用微機電製程中之黃光微影技術，將SU8 光阻於矽基
板上製成母模結構，再利用旋佈方式將Fe-PDMS 混合膠液製成薄膜，待膠膜固化成形後翻模，再與玻璃基板接合製成薄膜晶片，但在一連串製程之中，薄膜有時會因過薄而破裂，過厚又不利於驅動，而薄膜上之結構亦有尺度限制，過大面積的結構會因本身重量而塌陷，與基板沾結而使晶片無法使用，同時鐵粉的含量亦是被探討的參數，本研究在母模厚度150μm 之設定下，完整建立包含鐵粉含量比例（50%至80%之重量比例）、膜厚、結構尺寸（包含管型結構及幾何圖形結構）之製程測試參數，目的在提供日後設計薄膜上之結構時，可以確保各參數匹配下所製之薄膜能達到易驅動、不易破裂、不會因塌陷而影響接合基板之要求，而本研究亦利用參數測試之結果設計兩種Fe-PDMS 複合薄膜微流晶片，分別為複合薄膜蠕動式幫浦及複合震動薄膜液滴控制晶片，根據實驗結果，薄膜幫浦在精簡之設計下具有91.75μl/min 之最大流量，而震動薄膜雖受制於磁控平台之性能以致於現階段尚無法求證，但仍藉由理論之分析及數值模擬之結果檢視該設計概念之合理性與可行性。

Fe-PDMS is composed by suspending iron powder（~10μm）
in polydimethylsiloxane（PDMS）. The mixture retains many
properties of pure PDMS, including moldability, elastic after cured, good adhesion to glass and silicon substrates. And the additivity of iron makes the composite can be magnetically actuated. Comparing with silicon or silicon nitrite based micro actuator, Fe-PDMS composite membrane can effect larger deformation. The large displacement capability of composite membrane is suitable for application in micro fluidic devices.
In this study, MEMS technology is used to fabricate all
microfluidic chips. And chip fabrication can be divided into three parts：SU-8 mold construction, Fe-PDMS membrane molding, membrane releasing and bonding with glass substrate. In series of fabrication, thinner composite will break easily when releasing from mold, but the thicker membrane will take disadvantage of actuating. Size of mold structures on membrane will affect bonding process, too. The weight ratio of iron particles in composite membrane is a parameter also discussed. Parameters of fabrication including weight ratio of iron (from 50％ to 80％), thickness of membrane and size of mold
structures（channel and geometry）are completely tested under 150μm mold thickness. Trying to find a suitable combination of different parameters can make sure the composite membrane strong enough, actuated and fabricated easily. According the parameter test result, two applications on microfluidic chip are displayed: composite membrane peristaltic pump and liquid droplets driving vibration membrane chip.
The result of experiments shows the micro peristaltic pump with the best pumping efficiency at 91.75 μl/min, and the vibration membrane under a restriction of magnetic supply source can not verify the theory now. By numerical simulation and theoretical analysis shows the design of vibration membrane is reasonable and actualizable.

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