本研究係針對微加工製造技術之應用，設計一電磁致動式微幫浦。微幫浦的主要特點為操縱微量精確的流體，可應用於生化醫療，其他如化學及生化使用的分析儀器，或利用微幫浦輸送引擎的噴油量，以及噴墨印表機的噴頭晶片與國防工業的應用等。
鑑於微幫浦其流體的輸送必須藉著微薄膜振動以獲得流量，因此本文擬以簡單分析模式，即將幫浦腔室內流體視為等效阻尼，並於分析微幫浦運動行為時，於系統中考慮此等效阻尼的影響，以取代薄膜與流體互制之複雜分析方式。其次，對微致動薄膜進行諧和運動分析，以獲得幫浦在腔室內存在流動流體狀態下，受驅動頻率與壓力作用後產生的振幅。最後，再與微致動薄膜厚度進行最佳效能分析。
本研究的方法在建立電磁式微幫浦的流量分析模式，藉以模擬微幫浦的特性。此設計係利用有限元素分析軟體ANSYS，進行腔室內流體之運動分析和幫浦內致動薄膜的結構分析等，以求發展一套具有最佳效能，即獲得最大流量的微幫浦。

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[1]. M. Elwenspoek, T. S. J. Lammerink, J. H. J. Fluitman, "Towards Integrated Microliquid Handling System," Journal of Micromechanics and Microengineering, 4, pp. 227-245, 1994.
[2]. J. Tiren, L. Tenerz, B. Hok, "A Batch-Fabricated Non-Reverse Valve with Cantilever Beam Manufactured by Micromaching of Silicon," Sensors and Actuators, 18, pp. 389-396, 1989.
[3]. H. T. G. van Lintel, F. C. M. van de Pol, S. Bouwstra, "A Piezoelectric Micropump Based on Micromachining of Silicon," Sensors and Actuators, 15, pp. 153-167, 1988.
[4]. R. Zengerle, "A Bidirectional Silicon Micropump," Proceeding of the IEEE MEMS' 95 Workshop, pp. 19-24, 1995.
[5]. E. Stemme, G. Stemme, "A Valve-less Diffuser / Zozzle-Based Fluid Pump," Sensors and Actuators, A39, pp. 159-167, 1993.
[6]. A. Olsson, G. Stemme, E. Stemme, "A Valve-less Planar Fluid Pump with two Pump Chambers," Sensors and Actuators, A46-A47, pp. 549-556, 1995.
[7]. Jan G. Smits, "Piezoelectric Micropump with Three Valves Work Peristaltically," Sensors and Actuators, A21-A23, pp. 203-206, 1990.
[8]. M. T. A. Saif, B. Erdem Alaca, and Huseyin Sehitoglu, "Analytical Modeling of Electrostatic Membrane Actuator for Micro Pumps," IEEE Journal of Microelectromechanical Systems, vol. 8, no. 3, pp. 335-345, 1999.
[9]. R. linnemann, P. Woias, C.-D. Senfft, and J. A. Ditterich, "A Self-Priming and Bbubble-Tolerant Piezoelectric Silicon Micropump for Liquids and Gases," IEEE, pp. 532-537, 1998.
[10]. Torsten Gerlach, "Pumping Gases by A Silicon Micro Pump with Dynamic Passive Valves," in 1997 International Conference on Solid-State Sensors and Actuator, pp. 357-360, June 1997.
[11]. T. Honda and J. Yamasaki, "Fabrication and Testing of A Small Pump Composed of A Magnet and An Elastic Plate," IEEE Transactions on Magnetics, vol. 34, no. 4, pp. 2102-2104, 1998.
[12]. H. Takagi, R. Maeda, K. Ozaki, M. Parameswaran and M. Mehta, "Phase Transformation Type Micro Pump," IEEE Transactions on Magnetics, pp. 199-202, 1994.
[13]. M Koch, N Harris, R Maas, A G R Evans, N M White and A Brunnschweiler, "A Novel Micropump Design with Thick-Film Piezoelectric Actuation," Meas. Sci. Technol. 8, pp. 49-57, 1997.
[14]. T. S. J. Lammerink, V. L. Spiering, M. Elwenspoek, J. H. J. Fluitman and A. van den Berg, "Modular Concept for Fluid Handling Systems," IEEE, pp. 389-394, 1996.
[15]. R. Zengerle and M. Richter, "Simulation of Microfluid Systems," Journal of Micromechanics and Microengineering: Structures, Devices, and Systems, pp. 192-204, 1994.
[16]. 柯春旭，林育生，楊詔中，高端環，“電磁式微致動器之研究，“ 機械工業，PP. 110-116, 88年8月。
[17]. Michel Del Pedro & Pierre Pahud, “Vibration Mechanics,” pp. 7.
[18]. 林永盛編著，“ 基礎結構動力(下冊) ，”文笙出版，台北市，1997。
[19]. Robert W. Fox, Alan T. McDonald.” Introduction to Fluid Mechanics,” 5th ed.
[20]. I. J. Busch-Vishniac, "The Case for Magnetically Driven Microactuators," Sensors and Actuators, A33, pp. 207-220, 1992.
[21]. A. Feustel, O. Krusemark, J. Muller, "Numerical Simulation and Optimization of Planar Electromagnetic Actuators," Sensors and Actuators, A70, pp. 276-280, 1998.
[22]. 王勗成，劭 敏編著“有限元素法-基本原理與數值方法，”亞東書局出版，台北市，1990。