本研究之目的在於應用MEMS熱膜感測器於T型渦流流量計上，在不同流況下之管流設備進行流場量測，定義出量測不確定度分析方法，分別為重複性U1 、解析度U2、及重製性U3之擴充不確定度三項，觀察熱膜感測器在量測渦流溢放訊號是否滿足所需要之精確性；透過訊號與雜訊比之分析，可得熱膜感測器安裝於延長平版上最佳位置為x/d=1.62，因此實驗中選擇此位置之熱膜感測器進行不確定度量測。
在完全發展管流流況實驗中，實驗雷諾數範圍為Re=5500～28200，訊號透過FFT求得渦流溢放頻率，換算成無因次頻率St當作不確定度參數，結果顯示最佳擴充重複性不確定度 為 、最佳擴充解析度不確定度 為 、最佳擴充重製性不確定度 為 、其最佳之總擴充不確定度 為 。
兩不同平面彎管下游流況實驗雷諾數範圍為Re=7100至19100，流場經過彎管會在其下游形成順時針漩流破壞流場結構，造成軸向速度的扭曲，直到彎管下游21D位置，漩流能量減弱且軸向速度分佈較為均勻，可得到最佳總擴充不確定度 為 。接著於彎管入口處1D位置安裝全開閥門，以及彎管入口10D位置安裝半開閥門，探討閥門所產生壓損對彎管下游流場影響程度，發現在彎管下游21D位置流場結構不受彎管入口流況所影響。

The object of this research lies in applying the MEMS thermal film in T-shape vortex flowmeter to measure the flow field rate of an air pipe flow system. The measurement uncertainty analysis was conducted with respect to repeatability uncertainty , resolution uncertainty , and reproducibility uncertainty . Efforts were made to analyze the signal of vortex shedding obtained by the MEMS thermal film. Through the analysis of SNR, it shows that the optimal position of the thermal film sensor in vortex flowmeter is about x/d=1.62.
In the experiment of fully developed pipe flow, the Reynolds numbers were ranged from 5500 to 28200. By using FFT to analyze vortex shedding frequency and taking the non-dimensional frequency St as a frequency parameter, the results reveals that the best repeatability uncertainty is , the best resolution uncertainty is , the best reproducibility uncertainty is , therefore the best total uncertainty is .
In the experiment of downstream of two out-of-plane elbows, the Reynolds numbers were ranged from 7100 to 19100. In the region downstream of the elbows a clockwise swirl is formed which affects the structure of the flow field and the axial velocity distribution. The swirl intensity decreases and the axial velocity distribution gets uniform to the streamwise location 21D downstream of the elbows. The best total uncertainty is . Besides, a valve was installed 1D upstream and a half-opened valve was installed 10D upstream of the elbows, respectively. Both cases show that the pressure loss didn’t affect the performance of the vortex flowmeter situated 21D downstream of the elbows.

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