由於蛋白質於人體中扮演很重要的角色，為了要瞭解活體系統，對於蛋白質相互作用的機制進行釐清與探討是必要的，故蛋白質的奈米陣列能成為研究的一大助力。蛋白質奈米陣列能將大量蛋白質侷限於一個基材上且可同步進行測試，提供了一個方便快速的方法進行蛋白質的研究。
藉由粒子微影術結合有機矽烷表面化學，製作出可以有效地使表面帶有良好選擇性的奈米有機矽烷模板。由於市售的奈米粒子具有各種不同的大小，所以粒子微影術可以有效地控制有機矽烷模板於表面上的覆蓋率，並且使表面帶有高通量的特性的優點。伴隨著第二種帶有不同官能基的有機矽烷自組裝於奈米結構之中，即被粒子所保護住的區域，進而生成了具有良好位置特異性的表面。由於後續的實驗步驟會針對官能基的部分進行反應，所以蛋白質可以精準的固定在奈米結構內，製備出符合奈米結構排列的蛋白質奈米點陣列。由於可以選用做來修飾於奈米結構內的有機矽烷種類繁多，伴隨著不同的官能基所製備出的表面能夠應用的層面也會隨之變得廣泛。

Proteins play a very important role in the human body, in order to study the living system. It is necessary to clarify and discuss the mechanism of protein-protein interaction. The protein nanoarrays can become a useful method for understanding the interaction between proteins. Protein nanoarrays can confined a large amount of proteins on the surface, and the proteins could be test simultaneously. It provides a fast and convenient way for the study of Proteomics. By combining particle lithography with organosilane chemistry, the fabrication of organosilane nanotemplets can effectively provide the surface with high selectivity. Due to commercially available nanoparticles with different size, the particle lithography can effectively control the surface coverage of organosilane nanotemplates and the advantages of surface characteristics with high-throughput. Accompanied with second different functional groups of organosilane deposition in the nanostructure, which is protected by the particle lived in the area, the surface with good site-specificity was obtained. Because the subsequent experimental steps will specifically react with functional part of surface,
the protein can be immobilized accurately in the nanostructure. The patterns of protein nanodots array will correspond to the pattern of organosilane nanotemplet. Due to the variety of organosilne which can be applied for the surface modification. The surface prepared by the different functional groups can be applied to a wide range of applications.

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