本論文主要著重在一維金屬氧化物半導體奈米結構，包含氧化銦(In2O3)及二氧化鈦(TiO2)。製作並分析其奈米結構之感測器元件特性。
首先，我們利用氣-液-固(VLS)生長機制製作氧化銦奈米線(NWs)，並應用於酒精氣體感測器。我們發現隨著製程溫度增加，平均長度增加且平均直徑減少。於氣體感測器的應用中，製程溫度1000°C之試片於環境溫度300°C對100 ppm的酒精有最好響應值(Ra/Rg)13.97。根據氣-液-固之成長機制，我們固定製程溫度，藉由改變基板放置位置增加動力學常數，成長出金屬銦修飾之氧化銦奈米寶塔。銦-氧化銦奈米寶塔的導通電場值為2.0 V/μm及場增强因子為3590。透過銦-氧化銦奈米寶塔中的銦累積電子並產生電子穿隧，增加場發射特性。
第二部分，我們同樣利用氣-液-固生長機制於二氧化矽/矽基板上成長二氧化鈦奈米線。探討兩種不同波長之紫外光光源對二氧化鈦奈米線場發射元件功函數的影響。由於UVC的波長大於二氧化鈦的能隙，因此電子擁有較大的能量較易穿隧至真空能階且產生多餘的熱能降低導通電場值。雖然照射UVC之元件功函數較小，但響應時間與回復時間皆大於照射UVA之元件。綜合上述的各項特性，我們建議在選擇利用照射紫外光提升元件場發射特性時，應優先選擇波長與材料能隙較為接近之光源。
最後，針對二氧化鈦材料化學穩定性佳之特性，我們利用金奈米粒子修飾二氧化鈦奈米柱並照射可見光製作出非酶式葡萄糖生物光感測器。由於奈米金粒子吸收可見光後產生表面電漿共振效應(SPR)。經照射可見光後之電流值在0.1 M氫氧化鈉與10 mM葡萄糖溶液中在工作電壓0.17 V時較於暗室中增加4倍。顯示金奈米粒子/二氧化鈦奈米柱/摻氟的氧化錫基板於照射可見光後為一個優異的非酶式葡萄糖生物光感測器。

The main goal of this dissertation is the growth of one-dimensional metal oxide semiconductor nanostructures, including indium oxide (In2O3) and titanium dioxide (TiO2). Fabricate and analysis of their nanostructure-based sensor device applications.
First of all, we grow the In2O3 nanowires (NWs) through the vapor-liquid-solid (VLS) growth mechanism and applied In2O3 NWs ethanol gas sensor. It was found that the average length increased and the average diameter decreased as the growth temperature increased. For the fabricated gas sensors, the best response (Ra/Rg) was 13.97 for the samples thermally treated at 1000°C, respectively, at the operating temperatures 300°C with 100 ppm ethanol. Based on the VLS growth mechanism, we fixed the growth temperature but changed the place of the substructure, which increased the kinetics factor, and demonstrated the In-In2O3 composite nanopagodas (NPs). The turn-on fields and β of In-In2O3 NPs were 2.0 V/μm and 3590. The indium of In-In2O3 NPs accumulated electrons and formed electrons tunnelling, which enhanced the performance of field emission properties.
On the part, TiO2 NWs with rutile structures on a SiO2/Si substrate were grown by VLS growth mechanism. Discussed the fabrication of TiO2 NWs field emission and concluded the influence of two different wavelengths of UV illumination on work function. The wavelength of UVC was higher than the TiO2 band-gap, so the electrons more easily tunneled to the vacuum level and generated excess heat that lowered the turn-on field. The work function exposed to UVC was lower than which exposed to UVA, but the response time and recovery time were much longer. Based on the point of view, we recommend the selection of an illumination wavelength should close to the semiconductor energy bandgap.
Lastly, according the advantage of TiO2, the good chemical stability, anonenzymatic glucose photobiosensor was developed based on Au-nanoparticle-decorated TiO2 nanorods under visible illumination. Au nanoparticles absorbed the visible illumination, resulting in surface plasmon resonance (SPR). The current under visible illumination was 4 times higher than in the dark when in 0.1 M NaOH and 10 mM glucose solution at a potential of 0.17 V. These results indicate that the Au nanoparticles/TiO2 nanorods/FTO under visible illumination feature outstanding properties as a nonenzymatic glucose photobiosensor.

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Chapter 3
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