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研究生: 陳柏宏
Chen, Bo-Hung
論文名稱: 開發吸收中紅外光之超穎表面
Developing metasurfaces as mid-infrared absorbers
指導教授: 陳玉彬
Chen, Yu-Bin
學位類別: 碩士
Master
系所名稱: 工學院 - 機械工程學系
Department of Mechanical Engineering
論文出版年: 2016
畢業學年度: 104
語文別: 中文
論文頁數: 76
中文關鍵詞: 波長選擇性吸收率電感電容電路模型
外文關鍵詞: absorptance, inductor-capacitor circuit model, nanoimprint lithography
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  • 本文開發二維複式週期性結構作為波長選擇性放射器,使其在波長6 μm與10 μm處有兩個高於0.4的放射率峰,且各峰值之半高寬皆小於1 μm,可應用在高靈敏氨氣感測系統的開發上。文中使用雙L型結構,藉由調整尺寸來達成目標。研究過程可分為模擬、實驗與近似模型建立三部分:模擬是藉由商用有限元素法軟體COMSOL,進行輻射性質的計算與電磁場的繪製;實驗則是透過奈米金屬轉印將樣本製作出來,再以傅立葉轉換紅外線光譜儀量測其反射率,間接得到吸收率頻譜;最後,建立電感電容模型,成功解釋吸收率峰的激發波長。文中所設計之結構,在30˚斜向入射TE偏振光下,於波長6.6 μm與10.4 μm處各有0.4以上之吸收率峰,且雙峰之半高寬皆小於1 μm,而量測結果,除了吸收波長與模擬結果有2%以內的變動外,吸收峰值與其半高寬皆有達到目標要求。

    This work developed a dual-band emitter for high sensitive ammoniacal gas sensing system, which has two emittance peaks at the wavelengths of λ = 6 μm and λ = 10 μm. Each of peaks is more than 0.4 and full width at half maximum of each peak is less than 1μm. The objective of this work is achieved with two L-shape gratings. The process of study can be divided into simulation, experiment and approximate model: the numerical result of spectra and electromagnetic field pattern is simulated by COMSOL which is based on finite element method; the experiment result of the sample of two L-shape gratings is fabricated by nanoimprint lithography, and then obtains the absorptance spectra indirectly by measuring the reflectance spectra with FTIR; finally, the inductor-capacitor circuit model is developed to predict the resonance wavelength of absorption peak at λ = 6.42 μm. The L-shape gratings which is designed in this study can be excited two absorptance peaks at the wavelength of λ = 6.6 μm and λ = 10.4 μm at oblique incidence (θi = 30˚) for TE wave. Each of the peaks is more than 0.4 and the full width at half maximum of each peak is less than 1μm. And the measurement result concerning L-shape gratings is achieved the targets of the peak and the full width at half maximum of peak but the wavelength of absorptance peaks has error within 2 % comparing with the simulation.

    摘要 i Abstract ii 誌謝 viii 目錄 ix 表目錄 xii 圖目錄 xiii 符號表 xvii 第一章 緒論 1 1.1 研究背景 1 1.2 研究動機與目標 4 第二章 理論基礎 6 2.1 電感電容電路模型 6 2.2 數值模型建置 9 第三章 結構設計 13 3.1 結構形貌 13 3.2 尺寸調整 19 3.2.1 表面結構厚度修正 19 3.2.2 介電薄膜厚度修正 20 第四章 L型結構之等效電路模型 24 4.1 單L型結構 24 4.2 雙L型結構 29 第五章 樣本與量測 33 5.1 尺寸選擇 33 5.2 製作流程 34 5.2.1 基板製作 34 5.2.2 薄膜量測 35 5.2.3 模具複製 39 5.2.4 掀離製程 43 5.3 輻射性質量測儀器 51 5.3.1 設備架構 52 5.3.2 量測原理 55 5.3.3 量測結果 56 第六章 結果與討論 58 6.1 正向入射 58 6.2 斜向入射 64 第七章 結論與未來工作 71 7.1 結論 71 7.2 未來工作 72 參考文獻 73

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