| 研究生: |
陳柏宏 Chen, Bo-Hung |
|---|---|
| 論文名稱: |
開發吸收中紅外光之超穎表面 Developing metasurfaces as mid-infrared absorbers |
| 指導教授: |
陳玉彬
Chen, Yu-Bin |
| 學位類別: |
碩士 Master |
| 系所名稱: |
工學院 - 機械工程學系 Department of Mechanical Engineering |
| 論文出版年: | 2016 |
| 畢業學年度: | 104 |
| 語文別: | 中文 |
| 論文頁數: | 76 |
| 中文關鍵詞: | 波長選擇性 、吸收率 、電感電容電路模型 |
| 外文關鍵詞: | absorptance, inductor-capacitor circuit model, nanoimprint lithography |
| 相關次數: | 點閱:120 下載:0 |
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本文開發二維複式週期性結構作為波長選擇性放射器,使其在波長6 μm與10 μm處有兩個高於0.4的放射率峰,且各峰值之半高寬皆小於1 μm,可應用在高靈敏氨氣感測系統的開發上。文中使用雙L型結構,藉由調整尺寸來達成目標。研究過程可分為模擬、實驗與近似模型建立三部分:模擬是藉由商用有限元素法軟體COMSOL,進行輻射性質的計算與電磁場的繪製;實驗則是透過奈米金屬轉印將樣本製作出來,再以傅立葉轉換紅外線光譜儀量測其反射率,間接得到吸收率頻譜;最後,建立電感電容模型,成功解釋吸收率峰的激發波長。文中所設計之結構,在30˚斜向入射TE偏振光下,於波長6.6 μm與10.4 μm處各有0.4以上之吸收率峰,且雙峰之半高寬皆小於1 μm,而量測結果,除了吸收波長與模擬結果有2%以內的變動外,吸收峰值與其半高寬皆有達到目標要求。
This work developed a dual-band emitter for high sensitive ammoniacal gas sensing system, which has two emittance peaks at the wavelengths of λ = 6 μm and λ = 10 μm. Each of peaks is more than 0.4 and full width at half maximum of each peak is less than 1μm. The objective of this work is achieved with two L-shape gratings. The process of study can be divided into simulation, experiment and approximate model: the numerical result of spectra and electromagnetic field pattern is simulated by COMSOL which is based on finite element method; the experiment result of the sample of two L-shape gratings is fabricated by nanoimprint lithography, and then obtains the absorptance spectra indirectly by measuring the reflectance spectra with FTIR; finally, the inductor-capacitor circuit model is developed to predict the resonance wavelength of absorption peak at λ = 6.42 μm. The L-shape gratings which is designed in this study can be excited two absorptance peaks at the wavelength of λ = 6.6 μm and λ = 10.4 μm at oblique incidence (θi = 30˚) for TE wave. Each of the peaks is more than 0.4 and the full width at half maximum of each peak is less than 1μm. And the measurement result concerning L-shape gratings is achieved the targets of the peak and the full width at half maximum of peak but the wavelength of absorptance peaks has error within 2 % comparing with the simulation.
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校內:2021-08-01公開