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研究生： 蔡文皇
Tsai, Wen-Huang
論文名稱： 全自動虛擬量測系統應用在TFT-LCD產業
Applying the AVM System to the TFT-LCD Industry
指導教授： 鄭芳田
Cheng, Fan-Tien
洪敏雄
Hung, Min-Hsiung
學位類別： 博士
Doctor
系所名稱： 電機資訊學院 - 製造資訊與系統研究所
Institute of Manufacturing Information and Systems
論文出版年： 2012
畢業學年度： 100
語文別： 英文
論文頁數： 74
中文關鍵詞： 全自動虛擬量測系統 、二階段虛擬量測架構
外文關鍵詞： Automatic Virtual metrology, Dual-stage VM architecture
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    • TFT-LCD產品品質對良率是很重要關鍵因素。而製程機台所生產出來的品質影響著良率，傳統的抽檢方法無法得知每片玻璃的品質。因此當機台超過規格時，產品異常無法即時發現，這些異常貨將會造成良率極大的損失。而虛擬量測是在沒有實際量測值情況下，可以達成監控每片產品所生產出品質的好方法。當考慮到全廠導入虛擬量測時，預測模型將機台數增加而快速增加，在這樣的情況下，假如我們還使用傳統方式，使用大量的歷史資料一台一台去建模，龐大的人力及資金成本將使全廠導入虛擬量測窒礙難行。所以有一套全自動虛擬量測系統，它有自動移植及更新的功能可以解決此問題，並且複製特定機台的模到其他同型還沒建模的機台，結果全廠使用全自動虛擬量測建立預測模可以節省大量的人力及時間。在TFT-LCD工廠，所有的製程機台被分為三類，包含單階段、雙階段和混合機台，每一類被選出一台代表性的機台，將全自動虛擬量測系統應用到代表性的機台。實際實施後結果顯示，自動量測系統能夠有效的預測出代表性的機台的量測值，所以自動量測系統也能精準預測其他種類的機台，除此之外自動量測系統必須處理大量的虛擬資料，所以主記憶體型資料庫技術(Main Memory Database, MMDB)被提出應用在全自動虛擬量測系統的資料處理方面。自動量測系統採用了MMDB能夠有效降低整體系統的成本，有較佳的資料儲存、快速的資料查詢及較低的資料庫成本。 最後，全自動虛擬量測系統已經成功導入TFT-LCD工廠的五代廠和六代廠，當應用全自動虛擬量測導入全廠時，效益被評估出來。結果顯示全自動虛擬量測導入全廠會降低整體的cycle time進而讓產能增加。

    Processing quality of thin film transistor-liquid crystal display (TFT-LCD) manufacturing is a key factor for production yield. The processing quality of tool will affect the production yield. The conventional sampling approach cannot receive processing quality of each product. Therefore, when the equipment is out of control, the defects can not be found in time, which will result in a great yield loss. Virtual metrology (VM) is a good resolution to the problem of conjecturing manufacturing quality of a process tool based on data sensed from the process tool without physical metrology operations. When considering fab-wide VM implementation, the number of conjecture models will increase rapidly with the growing number of tools. Under such condition, if we still take the traditional method to create models one by one with a lot of historical data, then huge cost in human resources and capital will make the fab-wide VM implementation impossible. The AVM systems can have the function of automatic fanning-out and model-refreshing to solve the above-mentioned problem and copy the conjecture model of a certain tool and apply it to other tools that have no conjecture models. As a result, AVM can be automatically deployed fab-wide without waste in tremendous man-power and time for establishing conjecture models. In TFT-LCD factory, all process tools are sorted to be three types, namely single-stage, dual-stage and mixed equipment. One of each type is chosen to demonstrate this AVM architecture for TFT-LCD manufacturing. Three experimental results are predicted well by AVM, so the AVM can also do that in the other tools. In addition, AVMS needs to handle a large volume of VM-related data, a novel AVMS architecture is proposed based on Main Memory Database (MMDB) technology. The novel AVMS architecture adopts a free commercial MMDB to significantly reduce total system cost and have better data-storage efficiency, superior data-query performance, and lower database cost. Finally, The AVM system has been successfully deployed in a fifth generation and sixth TFT-LCD factory and a benefit equation is established to evaluate the profitability of applying AVM fab-wide. The evaluation result shows that AVM fab-wide implementation is expected to gain extra production volume output due to cycle-time reduction.

    摘 要 I ABSTRACT II 致 謝 III ACKNOWLEDGEMENTS IV CONTENTS V FIGURE CONTENTS VII TABLE CONTENTS IX CHAPTER 1 INTRODUCTION 1 1.1 Background and Motivation 1 1.2 Purpose of this Dissertation 6 1.3 Accuracy Evaluator 8 1.4 Organization 8 CHAPTER 2 INTRODUCTION TO THE AVM SYSTEM 9 CHAPTER 3 DEPLOYMENT EXAMPLES OF THE AVM SYSTEM 14 3.1 Single-Stage Type: CF Photo Spacer 14 3.1.1 The Single-Stage VM Problem 15 3.1.2 The Single-Stage VM Architecture 16 3.1.3 Illustrative Example 16 3.2 Dual-Stage Type: TFT CVD 20 3.2.1 The Indirect VM Problem 20 3.2.2 The Dual-stage Indirect VM Architecture (DIVMA) 21 3.2.3 Illustrative Examples 23 3.2.3.1 Example 1: G1 Conjecturing 23 3.2.3.2 Example 2: G2 Conjecturing 27 3.2.4 Early Warnings Provided by DIVMA 30 3.3 Mixed-Stage Type: TFT Photo 31 3.3.1 The Mixed-Stage VM Problem 31 3.3.2 The Single-stage VM Architecture 32 3.3.3 Illustrative Example 33 CHAPTER 4 A NOVEL AUTOMATIC VIRTUAL METROLOGY SYSTEM ARCHITECTURE FOR TFT-LCD INDUSTRY BASED ON MAIN MEMORY DATABASE 36 4.1 Foundation 36 4.2 MMDB-Based AVMS Architectural Design 39 4.2.1 MMDB-Based AVMS Architectural Design 40 4.2.2 Design of the New AVMS Architecture 41 4.3 Design of Core Functional Mechanisms 44 4.3.1 Design of Automatic Data-Backup Mechanism 44 4.3.2 Design of Automatic Data-Query Sources Integration Mechanism 46 4.4 System Implementation 47 4.4.1 Implementation of Area DB 47 4.4.2 Implementation of Central DB 48 4.4.3 Implementation of VM Backup Controller 48 4.4.4 Implementation of VM Data Provider 50 4.5 Integrated Tests and Performance Evaluation 53 4.5.1 Data-Storage Performance Comparison 53 4.5.2 Data-Query Performance Comparison 54 4.5.3 Database Cost Comparison 55 CHAPTER 5 BENEFIT MODEL OF AVM FOR THE TFT-LCD INDUSTRY 57 CHAPTER 6 CONCLUSIONS AND FUTURE WORK 63 6.1 Conclusions 63 6.2 Future Work 64 ABBREVIATION LIST 67 REFERENCES 70

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